12/5/2012	8:21:40 AM	Main Vac valve closed
12/5/2012	8:21:53 AM	Main Vac valve opened
12/5/2012	8:22:49 AM	Recipe started at 8:22 AM
12/5/2012	8:22:49 AM	Helium valve closed
12/5/2012	8:22:49 AM	H2 valve closed
12/5/2012	8:22:49 AM	BCl3 valve closed
12/5/2012	8:22:49 AM	PH3 valve closed
12/5/2012	8:22:49 AM	SiCl4 pre valve closed
12/5/2012	8:22:49 AM	SiCl4 post valve closed
12/5/2012	8:22:49 AM	Main Vac valve closed
12/5/2012	8:22:49 AM	Bypass valve closed
12/5/2012	8:22:49 AM	Bubbler valve closed
12/5/2012	8:22:49 AM	Helium MFC set to  0.000000
12/5/2012	8:22:49 AM	H2 MFC set to  0.000000
12/5/2012	8:22:49 AM	BCl3 MFC set to  0.000000
12/5/2012	8:22:49 AM	PH3 MFC set to  0.000000
12/5/2012	8:22:49 AM	SiCl4 MFC set to  0.000000
12/5/2012	8:22:49 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	8:22:49 AM	Tube furnace set to 0
12/5/2012	8:22:52 AM	Helium valve closed
12/5/2012	8:22:52 AM	BCl3 valve closed
12/5/2012	8:22:52 AM	PH3 valve closed
12/5/2012	8:22:52 AM	SiCl4 pre valve closed
12/5/2012	8:22:52 AM	SiCl4 post valve closed
12/5/2012	8:22:52 AM	Main Vac valve closed
12/5/2012	8:22:52 AM	Bypass valve closed
12/5/2012	8:22:52 AM	Bubbler valve closed
12/5/2012	8:22:52 AM	H2 valve opened
12/5/2012	8:22:52 AM	Helium MFC set to  0.000000
12/5/2012	8:22:52 AM	H2 MFC set to  500.000000
12/5/2012	8:22:52 AM	BCl3 MFC set to  0.000000
12/5/2012	8:22:52 AM	PH3 MFC set to  0.000000
12/5/2012	8:22:52 AM	SiCl4 MFC set to  0.000000
12/5/2012	8:22:52 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	8:22:52 AM	Tube furnace set to 0
12/5/2012	8:24:09 AM	Helium valve closed
12/5/2012	8:24:09 AM	BCl3 valve closed
12/5/2012	8:24:09 AM	PH3 valve closed
12/5/2012	8:24:09 AM	SiCl4 pre valve closed
12/5/2012	8:24:09 AM	SiCl4 post valve closed
12/5/2012	8:24:09 AM	Main Vac valve closed
12/5/2012	8:24:09 AM	Bypass valve closed
12/5/2012	8:24:09 AM	H2 valve opened
12/5/2012	8:24:09 AM	Bubbler valve opened
12/5/2012	8:24:09 AM	Helium MFC set to  0.000000
12/5/2012	8:24:09 AM	H2 MFC set to  500.000000
12/5/2012	8:24:09 AM	BCl3 MFC set to  0.000000
12/5/2012	8:24:10 AM	PH3 MFC set to  0.000000
12/5/2012	8:24:10 AM	SiCl4 MFC set to  0.000000
12/5/2012	8:24:10 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	8:24:10 AM	Tube furnace set to 0
12/5/2012	8:24:11 AM	Helium valve closed
12/5/2012	8:24:11 AM	BCl3 valve closed
12/5/2012	8:24:11 AM	PH3 valve closed
12/5/2012	8:24:11 AM	SiCl4 pre valve closed
12/5/2012	8:24:11 AM	SiCl4 post valve closed
12/5/2012	8:24:11 AM	Main Vac valve closed
12/5/2012	8:24:11 AM	Bypass valve closed
12/5/2012	8:24:11 AM	H2 valve opened
12/5/2012	8:24:11 AM	Bubbler valve opened
12/5/2012	8:24:11 AM	Helium MFC set to  0.000000
12/5/2012	8:24:11 AM	H2 MFC set to  500.000000
12/5/2012	8:24:11 AM	BCl3 MFC set to  0.000000
12/5/2012	8:24:11 AM	PH3 MFC set to  0.000000
12/5/2012	8:24:11 AM	SiCl4 MFC set to  0.000000
12/5/2012	8:24:11 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	8:24:11 AM	Tube furnace set to 1000
12/5/2012	8:54:11 AM	Helium valve closed
12/5/2012	8:54:11 AM	PH3 valve closed
12/5/2012	8:54:11 AM	Main Vac valve closed
12/5/2012	8:54:11 AM	Bypass valve closed
12/5/2012	8:54:11 AM	H2 valve opened
12/5/2012	8:54:11 AM	BCl3 valve opened
12/5/2012	8:54:11 AM	SiCl4 pre valve opened
12/5/2012	8:54:11 AM	SiCl4 post valve opened
12/5/2012	8:54:11 AM	Bubbler valve opened
12/5/2012	8:54:11 AM	Helium MFC set to  0.000000
12/5/2012	8:54:11 AM	H2 MFC set to  500.000000
12/5/2012	8:54:11 AM	BCl3 MFC set to  1.000000
12/5/2012	8:54:11 AM	PH3 MFC set to  0.000000
12/5/2012	8:54:11 AM	SiCl4 MFC set to  50.000000
12/5/2012	8:54:11 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	8:54:11 AM	Tube furnace set to 1000
12/5/2012	9:07:11 AM	Helium valve closed
12/5/2012	9:07:11 AM	BCl3 valve closed
12/5/2012	9:07:11 AM	PH3 valve closed
12/5/2012	9:07:11 AM	SiCl4 pre valve closed
12/5/2012	9:07:11 AM	SiCl4 post valve closed
12/5/2012	9:07:11 AM	Main Vac valve closed
12/5/2012	9:07:11 AM	Bypass valve closed
12/5/2012	9:07:11 AM	H2 valve opened
12/5/2012	9:07:11 AM	Bubbler valve opened
12/5/2012	9:07:11 AM	Helium MFC set to  0.000000
12/5/2012	9:07:11 AM	H2 MFC set to  500.000000
12/5/2012	9:07:11 AM	BCl3 MFC set to  0.000000
12/5/2012	9:07:11 AM	PH3 MFC set to  0.000000
12/5/2012	9:07:11 AM	SiCl4 MFC set to  0.000000
12/5/2012	9:07:11 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:07:11 AM	Tube furnace set to 750
12/5/2012	9:12:11 AM	H2 valve closed
12/5/2012	9:12:11 AM	BCl3 valve closed
12/5/2012	9:12:11 AM	PH3 valve closed
12/5/2012	9:12:11 AM	SiCl4 pre valve closed
12/5/2012	9:12:11 AM	SiCl4 post valve closed
12/5/2012	9:12:11 AM	Main Vac valve closed
12/5/2012	9:12:11 AM	Bypass valve closed
12/5/2012	9:12:11 AM	Helium valve opened
12/5/2012	9:12:11 AM	Bubbler valve opened
12/5/2012	9:12:11 AM	Helium MFC set to  500.000000
12/5/2012	9:12:11 AM	H2 MFC set to  0.000000
12/5/2012	9:12:11 AM	BCl3 MFC set to  0.000000
12/5/2012	9:12:11 AM	PH3 MFC set to  0.000000
12/5/2012	9:12:11 AM	SiCl4 MFC set to  0.000000
12/5/2012	9:12:11 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:12:11 AM	Tube furnace set to 0
12/5/2012	9:32:11 AM	Helium valve closed
12/5/2012	9:32:11 AM	H2 valve closed
12/5/2012	9:32:11 AM	BCl3 valve closed
12/5/2012	9:32:11 AM	PH3 valve closed
12/5/2012	9:32:11 AM	SiCl4 pre valve closed
12/5/2012	9:32:11 AM	SiCl4 post valve closed
12/5/2012	9:32:11 AM	Main Vac valve closed
12/5/2012	9:32:11 AM	Bypass valve closed
12/5/2012	9:32:11 AM	Bubbler valve closed
12/5/2012	9:32:12 AM	Helium MFC set to  0.000000
12/5/2012	9:32:12 AM	H2 MFC set to  0.000000
12/5/2012	9:32:12 AM	BCl3 MFC set to  0.000000
12/5/2012	9:32:12 AM	PH3 MFC set to  0.000000
12/5/2012	9:32:12 AM	SiCl4 MFC set to  0.000000
12/5/2012	9:32:12 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:32:12 AM	Tube furnace set to 0
12/5/2012	9:32:13 AM	Run finished at 9:32 AM
12/5/2012	9:36:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/5/2012	9:36:21 AM	Recipe started at 9:36 AM
12/5/2012	9:36:21 AM	Helium valve closed
12/5/2012	9:36:21 AM	H2 valve closed
12/5/2012	9:36:21 AM	BCl3 valve closed
12/5/2012	9:36:21 AM	PH3 valve closed
12/5/2012	9:36:21 AM	SiCl4 pre valve closed
12/5/2012	9:36:21 AM	SiCl4 post valve closed
12/5/2012	9:36:21 AM	Main Vac valve closed
12/5/2012	9:36:21 AM	Bubbler valve closed
12/5/2012	9:36:21 AM	Bypass valve opened
12/5/2012	9:36:21 AM	Helium MFC set to  0.000000
12/5/2012	9:36:21 AM	H2 MFC set to  0.000000
12/5/2012	9:36:21 AM	BCl3 MFC set to  0.000000
12/5/2012	9:36:21 AM	PH3 MFC set to  0.000000
12/5/2012	9:36:21 AM	SiCl4 MFC set to  0.000000
12/5/2012	9:36:21 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:36:21 AM	Tube furnace set to 0
12/5/2012	9:37:37 AM	Helium valve closed
12/5/2012	9:37:37 AM	H2 valve closed
12/5/2012	9:37:37 AM	BCl3 valve closed
12/5/2012	9:37:37 AM	PH3 valve closed
12/5/2012	9:37:37 AM	SiCl4 pre valve closed
12/5/2012	9:37:37 AM	SiCl4 post valve closed
12/5/2012	9:37:37 AM	Main Vac valve closed
12/5/2012	9:37:37 AM	Bubbler valve closed
12/5/2012	9:37:37 AM	Bypass valve opened
12/5/2012	9:37:37 AM	Helium MFC set to  0.000000
12/5/2012	9:37:37 AM	H2 MFC set to  0.000000
12/5/2012	9:37:37 AM	BCl3 MFC set to  0.000000
12/5/2012	9:37:37 AM	PH3 MFC set to  0.000000
12/5/2012	9:37:37 AM	SiCl4 MFC set to  0.000000
12/5/2012	9:37:37 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:37:37 AM	Tube furnace set to 0
12/5/2012	9:38:38 AM	Helium valve closed
12/5/2012	9:38:38 AM	H2 valve closed
12/5/2012	9:38:38 AM	BCl3 valve closed
12/5/2012	9:38:38 AM	PH3 valve closed
12/5/2012	9:38:38 AM	SiCl4 pre valve closed
12/5/2012	9:38:38 AM	SiCl4 post valve closed
12/5/2012	9:38:38 AM	Bypass valve closed
12/5/2012	9:38:38 AM	Bubbler valve closed
12/5/2012	9:38:38 AM	Main Vac valve opened
12/5/2012	9:38:38 AM	Helium MFC set to  0.000000
12/5/2012	9:38:38 AM	H2 MFC set to  0.000000
12/5/2012	9:38:38 AM	BCl3 MFC set to  0.000000
12/5/2012	9:38:38 AM	PH3 MFC set to  0.000000
12/5/2012	9:38:38 AM	SiCl4 MFC set to  0.000000
12/5/2012	9:38:38 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:38:38 AM	Tube furnace set to 0
12/5/2012	9:38:39 AM	Run finished at 9:38 AM
12/5/2012	9:38:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/5/2012	9:48:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/5/2012	9:49:09 AM	Recipe started at 9:49 AM
12/5/2012	9:49:09 AM	Helium valve closed
12/5/2012	9:49:09 AM	H2 valve closed
12/5/2012	9:49:09 AM	BCl3 valve closed
12/5/2012	9:49:09 AM	PH3 valve closed
12/5/2012	9:49:09 AM	SiCl4 pre valve closed
12/5/2012	9:49:09 AM	SiCl4 post valve closed
12/5/2012	9:49:09 AM	Main Vac valve closed
12/5/2012	9:49:09 AM	Bubbler valve closed
12/5/2012	9:49:09 AM	Bypass valve opened
12/5/2012	9:49:09 AM	Helium MFC set to  0.000000
12/5/2012	9:49:09 AM	H2 MFC set to  0.000000
12/5/2012	9:49:09 AM	BCl3 MFC set to  0.000000
12/5/2012	9:49:09 AM	PH3 MFC set to  0.000000
12/5/2012	9:49:09 AM	SiCl4 MFC set to  0.000000
12/5/2012	9:49:09 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:49:09 AM	Tube furnace set to 0
12/5/2012	9:49:10 AM	Helium valve closed
12/5/2012	9:49:10 AM	H2 valve closed
12/5/2012	9:49:10 AM	BCl3 valve closed
12/5/2012	9:49:10 AM	PH3 valve closed
12/5/2012	9:49:10 AM	SiCl4 pre valve closed
12/5/2012	9:49:10 AM	SiCl4 post valve closed
12/5/2012	9:49:10 AM	Main Vac valve closed
12/5/2012	9:49:10 AM	Bubbler valve closed
12/5/2012	9:49:10 AM	Bypass valve opened
12/5/2012	9:49:10 AM	Helium MFC set to  0.000000
12/5/2012	9:49:10 AM	H2 MFC set to  0.000000
12/5/2012	9:49:10 AM	BCl3 MFC set to  0.000000
12/5/2012	9:49:10 AM	PH3 MFC set to  0.000000
12/5/2012	9:49:10 AM	SiCl4 MFC set to  0.000000
12/5/2012	9:49:10 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:49:10 AM	Tube furnace set to 0
12/5/2012	9:49:10 AM	Helium valve closed
12/5/2012	9:49:10 AM	H2 valve closed
12/5/2012	9:49:10 AM	BCl3 valve closed
12/5/2012	9:49:10 AM	PH3 valve closed
12/5/2012	9:49:10 AM	SiCl4 pre valve closed
12/5/2012	9:49:10 AM	SiCl4 post valve closed
12/5/2012	9:49:10 AM	Bypass valve closed
12/5/2012	9:49:10 AM	Bubbler valve closed
12/5/2012	9:49:10 AM	Main Vac valve opened
12/5/2012	9:49:10 AM	Helium MFC set to  0.000000
12/5/2012	9:49:10 AM	H2 MFC set to  0.000000
12/5/2012	9:49:10 AM	BCl3 MFC set to  0.000000
12/5/2012	9:49:10 AM	PH3 MFC set to  0.000000
12/5/2012	9:49:10 AM	SiCl4 MFC set to  0.000000
12/5/2012	9:49:10 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:49:10 AM	Tube furnace set to 0
12/5/2012	9:49:40 AM	H2 valve closed
12/5/2012	9:49:40 AM	BCl3 valve closed
12/5/2012	9:49:40 AM	PH3 valve closed
12/5/2012	9:49:40 AM	SiCl4 pre valve closed
12/5/2012	9:49:40 AM	SiCl4 post valve closed
12/5/2012	9:49:40 AM	Bypass valve closed
12/5/2012	9:49:40 AM	Bubbler valve closed
12/5/2012	9:49:40 AM	Helium valve opened
12/5/2012	9:49:40 AM	Main Vac valve opened
12/5/2012	9:49:40 AM	Helium MFC set to  20.000000
12/5/2012	9:49:40 AM	H2 MFC set to  0.000000
12/5/2012	9:49:40 AM	BCl3 MFC set to  0.000000
12/5/2012	9:49:40 AM	PH3 MFC set to  0.000000
12/5/2012	9:49:40 AM	SiCl4 MFC set to  0.000000
12/5/2012	9:49:40 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:49:40 AM	Tube furnace set to 0
12/5/2012	9:50:10 AM	Helium valve closed
12/5/2012	9:50:10 AM	H2 valve closed
12/5/2012	9:50:10 AM	BCl3 valve closed
12/5/2012	9:50:10 AM	PH3 valve closed
12/5/2012	9:50:10 AM	SiCl4 pre valve closed
12/5/2012	9:50:10 AM	SiCl4 post valve closed
12/5/2012	9:50:10 AM	Bypass valve closed
12/5/2012	9:50:10 AM	Bubbler valve closed
12/5/2012	9:50:10 AM	Main Vac valve opened
12/5/2012	9:50:10 AM	Helium MFC set to  0.000000
12/5/2012	9:50:10 AM	H2 MFC set to  0.000000
12/5/2012	9:50:10 AM	BCl3 MFC set to  0.000000
12/5/2012	9:50:10 AM	PH3 MFC set to  0.000000
12/5/2012	9:50:10 AM	SiCl4 MFC set to  0.000000
12/5/2012	9:50:10 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:50:11 AM	Tube furnace set to 0
12/5/2012	9:50:41 AM	H2 valve closed
12/5/2012	9:50:41 AM	BCl3 valve closed
12/5/2012	9:50:41 AM	PH3 valve closed
12/5/2012	9:50:41 AM	SiCl4 pre valve closed
12/5/2012	9:50:41 AM	SiCl4 post valve closed
12/5/2012	9:50:41 AM	Bypass valve closed
12/5/2012	9:50:41 AM	Bubbler valve closed
12/5/2012	9:50:41 AM	Helium valve opened
12/5/2012	9:50:41 AM	Main Vac valve opened
12/5/2012	9:50:41 AM	Helium MFC set to  20.000000
12/5/2012	9:50:41 AM	H2 MFC set to  0.000000
12/5/2012	9:50:41 AM	BCl3 MFC set to  0.000000
12/5/2012	9:50:41 AM	PH3 MFC set to  0.000000
12/5/2012	9:50:41 AM	SiCl4 MFC set to  0.000000
12/5/2012	9:50:41 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:50:41 AM	Tube furnace set to 0
12/5/2012	9:51:11 AM	Helium valve closed
12/5/2012	9:51:11 AM	H2 valve closed
12/5/2012	9:51:11 AM	BCl3 valve closed
12/5/2012	9:51:11 AM	PH3 valve closed
12/5/2012	9:51:11 AM	SiCl4 pre valve closed
12/5/2012	9:51:11 AM	SiCl4 post valve closed
12/5/2012	9:51:11 AM	Bypass valve closed
12/5/2012	9:51:11 AM	Bubbler valve closed
12/5/2012	9:51:11 AM	Main Vac valve opened
12/5/2012	9:51:11 AM	Helium MFC set to  0.000000
12/5/2012	9:51:11 AM	H2 MFC set to  0.000000
12/5/2012	9:51:11 AM	BCl3 MFC set to  0.000000
12/5/2012	9:51:11 AM	PH3 MFC set to  0.000000
12/5/2012	9:51:11 AM	SiCl4 MFC set to  0.000000
12/5/2012	9:51:11 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:51:11 AM	Tube furnace set to 0
12/5/2012	9:51:41 AM	H2 valve closed
12/5/2012	9:51:41 AM	BCl3 valve closed
12/5/2012	9:51:41 AM	PH3 valve closed
12/5/2012	9:51:41 AM	SiCl4 pre valve closed
12/5/2012	9:51:41 AM	SiCl4 post valve closed
12/5/2012	9:51:41 AM	Bypass valve closed
12/5/2012	9:51:41 AM	Bubbler valve closed
12/5/2012	9:51:41 AM	Helium valve opened
12/5/2012	9:51:41 AM	Main Vac valve opened
12/5/2012	9:51:41 AM	Helium MFC set to  20.000000
12/5/2012	9:51:41 AM	H2 MFC set to  0.000000
12/5/2012	9:51:41 AM	BCl3 MFC set to  0.000000
12/5/2012	9:51:41 AM	PH3 MFC set to  0.000000
12/5/2012	9:51:41 AM	SiCl4 MFC set to  0.000000
12/5/2012	9:51:41 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:51:41 AM	Tube furnace set to 0
12/5/2012	9:52:11 AM	Helium valve closed
12/5/2012	9:52:11 AM	H2 valve closed
12/5/2012	9:52:11 AM	BCl3 valve closed
12/5/2012	9:52:11 AM	PH3 valve closed
12/5/2012	9:52:11 AM	SiCl4 pre valve closed
12/5/2012	9:52:11 AM	SiCl4 post valve closed
12/5/2012	9:52:11 AM	Bypass valve closed
12/5/2012	9:52:11 AM	Bubbler valve closed
12/5/2012	9:52:11 AM	Main Vac valve opened
12/5/2012	9:52:11 AM	Helium MFC set to  0.000000
12/5/2012	9:52:11 AM	H2 MFC set to  0.000000
12/5/2012	9:52:11 AM	BCl3 MFC set to  0.000000
12/5/2012	9:52:11 AM	PH3 MFC set to  0.000000
12/5/2012	9:52:11 AM	SiCl4 MFC set to  0.000000
12/5/2012	9:52:11 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:52:12 AM	Tube furnace set to 0
12/5/2012	9:52:42 AM	H2 valve closed
12/5/2012	9:52:42 AM	BCl3 valve closed
12/5/2012	9:52:42 AM	PH3 valve closed
12/5/2012	9:52:42 AM	SiCl4 pre valve closed
12/5/2012	9:52:42 AM	SiCl4 post valve closed
12/5/2012	9:52:42 AM	Bypass valve closed
12/5/2012	9:52:42 AM	Bubbler valve closed
12/5/2012	9:52:42 AM	Helium valve opened
12/5/2012	9:52:42 AM	Main Vac valve opened
12/5/2012	9:52:42 AM	Helium MFC set to  20.000000
12/5/2012	9:52:42 AM	H2 MFC set to  0.000000
12/5/2012	9:52:42 AM	BCl3 MFC set to  0.000000
12/5/2012	9:52:42 AM	PH3 MFC set to  0.000000
12/5/2012	9:52:42 AM	SiCl4 MFC set to  0.000000
12/5/2012	9:52:42 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:52:42 AM	Tube furnace set to 0
12/5/2012	9:53:12 AM	Helium valve closed
12/5/2012	9:53:12 AM	H2 valve closed
12/5/2012	9:53:12 AM	BCl3 valve closed
12/5/2012	9:53:12 AM	PH3 valve closed
12/5/2012	9:53:12 AM	SiCl4 pre valve closed
12/5/2012	9:53:12 AM	SiCl4 post valve closed
12/5/2012	9:53:12 AM	Bypass valve closed
12/5/2012	9:53:12 AM	Bubbler valve closed
12/5/2012	9:53:12 AM	Main Vac valve opened
12/5/2012	9:53:12 AM	Helium MFC set to  0.000000
12/5/2012	9:53:12 AM	H2 MFC set to  0.000000
12/5/2012	9:53:12 AM	BCl3 MFC set to  0.000000
12/5/2012	9:53:12 AM	PH3 MFC set to  0.000000
12/5/2012	9:53:12 AM	SiCl4 MFC set to  0.000000
12/5/2012	9:53:12 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:53:12 AM	Tube furnace set to 0
12/5/2012	9:53:42 AM	H2 valve closed
12/5/2012	9:53:42 AM	BCl3 valve closed
12/5/2012	9:53:42 AM	PH3 valve closed
12/5/2012	9:53:42 AM	SiCl4 pre valve closed
12/5/2012	9:53:42 AM	SiCl4 post valve closed
12/5/2012	9:53:42 AM	Bypass valve closed
12/5/2012	9:53:42 AM	Bubbler valve closed
12/5/2012	9:53:42 AM	Helium valve opened
12/5/2012	9:53:42 AM	Main Vac valve opened
12/5/2012	9:53:42 AM	Helium MFC set to  20.000000
12/5/2012	9:53:42 AM	H2 MFC set to  0.000000
12/5/2012	9:53:42 AM	BCl3 MFC set to  0.000000
12/5/2012	9:53:42 AM	PH3 MFC set to  0.000000
12/5/2012	9:53:42 AM	SiCl4 MFC set to  0.000000
12/5/2012	9:53:42 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:53:42 AM	Tube furnace set to 0
12/5/2012	9:54:12 AM	Helium valve closed
12/5/2012	9:54:12 AM	H2 valve closed
12/5/2012	9:54:12 AM	BCl3 valve closed
12/5/2012	9:54:12 AM	PH3 valve closed
12/5/2012	9:54:12 AM	SiCl4 pre valve closed
12/5/2012	9:54:12 AM	SiCl4 post valve closed
12/5/2012	9:54:12 AM	Bypass valve closed
12/5/2012	9:54:12 AM	Bubbler valve closed
12/5/2012	9:54:12 AM	Main Vac valve opened
12/5/2012	9:54:12 AM	Helium MFC set to  0.000000
12/5/2012	9:54:12 AM	H2 MFC set to  0.000000
12/5/2012	9:54:12 AM	BCl3 MFC set to  0.000000
12/5/2012	9:54:12 AM	PH3 MFC set to  0.000000
12/5/2012	9:54:12 AM	SiCl4 MFC set to  0.000000
12/5/2012	9:54:12 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:54:12 AM	Tube furnace set to 0
12/5/2012	9:54:42 AM	H2 valve closed
12/5/2012	9:54:42 AM	BCl3 valve closed
12/5/2012	9:54:42 AM	PH3 valve closed
12/5/2012	9:54:42 AM	SiCl4 pre valve closed
12/5/2012	9:54:43 AM	SiCl4 post valve closed
12/5/2012	9:54:43 AM	Bypass valve closed
12/5/2012	9:54:43 AM	Bubbler valve closed
12/5/2012	9:54:43 AM	Helium valve opened
12/5/2012	9:54:43 AM	Main Vac valve opened
12/5/2012	9:54:43 AM	Helium MFC set to  20.000000
12/5/2012	9:54:43 AM	H2 MFC set to  0.000000
12/5/2012	9:54:43 AM	BCl3 MFC set to  0.000000
12/5/2012	9:54:43 AM	PH3 MFC set to  0.000000
12/5/2012	9:54:43 AM	SiCl4 MFC set to  0.000000
12/5/2012	9:54:43 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:54:43 AM	Tube furnace set to 0
12/5/2012	9:55:13 AM	Helium valve closed
12/5/2012	9:55:13 AM	H2 valve closed
12/5/2012	9:55:13 AM	BCl3 valve closed
12/5/2012	9:55:13 AM	PH3 valve closed
12/5/2012	9:55:13 AM	SiCl4 pre valve closed
12/5/2012	9:55:13 AM	SiCl4 post valve closed
12/5/2012	9:55:13 AM	Bypass valve closed
12/5/2012	9:55:13 AM	Bubbler valve closed
12/5/2012	9:55:13 AM	Main Vac valve opened
12/5/2012	9:55:13 AM	Helium MFC set to  0.000000
12/5/2012	9:55:13 AM	H2 MFC set to  0.000000
12/5/2012	9:55:13 AM	BCl3 MFC set to  0.000000
12/5/2012	9:55:13 AM	PH3 MFC set to  0.000000
12/5/2012	9:55:13 AM	SiCl4 MFC set to  0.000000
12/5/2012	9:55:13 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:55:13 AM	Tube furnace set to 0
12/5/2012	9:55:43 AM	H2 valve closed
12/5/2012	9:55:43 AM	BCl3 valve closed
12/5/2012	9:55:43 AM	PH3 valve closed
12/5/2012	9:55:43 AM	SiCl4 pre valve closed
12/5/2012	9:55:43 AM	SiCl4 post valve closed
12/5/2012	9:55:43 AM	Bypass valve closed
12/5/2012	9:55:43 AM	Bubbler valve closed
12/5/2012	9:55:43 AM	Helium valve opened
12/5/2012	9:55:43 AM	Main Vac valve opened
12/5/2012	9:55:43 AM	Helium MFC set to  20.000000
12/5/2012	9:55:43 AM	H2 MFC set to  0.000000
12/5/2012	9:55:43 AM	BCl3 MFC set to  0.000000
12/5/2012	9:55:43 AM	PH3 MFC set to  0.000000
12/5/2012	9:55:43 AM	SiCl4 MFC set to  0.000000
12/5/2012	9:55:43 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:55:43 AM	Tube furnace set to 0
12/5/2012	9:56:13 AM	Helium valve closed
12/5/2012	9:56:13 AM	H2 valve closed
12/5/2012	9:56:13 AM	BCl3 valve closed
12/5/2012	9:56:13 AM	PH3 valve closed
12/5/2012	9:56:13 AM	SiCl4 pre valve closed
12/5/2012	9:56:13 AM	SiCl4 post valve closed
12/5/2012	9:56:13 AM	Bypass valve closed
12/5/2012	9:56:13 AM	Bubbler valve closed
12/5/2012	9:56:13 AM	Main Vac valve opened
12/5/2012	9:56:13 AM	Helium MFC set to  0.000000
12/5/2012	9:56:13 AM	H2 MFC set to  0.000000
12/5/2012	9:56:13 AM	BCl3 MFC set to  0.000000
12/5/2012	9:56:13 AM	PH3 MFC set to  0.000000
12/5/2012	9:56:13 AM	SiCl4 MFC set to  0.000000
12/5/2012	9:56:13 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:56:13 AM	Tube furnace set to 0
12/5/2012	9:56:43 AM	H2 valve closed
12/5/2012	9:56:43 AM	BCl3 valve closed
12/5/2012	9:56:43 AM	PH3 valve closed
12/5/2012	9:56:43 AM	SiCl4 pre valve closed
12/5/2012	9:56:44 AM	SiCl4 post valve closed
12/5/2012	9:56:44 AM	Bypass valve closed
12/5/2012	9:56:44 AM	Bubbler valve closed
12/5/2012	9:56:44 AM	Helium valve opened
12/5/2012	9:56:44 AM	Main Vac valve opened
12/5/2012	9:56:44 AM	Helium MFC set to  20.000000
12/5/2012	9:56:44 AM	H2 MFC set to  0.000000
12/5/2012	9:56:44 AM	BCl3 MFC set to  0.000000
12/5/2012	9:56:44 AM	PH3 MFC set to  0.000000
12/5/2012	9:56:44 AM	SiCl4 MFC set to  0.000000
12/5/2012	9:56:44 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:56:44 AM	Tube furnace set to 0
12/5/2012	9:57:14 AM	Helium valve closed
12/5/2012	9:57:14 AM	H2 valve closed
12/5/2012	9:57:14 AM	BCl3 valve closed
12/5/2012	9:57:14 AM	PH3 valve closed
12/5/2012	9:57:14 AM	SiCl4 pre valve closed
12/5/2012	9:57:14 AM	SiCl4 post valve closed
12/5/2012	9:57:14 AM	Bypass valve closed
12/5/2012	9:57:14 AM	Bubbler valve closed
12/5/2012	9:57:14 AM	Main Vac valve opened
12/5/2012	9:57:14 AM	Helium MFC set to  0.000000
12/5/2012	9:57:14 AM	H2 MFC set to  0.000000
12/5/2012	9:57:14 AM	BCl3 MFC set to  0.000000
12/5/2012	9:57:14 AM	PH3 MFC set to  0.000000
12/5/2012	9:57:14 AM	SiCl4 MFC set to  0.000000
12/5/2012	9:57:14 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:57:14 AM	Tube furnace set to 0
12/5/2012	9:57:44 AM	H2 valve closed
12/5/2012	9:57:44 AM	BCl3 valve closed
12/5/2012	9:57:44 AM	PH3 valve closed
12/5/2012	9:57:44 AM	SiCl4 pre valve closed
12/5/2012	9:57:44 AM	SiCl4 post valve closed
12/5/2012	9:57:44 AM	Bypass valve closed
12/5/2012	9:57:44 AM	Bubbler valve closed
12/5/2012	9:57:44 AM	Helium valve opened
12/5/2012	9:57:44 AM	Main Vac valve opened
12/5/2012	9:57:44 AM	Helium MFC set to  20.000000
12/5/2012	9:57:44 AM	H2 MFC set to  0.000000
12/5/2012	9:57:44 AM	BCl3 MFC set to  0.000000
12/5/2012	9:57:44 AM	PH3 MFC set to  0.000000
12/5/2012	9:57:44 AM	SiCl4 MFC set to  0.000000
12/5/2012	9:57:44 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:57:44 AM	Tube furnace set to 0
12/5/2012	9:58:14 AM	Helium valve closed
12/5/2012	9:58:14 AM	H2 valve closed
12/5/2012	9:58:14 AM	BCl3 valve closed
12/5/2012	9:58:14 AM	PH3 valve closed
12/5/2012	9:58:14 AM	SiCl4 pre valve closed
12/5/2012	9:58:14 AM	SiCl4 post valve closed
12/5/2012	9:58:14 AM	Bypass valve closed
12/5/2012	9:58:14 AM	Bubbler valve closed
12/5/2012	9:58:14 AM	Main Vac valve opened
12/5/2012	9:58:14 AM	Helium MFC set to  0.000000
12/5/2012	9:58:14 AM	H2 MFC set to  0.000000
12/5/2012	9:58:14 AM	BCl3 MFC set to  0.000000
12/5/2012	9:58:14 AM	PH3 MFC set to  0.000000
12/5/2012	9:58:14 AM	SiCl4 MFC set to  0.000000
12/5/2012	9:58:14 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:58:14 AM	Tube furnace set to 0
12/5/2012	9:58:44 AM	H2 valve closed
12/5/2012	9:58:44 AM	BCl3 valve closed
12/5/2012	9:58:44 AM	PH3 valve closed
12/5/2012	9:58:44 AM	SiCl4 pre valve closed
12/5/2012	9:58:44 AM	SiCl4 post valve closed
12/5/2012	9:58:44 AM	Bypass valve closed
12/5/2012	9:58:44 AM	Bubbler valve closed
12/5/2012	9:58:44 AM	Helium valve opened
12/5/2012	9:58:44 AM	Main Vac valve opened
12/5/2012	9:58:44 AM	Helium MFC set to  20.000000
12/5/2012	9:58:44 AM	H2 MFC set to  0.000000
12/5/2012	9:58:44 AM	BCl3 MFC set to  0.000000
12/5/2012	9:58:44 AM	PH3 MFC set to  0.000000
12/5/2012	9:58:44 AM	SiCl4 MFC set to  0.000000
12/5/2012	9:58:45 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:58:45 AM	Tube furnace set to 0
12/5/2012	9:59:15 AM	Helium valve closed
12/5/2012	9:59:15 AM	H2 valve closed
12/5/2012	9:59:15 AM	BCl3 valve closed
12/5/2012	9:59:15 AM	PH3 valve closed
12/5/2012	9:59:15 AM	SiCl4 pre valve closed
12/5/2012	9:59:15 AM	SiCl4 post valve closed
12/5/2012	9:59:15 AM	Bypass valve closed
12/5/2012	9:59:15 AM	Bubbler valve closed
12/5/2012	9:59:15 AM	Main Vac valve opened
12/5/2012	9:59:15 AM	Helium MFC set to  0.000000
12/5/2012	9:59:15 AM	H2 MFC set to  0.000000
12/5/2012	9:59:15 AM	BCl3 MFC set to  0.000000
12/5/2012	9:59:15 AM	PH3 MFC set to  0.000000
12/5/2012	9:59:15 AM	SiCl4 MFC set to  0.000000
12/5/2012	9:59:15 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:59:15 AM	Tube furnace set to 0
12/5/2012	9:59:16 AM	Run finished at 9:59 AM
12/5/2012	9:59:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/5/2012	10:00:15 AM	Main Vac valve closed
12/5/2012	10:00:27 AM	Main Vac valve opened
12/5/2012	10:01:50 AM	Main Vac valve closed
12/5/2012	10:02:03 AM	Main Vac valve opened
12/5/2012	10:02:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/5/2012	10:02:35 AM	Recipe started at 10:02 AM
12/5/2012	10:02:35 AM	Helium valve closed
12/5/2012	10:02:35 AM	H2 valve closed
12/5/2012	10:02:35 AM	BCl3 valve closed
12/5/2012	10:02:35 AM	PH3 valve closed
12/5/2012	10:02:35 AM	SiCl4 pre valve closed
12/5/2012	10:02:35 AM	SiCl4 post valve closed
12/5/2012	10:02:35 AM	Main Vac valve closed
12/5/2012	10:02:35 AM	Bubbler valve closed
12/5/2012	10:02:35 AM	Bypass valve opened
12/5/2012	10:02:35 AM	Helium MFC set to  0.000000
12/5/2012	10:02:35 AM	H2 MFC set to  0.000000
12/5/2012	10:02:35 AM	BCl3 MFC set to  0.000000
12/5/2012	10:02:35 AM	PH3 MFC set to  0.000000
12/5/2012	10:02:35 AM	SiCl4 MFC set to  0.000000
12/5/2012	10:02:35 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	10:02:35 AM	Tube furnace set to 0
12/5/2012	10:02:35 AM	Helium valve closed
12/5/2012	10:02:35 AM	H2 valve closed
12/5/2012	10:02:35 AM	BCl3 valve closed
12/5/2012	10:02:35 AM	PH3 valve closed
12/5/2012	10:02:35 AM	SiCl4 pre valve closed
12/5/2012	10:02:35 AM	SiCl4 post valve closed
12/5/2012	10:02:35 AM	Main Vac valve closed
12/5/2012	10:02:35 AM	Bubbler valve closed
12/5/2012	10:02:35 AM	Bypass valve opened
12/5/2012	10:02:35 AM	Helium MFC set to  0.000000
12/5/2012	10:02:35 AM	H2 MFC set to  0.000000
12/5/2012	10:02:35 AM	BCl3 MFC set to  0.000000
12/5/2012	10:02:35 AM	PH3 MFC set to  0.000000
12/5/2012	10:02:35 AM	SiCl4 MFC set to  0.000000
12/5/2012	10:02:35 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	10:02:35 AM	Tube furnace set to 0
12/5/2012	10:02:36 AM	Helium valve closed
12/5/2012	10:02:36 AM	H2 valve closed
12/5/2012	10:02:36 AM	BCl3 valve closed
12/5/2012	10:02:36 AM	PH3 valve closed
12/5/2012	10:02:36 AM	SiCl4 pre valve closed
12/5/2012	10:02:36 AM	SiCl4 post valve closed
12/5/2012	10:02:36 AM	Bypass valve closed
12/5/2012	10:02:36 AM	Bubbler valve closed
12/5/2012	10:02:36 AM	Main Vac valve opened
12/5/2012	10:02:36 AM	Helium MFC set to  0.000000
12/5/2012	10:02:36 AM	H2 MFC set to  0.000000
12/5/2012	10:02:36 AM	BCl3 MFC set to  0.000000
12/5/2012	10:02:36 AM	PH3 MFC set to  0.000000
12/5/2012	10:02:36 AM	SiCl4 MFC set to  0.000000
12/5/2012	10:02:36 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	10:02:36 AM	Tube furnace set to 0
12/5/2012	10:02:40 AM	H2 valve closed
12/5/2012	10:02:40 AM	BCl3 valve closed
12/5/2012	10:02:40 AM	PH3 valve closed
12/5/2012	10:02:40 AM	SiCl4 pre valve closed
12/5/2012	10:02:40 AM	SiCl4 post valve closed
12/5/2012	10:02:40 AM	Bypass valve closed
12/5/2012	10:02:40 AM	Bubbler valve closed
12/5/2012	10:02:40 AM	Helium valve opened
12/5/2012	10:02:40 AM	Main Vac valve opened
12/5/2012	10:02:40 AM	Helium MFC set to  20.000000
12/5/2012	10:02:40 AM	H2 MFC set to  0.000000
12/5/2012	10:02:40 AM	BCl3 MFC set to  0.000000
12/5/2012	10:02:40 AM	PH3 MFC set to  0.000000
12/5/2012	10:02:40 AM	SiCl4 MFC set to  0.000000
12/5/2012	10:02:40 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	10:02:40 AM	Tube furnace set to 0
12/5/2012	10:03:10 AM	Helium valve closed
12/5/2012	10:03:10 AM	H2 valve closed
12/5/2012	10:03:10 AM	BCl3 valve closed
12/5/2012	10:03:10 AM	PH3 valve closed
12/5/2012	10:03:10 AM	SiCl4 pre valve closed
12/5/2012	10:03:10 AM	SiCl4 post valve closed
12/5/2012	10:03:10 AM	Bypass valve closed
12/5/2012	10:03:10 AM	Bubbler valve closed
12/5/2012	10:03:10 AM	Main Vac valve opened
12/5/2012	10:03:10 AM	Helium MFC set to  0.000000
12/5/2012	10:03:10 AM	H2 MFC set to  0.000000
12/5/2012	10:03:10 AM	BCl3 MFC set to  0.000000
12/5/2012	10:03:10 AM	PH3 MFC set to  0.000000
12/5/2012	10:03:10 AM	SiCl4 MFC set to  0.000000
12/5/2012	10:03:10 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	10:03:10 AM	Tube furnace set to 0
12/5/2012	10:03:40 AM	H2 valve closed
12/5/2012	10:03:40 AM	BCl3 valve closed
12/5/2012	10:03:40 AM	PH3 valve closed
12/5/2012	10:03:40 AM	SiCl4 pre valve closed
12/5/2012	10:03:40 AM	SiCl4 post valve closed
12/5/2012	10:03:40 AM	Bypass valve closed
12/5/2012	10:03:40 AM	Bubbler valve closed
12/5/2012	10:03:40 AM	Helium valve opened
12/5/2012	10:03:40 AM	Main Vac valve opened
12/5/2012	10:03:40 AM	Helium MFC set to  20.000000
12/5/2012	10:03:40 AM	H2 MFC set to  0.000000
12/5/2012	10:03:40 AM	BCl3 MFC set to  0.000000
12/5/2012	10:03:40 AM	PH3 MFC set to  0.000000
12/5/2012	10:03:40 AM	SiCl4 MFC set to  0.000000
12/5/2012	10:03:40 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	10:03:41 AM	Tube furnace set to 0
12/5/2012	10:04:11 AM	Helium valve closed
12/5/2012	10:04:11 AM	H2 valve closed
12/5/2012	10:04:11 AM	BCl3 valve closed
12/5/2012	10:04:11 AM	PH3 valve closed
12/5/2012	10:04:11 AM	SiCl4 pre valve closed
12/5/2012	10:04:11 AM	SiCl4 post valve closed
12/5/2012	10:04:11 AM	Bypass valve closed
12/5/2012	10:04:11 AM	Bubbler valve closed
12/5/2012	10:04:11 AM	Main Vac valve opened
12/5/2012	10:04:11 AM	Helium MFC set to  0.000000
12/5/2012	10:04:11 AM	H2 MFC set to  0.000000
12/5/2012	10:04:11 AM	BCl3 MFC set to  0.000000
12/5/2012	10:04:11 AM	PH3 MFC set to  0.000000
12/5/2012	10:04:11 AM	SiCl4 MFC set to  0.000000
12/5/2012	10:04:11 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	10:04:11 AM	Tube furnace set to 0
12/5/2012	10:04:41 AM	H2 valve closed
12/5/2012	10:04:41 AM	BCl3 valve closed
12/5/2012	10:04:41 AM	PH3 valve closed
12/5/2012	10:04:41 AM	SiCl4 pre valve closed
12/5/2012	10:04:41 AM	SiCl4 post valve closed
12/5/2012	10:04:41 AM	Bypass valve closed
12/5/2012	10:04:41 AM	Bubbler valve closed
12/5/2012	10:04:41 AM	Helium valve opened
12/5/2012	10:04:41 AM	Main Vac valve opened
12/5/2012	10:04:41 AM	Helium MFC set to  20.000000
12/5/2012	10:04:41 AM	H2 MFC set to  0.000000
12/5/2012	10:04:41 AM	BCl3 MFC set to  0.000000
12/5/2012	10:04:41 AM	PH3 MFC set to  0.000000
12/5/2012	10:04:41 AM	SiCl4 MFC set to  0.000000
12/5/2012	10:04:41 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	10:04:41 AM	Tube furnace set to 0
12/5/2012	10:05:11 AM	Helium valve closed
12/5/2012	10:05:11 AM	H2 valve closed
12/5/2012	10:05:11 AM	BCl3 valve closed
12/5/2012	10:05:11 AM	PH3 valve closed
12/5/2012	10:05:11 AM	SiCl4 pre valve closed
12/5/2012	10:05:11 AM	SiCl4 post valve closed
12/5/2012	10:05:11 AM	Bypass valve closed
12/5/2012	10:05:11 AM	Bubbler valve closed
12/5/2012	10:05:11 AM	Main Vac valve opened
12/5/2012	10:05:11 AM	Helium MFC set to  0.000000
12/5/2012	10:05:11 AM	H2 MFC set to  0.000000
12/5/2012	10:05:11 AM	BCl3 MFC set to  0.000000
12/5/2012	10:05:11 AM	PH3 MFC set to  0.000000
12/5/2012	10:05:11 AM	SiCl4 MFC set to  0.000000
12/5/2012	10:05:11 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	10:05:11 AM	Tube furnace set to 0
12/5/2012	10:05:41 AM	H2 valve closed
12/5/2012	10:05:41 AM	BCl3 valve closed
12/5/2012	10:05:41 AM	PH3 valve closed
12/5/2012	10:05:41 AM	SiCl4 pre valve closed
12/5/2012	10:05:41 AM	SiCl4 post valve closed
12/5/2012	10:05:41 AM	Bypass valve closed
12/5/2012	10:05:41 AM	Bubbler valve closed
12/5/2012	10:05:41 AM	Helium valve opened
12/5/2012	10:05:41 AM	Main Vac valve opened
12/5/2012	10:05:41 AM	Helium MFC set to  20.000000
12/5/2012	10:05:41 AM	H2 MFC set to  0.000000
12/5/2012	10:05:41 AM	BCl3 MFC set to  0.000000
12/5/2012	10:05:41 AM	PH3 MFC set to  0.000000
12/5/2012	10:05:41 AM	SiCl4 MFC set to  0.000000
12/5/2012	10:05:41 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	10:05:42 AM	Tube furnace set to 0
12/5/2012	10:06:12 AM	Helium valve closed
12/5/2012	10:06:12 AM	H2 valve closed
12/5/2012	10:06:12 AM	BCl3 valve closed
12/5/2012	10:06:12 AM	PH3 valve closed
12/5/2012	10:06:12 AM	SiCl4 pre valve closed
12/5/2012	10:06:12 AM	SiCl4 post valve closed
12/5/2012	10:06:12 AM	Bypass valve closed
12/5/2012	10:06:12 AM	Bubbler valve closed
12/5/2012	10:06:12 AM	Main Vac valve opened
12/5/2012	10:06:12 AM	Helium MFC set to  0.000000
12/5/2012	10:06:12 AM	H2 MFC set to  0.000000
12/5/2012	10:06:12 AM	BCl3 MFC set to  0.000000
12/5/2012	10:06:12 AM	PH3 MFC set to  0.000000
12/5/2012	10:06:12 AM	SiCl4 MFC set to  0.000000
12/5/2012	10:06:12 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	10:06:12 AM	Tube furnace set to 0
12/5/2012	10:06:42 AM	H2 valve closed
12/5/2012	10:06:42 AM	BCl3 valve closed
12/5/2012	10:06:42 AM	PH3 valve closed
12/5/2012	10:06:42 AM	SiCl4 pre valve closed
12/5/2012	10:06:42 AM	SiCl4 post valve closed
12/5/2012	10:06:42 AM	Bypass valve closed
12/5/2012	10:06:42 AM	Bubbler valve closed
12/5/2012	10:06:42 AM	Helium valve opened
12/5/2012	10:06:42 AM	Main Vac valve opened
12/5/2012	10:06:42 AM	Helium MFC set to  20.000000
12/5/2012	10:06:42 AM	H2 MFC set to  0.000000
12/5/2012	10:06:42 AM	BCl3 MFC set to  0.000000
12/5/2012	10:06:42 AM	PH3 MFC set to  0.000000
12/5/2012	10:06:42 AM	SiCl4 MFC set to  0.000000
12/5/2012	10:06:42 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	10:06:42 AM	Tube furnace set to 0
12/5/2012	10:07:12 AM	Helium valve closed
12/5/2012	10:07:12 AM	H2 valve closed
12/5/2012	10:07:12 AM	BCl3 valve closed
12/5/2012	10:07:12 AM	PH3 valve closed
12/5/2012	10:07:12 AM	SiCl4 pre valve closed
12/5/2012	10:07:12 AM	SiCl4 post valve closed
12/5/2012	10:07:12 AM	Bypass valve closed
12/5/2012	10:07:12 AM	Bubbler valve closed
12/5/2012	10:07:12 AM	Main Vac valve opened
12/5/2012	10:07:12 AM	Helium MFC set to  0.000000
12/5/2012	10:07:12 AM	H2 MFC set to  0.000000
12/5/2012	10:07:12 AM	BCl3 MFC set to  0.000000
12/5/2012	10:07:12 AM	PH3 MFC set to  0.000000
12/5/2012	10:07:12 AM	SiCl4 MFC set to  0.000000
12/5/2012	10:07:12 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	10:07:12 AM	Tube furnace set to 0
12/5/2012	10:07:42 AM	H2 valve closed
12/5/2012	10:07:42 AM	BCl3 valve closed
12/5/2012	10:07:42 AM	PH3 valve closed
12/5/2012	10:07:42 AM	SiCl4 pre valve closed
12/5/2012	10:07:42 AM	SiCl4 post valve closed
12/5/2012	10:07:42 AM	Bypass valve closed
12/5/2012	10:07:42 AM	Bubbler valve closed
12/5/2012	10:07:42 AM	Helium valve opened
12/5/2012	10:07:42 AM	Main Vac valve opened
12/5/2012	10:07:42 AM	Helium MFC set to  20.000000
12/5/2012	10:07:42 AM	H2 MFC set to  0.000000
12/5/2012	10:07:42 AM	BCl3 MFC set to  0.000000
12/5/2012	10:07:42 AM	PH3 MFC set to  0.000000
12/5/2012	10:07:42 AM	SiCl4 MFC set to  0.000000
12/5/2012	10:07:42 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	10:07:43 AM	Tube furnace set to 0
12/5/2012	10:08:13 AM	Helium valve closed
12/5/2012	10:08:13 AM	H2 valve closed
12/5/2012	10:08:13 AM	BCl3 valve closed
12/5/2012	10:08:13 AM	PH3 valve closed
12/5/2012	10:08:13 AM	SiCl4 pre valve closed
12/5/2012	10:08:13 AM	SiCl4 post valve closed
12/5/2012	10:08:13 AM	Bypass valve closed
12/5/2012	10:08:13 AM	Bubbler valve closed
12/5/2012	10:08:13 AM	Main Vac valve opened
12/5/2012	10:08:13 AM	Helium MFC set to  0.000000
12/5/2012	10:08:13 AM	H2 MFC set to  0.000000
12/5/2012	10:08:13 AM	BCl3 MFC set to  0.000000
12/5/2012	10:08:13 AM	PH3 MFC set to  0.000000
12/5/2012	10:08:13 AM	SiCl4 MFC set to  0.000000
12/5/2012	10:08:13 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	10:08:13 AM	Tube furnace set to 0
12/5/2012	10:08:43 AM	H2 valve closed
12/5/2012	10:08:43 AM	BCl3 valve closed
12/5/2012	10:08:43 AM	PH3 valve closed
12/5/2012	10:08:43 AM	SiCl4 pre valve closed
12/5/2012	10:08:43 AM	SiCl4 post valve closed
12/5/2012	10:08:43 AM	Bypass valve closed
12/5/2012	10:08:43 AM	Bubbler valve closed
12/5/2012	10:08:43 AM	Helium valve opened
12/5/2012	10:08:43 AM	Main Vac valve opened
12/5/2012	10:08:43 AM	Helium MFC set to  20.000000
12/5/2012	10:08:43 AM	H2 MFC set to  0.000000
12/5/2012	10:08:43 AM	BCl3 MFC set to  0.000000
12/5/2012	10:08:43 AM	PH3 MFC set to  0.000000
12/5/2012	10:08:43 AM	SiCl4 MFC set to  0.000000
12/5/2012	10:08:43 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	10:08:43 AM	Tube furnace set to 0
12/5/2012	10:09:13 AM	Helium valve closed
12/5/2012	10:09:13 AM	H2 valve closed
12/5/2012	10:09:13 AM	BCl3 valve closed
12/5/2012	10:09:13 AM	PH3 valve closed
12/5/2012	10:09:13 AM	SiCl4 pre valve closed
12/5/2012	10:09:13 AM	SiCl4 post valve closed
12/5/2012	10:09:13 AM	Bypass valve closed
12/5/2012	10:09:13 AM	Bubbler valve closed
12/5/2012	10:09:13 AM	Main Vac valve opened
12/5/2012	10:09:13 AM	Helium MFC set to  0.000000
12/5/2012	10:09:13 AM	H2 MFC set to  0.000000
12/5/2012	10:09:13 AM	BCl3 MFC set to  0.000000
12/5/2012	10:09:13 AM	PH3 MFC set to  0.000000
12/5/2012	10:09:13 AM	SiCl4 MFC set to  0.000000
12/5/2012	10:09:13 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	10:09:13 AM	Tube furnace set to 0
12/5/2012	10:09:43 AM	H2 valve closed
12/5/2012	10:09:43 AM	BCl3 valve closed
12/5/2012	10:09:43 AM	PH3 valve closed
12/5/2012	10:09:43 AM	SiCl4 pre valve closed
12/5/2012	10:09:43 AM	SiCl4 post valve closed
12/5/2012	10:09:43 AM	Bypass valve closed
12/5/2012	10:09:43 AM	Bubbler valve closed
12/5/2012	10:09:43 AM	Helium valve opened
12/5/2012	10:09:43 AM	Main Vac valve opened
12/5/2012	10:09:43 AM	Helium MFC set to  20.000000
12/5/2012	10:09:43 AM	H2 MFC set to  0.000000
12/5/2012	10:09:43 AM	BCl3 MFC set to  0.000000
12/5/2012	10:09:43 AM	PH3 MFC set to  0.000000
12/5/2012	10:09:43 AM	SiCl4 MFC set to  0.000000
12/5/2012	10:09:43 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	10:09:44 AM	Tube furnace set to 0
12/5/2012	10:10:14 AM	Helium valve closed
12/5/2012	10:10:14 AM	H2 valve closed
12/5/2012	10:10:14 AM	BCl3 valve closed
12/5/2012	10:10:14 AM	PH3 valve closed
12/5/2012	10:10:14 AM	SiCl4 pre valve closed
12/5/2012	10:10:14 AM	SiCl4 post valve closed
12/5/2012	10:10:14 AM	Bypass valve closed
12/5/2012	10:10:14 AM	Bubbler valve closed
12/5/2012	10:10:14 AM	Main Vac valve opened
12/5/2012	10:10:14 AM	Helium MFC set to  0.000000
12/5/2012	10:10:14 AM	H2 MFC set to  0.000000
12/5/2012	10:10:14 AM	BCl3 MFC set to  0.000000
12/5/2012	10:10:14 AM	PH3 MFC set to  0.000000
12/5/2012	10:10:14 AM	SiCl4 MFC set to  0.000000
12/5/2012	10:10:14 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	10:10:14 AM	Tube furnace set to 0
12/5/2012	10:10:44 AM	H2 valve closed
12/5/2012	10:10:44 AM	BCl3 valve closed
12/5/2012	10:10:44 AM	PH3 valve closed
12/5/2012	10:10:44 AM	SiCl4 pre valve closed
12/5/2012	10:10:44 AM	SiCl4 post valve closed
12/5/2012	10:10:44 AM	Bypass valve closed
12/5/2012	10:10:44 AM	Bubbler valve closed
12/5/2012	10:10:44 AM	Helium valve opened
12/5/2012	10:10:44 AM	Main Vac valve opened
12/5/2012	10:10:44 AM	Helium MFC set to  20.000000
12/5/2012	10:10:44 AM	H2 MFC set to  0.000000
12/5/2012	10:10:44 AM	BCl3 MFC set to  0.000000
12/5/2012	10:10:44 AM	PH3 MFC set to  0.000000
12/5/2012	10:10:44 AM	SiCl4 MFC set to  0.000000
12/5/2012	10:10:44 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	10:10:44 AM	Tube furnace set to 0
12/5/2012	10:11:14 AM	Helium valve closed
12/5/2012	10:11:14 AM	H2 valve closed
12/5/2012	10:11:14 AM	BCl3 valve closed
12/5/2012	10:11:14 AM	PH3 valve closed
12/5/2012	10:11:14 AM	SiCl4 pre valve closed
12/5/2012	10:11:14 AM	SiCl4 post valve closed
12/5/2012	10:11:14 AM	Bypass valve closed
12/5/2012	10:11:14 AM	Bubbler valve closed
12/5/2012	10:11:14 AM	Main Vac valve opened
12/5/2012	10:11:14 AM	Helium MFC set to  0.000000
12/5/2012	10:11:14 AM	H2 MFC set to  0.000000
12/5/2012	10:11:14 AM	BCl3 MFC set to  0.000000
12/5/2012	10:11:14 AM	PH3 MFC set to  0.000000
12/5/2012	10:11:14 AM	SiCl4 MFC set to  0.000000
12/5/2012	10:11:14 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	10:11:14 AM	Tube furnace set to 0
12/5/2012	10:11:44 AM	H2 valve closed
12/5/2012	10:11:44 AM	BCl3 valve closed
12/5/2012	10:11:44 AM	PH3 valve closed
12/5/2012	10:11:44 AM	SiCl4 pre valve closed
12/5/2012	10:11:44 AM	SiCl4 post valve closed
12/5/2012	10:11:44 AM	Bypass valve closed
12/5/2012	10:11:44 AM	Bubbler valve closed
12/5/2012	10:11:44 AM	Helium valve opened
12/5/2012	10:11:44 AM	Main Vac valve opened
12/5/2012	10:11:44 AM	Helium MFC set to  20.000000
12/5/2012	10:11:44 AM	H2 MFC set to  0.000000
12/5/2012	10:11:44 AM	BCl3 MFC set to  0.000000
12/5/2012	10:11:44 AM	PH3 MFC set to  0.000000
12/5/2012	10:11:44 AM	SiCl4 MFC set to  0.000000
12/5/2012	10:11:44 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	10:11:44 AM	Tube furnace set to 0
12/5/2012	10:12:15 AM	Helium valve closed
12/5/2012	10:12:15 AM	H2 valve closed
12/5/2012	10:12:15 AM	BCl3 valve closed
12/5/2012	10:12:15 AM	PH3 valve closed
12/5/2012	10:12:15 AM	SiCl4 pre valve closed
12/5/2012	10:12:15 AM	SiCl4 post valve closed
12/5/2012	10:12:15 AM	Bypass valve closed
12/5/2012	10:12:15 AM	Bubbler valve closed
12/5/2012	10:12:15 AM	Main Vac valve opened
12/5/2012	10:12:15 AM	Helium MFC set to  0.000000
12/5/2012	10:12:15 AM	H2 MFC set to  0.000000
12/5/2012	10:12:15 AM	BCl3 MFC set to  0.000000
12/5/2012	10:12:15 AM	PH3 MFC set to  0.000000
12/5/2012	10:12:15 AM	SiCl4 MFC set to  0.000000
12/5/2012	10:12:15 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	10:12:15 AM	Tube furnace set to 0
12/5/2012	10:12:16 AM	Run finished at 10:12 AM
12/5/2012	10:12:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/5/2012	10:18:44 AM	Main Vac valve closed
12/5/2012	10:18:57 AM	Main Vac valve opened
12/5/2012	10:19:17 AM	Recipe started at 10:19 AM
12/5/2012	10:19:17 AM	Helium valve closed
12/5/2012	10:19:17 AM	H2 valve closed
12/5/2012	10:19:17 AM	BCl3 valve closed
12/5/2012	10:19:17 AM	PH3 valve closed
12/5/2012	10:19:17 AM	SiCl4 pre valve closed
12/5/2012	10:19:17 AM	SiCl4 post valve closed
12/5/2012	10:19:17 AM	Main Vac valve closed
12/5/2012	10:19:17 AM	Bypass valve closed
12/5/2012	10:19:17 AM	Bubbler valve closed
12/5/2012	10:19:17 AM	Helium MFC set to  0.000000
12/5/2012	10:19:17 AM	H2 MFC set to  0.000000
12/5/2012	10:19:17 AM	BCl3 MFC set to  0.000000
12/5/2012	10:19:17 AM	PH3 MFC set to  0.000000
12/5/2012	10:19:17 AM	SiCl4 MFC set to  0.000000
12/5/2012	10:19:17 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	10:19:17 AM	Tube furnace set to 0
12/5/2012	10:19:20 AM	Helium valve closed
12/5/2012	10:19:20 AM	BCl3 valve closed
12/5/2012	10:19:20 AM	PH3 valve closed
12/5/2012	10:19:20 AM	SiCl4 pre valve closed
12/5/2012	10:19:20 AM	SiCl4 post valve closed
12/5/2012	10:19:20 AM	Main Vac valve closed
12/5/2012	10:19:20 AM	Bypass valve closed
12/5/2012	10:19:20 AM	Bubbler valve closed
12/5/2012	10:19:20 AM	H2 valve opened
12/5/2012	10:19:20 AM	Helium MFC set to  0.000000
12/5/2012	10:19:20 AM	H2 MFC set to  500.000000
12/5/2012	10:19:20 AM	BCl3 MFC set to  0.000000
12/5/2012	10:19:20 AM	PH3 MFC set to  0.000000
12/5/2012	10:19:20 AM	SiCl4 MFC set to  0.000000
12/5/2012	10:19:20 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	10:19:21 AM	Tube furnace set to 0
12/5/2012	10:20:34 AM	Helium valve closed
12/5/2012	10:20:34 AM	BCl3 valve closed
12/5/2012	10:20:34 AM	PH3 valve closed
12/5/2012	10:20:34 AM	SiCl4 pre valve closed
12/5/2012	10:20:34 AM	SiCl4 post valve closed
12/5/2012	10:20:34 AM	Main Vac valve closed
12/5/2012	10:20:34 AM	Bypass valve closed
12/5/2012	10:20:34 AM	H2 valve opened
12/5/2012	10:20:34 AM	Bubbler valve opened
12/5/2012	10:20:34 AM	Helium MFC set to  0.000000
12/5/2012	10:20:34 AM	H2 MFC set to  500.000000
12/5/2012	10:20:34 AM	BCl3 MFC set to  0.000000
12/5/2012	10:20:34 AM	PH3 MFC set to  0.000000
12/5/2012	10:20:34 AM	SiCl4 MFC set to  0.000000
12/5/2012	10:20:34 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	10:20:34 AM	Tube furnace set to 0
12/5/2012	10:20:35 AM	Helium valve closed
12/5/2012	10:20:35 AM	BCl3 valve closed
12/5/2012	10:20:35 AM	PH3 valve closed
12/5/2012	10:20:35 AM	SiCl4 pre valve closed
12/5/2012	10:20:35 AM	SiCl4 post valve closed
12/5/2012	10:20:35 AM	Main Vac valve closed
12/5/2012	10:20:35 AM	Bypass valve closed
12/5/2012	10:20:35 AM	H2 valve opened
12/5/2012	10:20:35 AM	Bubbler valve opened
12/5/2012	10:20:35 AM	Helium MFC set to  0.000000
12/5/2012	10:20:35 AM	H2 MFC set to  500.000000
12/5/2012	10:20:35 AM	BCl3 MFC set to  0.000000
12/5/2012	10:20:35 AM	PH3 MFC set to  0.000000
12/5/2012	10:20:35 AM	SiCl4 MFC set to  0.000000
12/5/2012	10:20:35 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	10:20:35 AM	Tube furnace set to 1000
12/5/2012	10:50:35 AM	Helium valve closed
12/5/2012	10:50:35 AM	PH3 valve closed
12/5/2012	10:50:35 AM	Main Vac valve closed
12/5/2012	10:50:35 AM	Bypass valve closed
12/5/2012	10:50:35 AM	H2 valve opened
12/5/2012	10:50:35 AM	BCl3 valve opened
12/5/2012	10:50:35 AM	SiCl4 pre valve opened
12/5/2012	10:50:35 AM	SiCl4 post valve opened
12/5/2012	10:50:35 AM	Bubbler valve opened
12/5/2012	10:50:35 AM	Helium MFC set to  0.000000
12/5/2012	10:50:35 AM	H2 MFC set to  500.000000
12/5/2012	10:50:35 AM	BCl3 MFC set to  1.000000
12/5/2012	10:50:35 AM	PH3 MFC set to  0.000000
12/5/2012	10:50:35 AM	SiCl4 MFC set to  50.000000
12/5/2012	10:50:35 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	10:50:35 AM	Tube furnace set to 1000
12/5/2012	11:02:35 AM	Helium valve closed
12/5/2012	11:02:35 AM	BCl3 valve closed
12/5/2012	11:02:35 AM	PH3 valve closed
12/5/2012	11:02:35 AM	SiCl4 pre valve closed
12/5/2012	11:02:35 AM	SiCl4 post valve closed
12/5/2012	11:02:35 AM	Main Vac valve closed
12/5/2012	11:02:35 AM	Bypass valve closed
12/5/2012	11:02:35 AM	H2 valve opened
12/5/2012	11:02:35 AM	Bubbler valve opened
12/5/2012	11:02:35 AM	Helium MFC set to  0.000000
12/5/2012	11:02:35 AM	H2 MFC set to  500.000000
12/5/2012	11:02:35 AM	BCl3 MFC set to  0.000000
12/5/2012	11:02:35 AM	PH3 MFC set to  0.000000
12/5/2012	11:02:35 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:02:35 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:02:36 AM	Tube furnace set to 750
12/5/2012	11:07:36 AM	H2 valve closed
12/5/2012	11:07:36 AM	BCl3 valve closed
12/5/2012	11:07:36 AM	PH3 valve closed
12/5/2012	11:07:36 AM	SiCl4 pre valve closed
12/5/2012	11:07:36 AM	SiCl4 post valve closed
12/5/2012	11:07:36 AM	Main Vac valve closed
12/5/2012	11:07:36 AM	Bypass valve closed
12/5/2012	11:07:36 AM	Helium valve opened
12/5/2012	11:07:36 AM	Bubbler valve opened
12/5/2012	11:07:36 AM	Helium MFC set to  500.000000
12/5/2012	11:07:36 AM	H2 MFC set to  0.000000
12/5/2012	11:07:36 AM	BCl3 MFC set to  0.000000
12/5/2012	11:07:36 AM	PH3 MFC set to  0.000000
12/5/2012	11:07:36 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:07:36 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:07:36 AM	Tube furnace set to 0
12/5/2012	11:18:35 AM	Helium valve closed
12/5/2012	11:18:35 AM	H2 valve closed
12/5/2012	11:18:35 AM	BCl3 valve closed
12/5/2012	11:18:35 AM	PH3 valve closed
12/5/2012	11:18:35 AM	SiCl4 pre valve closed
12/5/2012	11:18:35 AM	SiCl4 post valve closed
12/5/2012	11:18:35 AM	Main Vac valve closed
12/5/2012	11:18:35 AM	Bypass valve closed
12/5/2012	11:18:35 AM	Bubbler valve closed
12/5/2012	11:18:35 AM	Helium MFC set to  0.000000
12/5/2012	11:18:35 AM	H2 MFC set to  0.000000
12/5/2012	11:18:35 AM	BCl3 MFC set to  0.000000
12/5/2012	11:18:35 AM	PH3 MFC set to  0.000000
12/5/2012	11:18:35 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:18:35 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:18:35 AM	Tube furnace set to 0
12/5/2012	11:18:36 AM	Run finished at 11:18 AM
12/5/2012	11:24:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/5/2012	11:24:22 AM	Recipe started at 11:24 AM
12/5/2012	11:24:22 AM	Helium valve closed
12/5/2012	11:24:22 AM	H2 valve closed
12/5/2012	11:24:22 AM	BCl3 valve closed
12/5/2012	11:24:22 AM	PH3 valve closed
12/5/2012	11:24:22 AM	SiCl4 pre valve closed
12/5/2012	11:24:22 AM	SiCl4 post valve closed
12/5/2012	11:24:22 AM	Main Vac valve closed
12/5/2012	11:24:22 AM	Bubbler valve closed
12/5/2012	11:24:22 AM	Bypass valve opened
12/5/2012	11:24:22 AM	Helium MFC set to  0.000000
12/5/2012	11:24:22 AM	H2 MFC set to  0.000000
12/5/2012	11:24:22 AM	BCl3 MFC set to  0.000000
12/5/2012	11:24:22 AM	PH3 MFC set to  0.000000
12/5/2012	11:24:22 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:24:22 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:24:22 AM	Tube furnace set to 0
12/5/2012	11:25:41 AM	Helium valve closed
12/5/2012	11:25:41 AM	H2 valve closed
12/5/2012	11:25:41 AM	BCl3 valve closed
12/5/2012	11:25:41 AM	PH3 valve closed
12/5/2012	11:25:41 AM	SiCl4 pre valve closed
12/5/2012	11:25:41 AM	SiCl4 post valve closed
12/5/2012	11:25:41 AM	Main Vac valve closed
12/5/2012	11:25:41 AM	Bubbler valve closed
12/5/2012	11:25:41 AM	Bypass valve opened
12/5/2012	11:25:41 AM	Helium MFC set to  0.000000
12/5/2012	11:25:41 AM	H2 MFC set to  0.000000
12/5/2012	11:25:41 AM	BCl3 MFC set to  0.000000
12/5/2012	11:25:41 AM	PH3 MFC set to  0.000000
12/5/2012	11:25:41 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:25:41 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:25:41 AM	Tube furnace set to 0
12/5/2012	11:25:49 AM	Helium valve closed
12/5/2012	11:25:49 AM	H2 valve closed
12/5/2012	11:25:49 AM	BCl3 valve closed
12/5/2012	11:25:49 AM	PH3 valve closed
12/5/2012	11:25:49 AM	SiCl4 pre valve closed
12/5/2012	11:25:49 AM	SiCl4 post valve closed
12/5/2012	11:25:49 AM	Bypass valve closed
12/5/2012	11:25:49 AM	Bubbler valve closed
12/5/2012	11:25:49 AM	Main Vac valve opened
12/5/2012	11:25:49 AM	Helium MFC set to  0.000000
12/5/2012	11:25:49 AM	H2 MFC set to  0.000000
12/5/2012	11:25:49 AM	BCl3 MFC set to  0.000000
12/5/2012	11:25:49 AM	PH3 MFC set to  0.000000
12/5/2012	11:25:49 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:25:49 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:25:49 AM	Tube furnace set to 0
12/5/2012	11:25:50 AM	Run finished at 11:25 AM
12/5/2012	11:25:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/5/2012	11:26:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/5/2012	11:26:35 AM	Recipe started at 11:26 AM
12/5/2012	11:26:35 AM	Helium valve closed
12/5/2012	11:26:35 AM	H2 valve closed
12/5/2012	11:26:35 AM	BCl3 valve closed
12/5/2012	11:26:35 AM	PH3 valve closed
12/5/2012	11:26:35 AM	SiCl4 pre valve closed
12/5/2012	11:26:35 AM	SiCl4 post valve closed
12/5/2012	11:26:35 AM	Main Vac valve closed
12/5/2012	11:26:35 AM	Bubbler valve closed
12/5/2012	11:26:35 AM	Bypass valve opened
12/5/2012	11:26:35 AM	Helium MFC set to  0.000000
12/5/2012	11:26:35 AM	H2 MFC set to  0.000000
12/5/2012	11:26:35 AM	BCl3 MFC set to  0.000000
12/5/2012	11:26:35 AM	PH3 MFC set to  0.000000
12/5/2012	11:26:35 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:26:35 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:26:35 AM	Tube furnace set to 0
12/5/2012	11:26:35 AM	Helium valve closed
12/5/2012	11:26:35 AM	H2 valve closed
12/5/2012	11:26:35 AM	BCl3 valve closed
12/5/2012	11:26:35 AM	PH3 valve closed
12/5/2012	11:26:35 AM	SiCl4 pre valve closed
12/5/2012	11:26:35 AM	SiCl4 post valve closed
12/5/2012	11:26:35 AM	Main Vac valve closed
12/5/2012	11:26:35 AM	Bubbler valve closed
12/5/2012	11:26:35 AM	Bypass valve opened
12/5/2012	11:26:35 AM	Helium MFC set to  0.000000
12/5/2012	11:26:35 AM	H2 MFC set to  0.000000
12/5/2012	11:26:35 AM	BCl3 MFC set to  0.000000
12/5/2012	11:26:35 AM	PH3 MFC set to  0.000000
12/5/2012	11:26:35 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:26:35 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:26:36 AM	Tube furnace set to 0
12/5/2012	11:26:36 AM	Helium valve closed
12/5/2012	11:26:36 AM	H2 valve closed
12/5/2012	11:26:36 AM	BCl3 valve closed
12/5/2012	11:26:36 AM	PH3 valve closed
12/5/2012	11:26:36 AM	SiCl4 pre valve closed
12/5/2012	11:26:36 AM	SiCl4 post valve closed
12/5/2012	11:26:36 AM	Bypass valve closed
12/5/2012	11:26:36 AM	Bubbler valve closed
12/5/2012	11:26:36 AM	Main Vac valve opened
12/5/2012	11:26:36 AM	Helium MFC set to  0.000000
12/5/2012	11:26:36 AM	H2 MFC set to  0.000000
12/5/2012	11:26:36 AM	BCl3 MFC set to  0.000000
12/5/2012	11:26:36 AM	PH3 MFC set to  0.000000
12/5/2012	11:26:36 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:26:36 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:26:36 AM	Tube furnace set to 0
12/5/2012	11:27:06 AM	H2 valve closed
12/5/2012	11:27:06 AM	BCl3 valve closed
12/5/2012	11:27:06 AM	PH3 valve closed
12/5/2012	11:27:06 AM	SiCl4 pre valve closed
12/5/2012	11:27:06 AM	SiCl4 post valve closed
12/5/2012	11:27:06 AM	Bypass valve closed
12/5/2012	11:27:06 AM	Bubbler valve closed
12/5/2012	11:27:06 AM	Helium valve opened
12/5/2012	11:27:06 AM	Main Vac valve opened
12/5/2012	11:27:06 AM	Helium MFC set to  20.000000
12/5/2012	11:27:06 AM	H2 MFC set to  0.000000
12/5/2012	11:27:06 AM	BCl3 MFC set to  0.000000
12/5/2012	11:27:06 AM	PH3 MFC set to  0.000000
12/5/2012	11:27:06 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:27:06 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:27:06 AM	Tube furnace set to 0
12/5/2012	11:27:36 AM	Helium valve closed
12/5/2012	11:27:36 AM	H2 valve closed
12/5/2012	11:27:36 AM	BCl3 valve closed
12/5/2012	11:27:36 AM	PH3 valve closed
12/5/2012	11:27:36 AM	SiCl4 pre valve closed
12/5/2012	11:27:36 AM	SiCl4 post valve closed
12/5/2012	11:27:36 AM	Bypass valve closed
12/5/2012	11:27:36 AM	Bubbler valve closed
12/5/2012	11:27:36 AM	Main Vac valve opened
12/5/2012	11:27:36 AM	Helium MFC set to  0.000000
12/5/2012	11:27:36 AM	H2 MFC set to  0.000000
12/5/2012	11:27:36 AM	BCl3 MFC set to  0.000000
12/5/2012	11:27:36 AM	PH3 MFC set to  0.000000
12/5/2012	11:27:36 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:27:36 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:27:37 AM	Tube furnace set to 0
12/5/2012	11:28:07 AM	H2 valve closed
12/5/2012	11:28:07 AM	BCl3 valve closed
12/5/2012	11:28:07 AM	PH3 valve closed
12/5/2012	11:28:07 AM	SiCl4 pre valve closed
12/5/2012	11:28:07 AM	SiCl4 post valve closed
12/5/2012	11:28:07 AM	Bypass valve closed
12/5/2012	11:28:07 AM	Bubbler valve closed
12/5/2012	11:28:07 AM	Helium valve opened
12/5/2012	11:28:07 AM	Main Vac valve opened
12/5/2012	11:28:07 AM	Helium MFC set to  20.000000
12/5/2012	11:28:07 AM	H2 MFC set to  0.000000
12/5/2012	11:28:07 AM	BCl3 MFC set to  0.000000
12/5/2012	11:28:07 AM	PH3 MFC set to  0.000000
12/5/2012	11:28:07 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:28:07 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:28:07 AM	Tube furnace set to 0
12/5/2012	11:28:37 AM	Helium valve closed
12/5/2012	11:28:37 AM	H2 valve closed
12/5/2012	11:28:37 AM	BCl3 valve closed
12/5/2012	11:28:37 AM	PH3 valve closed
12/5/2012	11:28:37 AM	SiCl4 pre valve closed
12/5/2012	11:28:37 AM	SiCl4 post valve closed
12/5/2012	11:28:37 AM	Bypass valve closed
12/5/2012	11:28:37 AM	Bubbler valve closed
12/5/2012	11:28:37 AM	Main Vac valve opened
12/5/2012	11:28:37 AM	Helium MFC set to  0.000000
12/5/2012	11:28:37 AM	H2 MFC set to  0.000000
12/5/2012	11:28:37 AM	BCl3 MFC set to  0.000000
12/5/2012	11:28:37 AM	PH3 MFC set to  0.000000
12/5/2012	11:28:37 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:28:37 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:28:37 AM	Tube furnace set to 0
12/5/2012	11:29:07 AM	H2 valve closed
12/5/2012	11:29:07 AM	BCl3 valve closed
12/5/2012	11:29:07 AM	PH3 valve closed
12/5/2012	11:29:07 AM	SiCl4 pre valve closed
12/5/2012	11:29:07 AM	SiCl4 post valve closed
12/5/2012	11:29:07 AM	Bypass valve closed
12/5/2012	11:29:07 AM	Bubbler valve closed
12/5/2012	11:29:07 AM	Helium valve opened
12/5/2012	11:29:07 AM	Main Vac valve opened
12/5/2012	11:29:07 AM	Helium MFC set to  20.000000
12/5/2012	11:29:07 AM	H2 MFC set to  0.000000
12/5/2012	11:29:07 AM	BCl3 MFC set to  0.000000
12/5/2012	11:29:07 AM	PH3 MFC set to  0.000000
12/5/2012	11:29:07 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:29:07 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:29:07 AM	Tube furnace set to 0
12/5/2012	11:29:37 AM	Helium valve closed
12/5/2012	11:29:37 AM	H2 valve closed
12/5/2012	11:29:37 AM	BCl3 valve closed
12/5/2012	11:29:37 AM	PH3 valve closed
12/5/2012	11:29:37 AM	SiCl4 pre valve closed
12/5/2012	11:29:37 AM	SiCl4 post valve closed
12/5/2012	11:29:37 AM	Bypass valve closed
12/5/2012	11:29:37 AM	Bubbler valve closed
12/5/2012	11:29:37 AM	Main Vac valve opened
12/5/2012	11:29:37 AM	Helium MFC set to  0.000000
12/5/2012	11:29:37 AM	H2 MFC set to  0.000000
12/5/2012	11:29:37 AM	BCl3 MFC set to  0.000000
12/5/2012	11:29:37 AM	PH3 MFC set to  0.000000
12/5/2012	11:29:37 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:29:37 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:29:38 AM	Tube furnace set to 0
12/5/2012	11:30:08 AM	H2 valve closed
12/5/2012	11:30:08 AM	BCl3 valve closed
12/5/2012	11:30:08 AM	PH3 valve closed
12/5/2012	11:30:08 AM	SiCl4 pre valve closed
12/5/2012	11:30:08 AM	SiCl4 post valve closed
12/5/2012	11:30:08 AM	Bypass valve closed
12/5/2012	11:30:08 AM	Bubbler valve closed
12/5/2012	11:30:08 AM	Helium valve opened
12/5/2012	11:30:08 AM	Main Vac valve opened
12/5/2012	11:30:08 AM	Helium MFC set to  20.000000
12/5/2012	11:30:08 AM	H2 MFC set to  0.000000
12/5/2012	11:30:08 AM	BCl3 MFC set to  0.000000
12/5/2012	11:30:08 AM	PH3 MFC set to  0.000000
12/5/2012	11:30:08 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:30:08 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:30:08 AM	Tube furnace set to 0
12/5/2012	11:30:38 AM	Helium valve closed
12/5/2012	11:30:38 AM	H2 valve closed
12/5/2012	11:30:38 AM	BCl3 valve closed
12/5/2012	11:30:38 AM	PH3 valve closed
12/5/2012	11:30:38 AM	SiCl4 pre valve closed
12/5/2012	11:30:38 AM	SiCl4 post valve closed
12/5/2012	11:30:38 AM	Bypass valve closed
12/5/2012	11:30:38 AM	Bubbler valve closed
12/5/2012	11:30:38 AM	Main Vac valve opened
12/5/2012	11:30:38 AM	Helium MFC set to  0.000000
12/5/2012	11:30:38 AM	H2 MFC set to  0.000000
12/5/2012	11:30:38 AM	BCl3 MFC set to  0.000000
12/5/2012	11:30:38 AM	PH3 MFC set to  0.000000
12/5/2012	11:30:38 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:30:38 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:30:38 AM	Tube furnace set to 0
12/5/2012	11:31:08 AM	H2 valve closed
12/5/2012	11:31:08 AM	BCl3 valve closed
12/5/2012	11:31:08 AM	PH3 valve closed
12/5/2012	11:31:08 AM	SiCl4 pre valve closed
12/5/2012	11:31:08 AM	SiCl4 post valve closed
12/5/2012	11:31:08 AM	Bypass valve closed
12/5/2012	11:31:08 AM	Bubbler valve closed
12/5/2012	11:31:08 AM	Helium valve opened
12/5/2012	11:31:08 AM	Main Vac valve opened
12/5/2012	11:31:08 AM	Helium MFC set to  20.000000
12/5/2012	11:31:08 AM	H2 MFC set to  0.000000
12/5/2012	11:31:08 AM	BCl3 MFC set to  0.000000
12/5/2012	11:31:08 AM	PH3 MFC set to  0.000000
12/5/2012	11:31:08 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:31:08 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:31:08 AM	Tube furnace set to 0
12/5/2012	11:31:38 AM	Helium valve closed
12/5/2012	11:31:38 AM	H2 valve closed
12/5/2012	11:31:38 AM	BCl3 valve closed
12/5/2012	11:31:38 AM	PH3 valve closed
12/5/2012	11:31:38 AM	SiCl4 pre valve closed
12/5/2012	11:31:38 AM	SiCl4 post valve closed
12/5/2012	11:31:38 AM	Bypass valve closed
12/5/2012	11:31:38 AM	Bubbler valve closed
12/5/2012	11:31:38 AM	Main Vac valve opened
12/5/2012	11:31:38 AM	Helium MFC set to  0.000000
12/5/2012	11:31:38 AM	H2 MFC set to  0.000000
12/5/2012	11:31:38 AM	BCl3 MFC set to  0.000000
12/5/2012	11:31:38 AM	PH3 MFC set to  0.000000
12/5/2012	11:31:38 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:31:38 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:31:39 AM	Tube furnace set to 0
12/5/2012	11:32:09 AM	H2 valve closed
12/5/2012	11:32:09 AM	BCl3 valve closed
12/5/2012	11:32:09 AM	PH3 valve closed
12/5/2012	11:32:09 AM	SiCl4 pre valve closed
12/5/2012	11:32:09 AM	SiCl4 post valve closed
12/5/2012	11:32:09 AM	Bypass valve closed
12/5/2012	11:32:09 AM	Bubbler valve closed
12/5/2012	11:32:09 AM	Helium valve opened
12/5/2012	11:32:09 AM	Main Vac valve opened
12/5/2012	11:32:09 AM	Helium MFC set to  20.000000
12/5/2012	11:32:09 AM	H2 MFC set to  0.000000
12/5/2012	11:32:09 AM	BCl3 MFC set to  0.000000
12/5/2012	11:32:09 AM	PH3 MFC set to  0.000000
12/5/2012	11:32:09 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:32:09 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:32:09 AM	Tube furnace set to 0
12/5/2012	11:32:39 AM	Helium valve closed
12/5/2012	11:32:39 AM	H2 valve closed
12/5/2012	11:32:39 AM	BCl3 valve closed
12/5/2012	11:32:39 AM	PH3 valve closed
12/5/2012	11:32:39 AM	SiCl4 pre valve closed
12/5/2012	11:32:39 AM	SiCl4 post valve closed
12/5/2012	11:32:39 AM	Bypass valve closed
12/5/2012	11:32:39 AM	Bubbler valve closed
12/5/2012	11:32:39 AM	Main Vac valve opened
12/5/2012	11:32:39 AM	Helium MFC set to  0.000000
12/5/2012	11:32:39 AM	H2 MFC set to  0.000000
12/5/2012	11:32:39 AM	BCl3 MFC set to  0.000000
12/5/2012	11:32:39 AM	PH3 MFC set to  0.000000
12/5/2012	11:32:39 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:32:39 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:32:39 AM	Tube furnace set to 0
12/5/2012	11:33:09 AM	H2 valve closed
12/5/2012	11:33:09 AM	BCl3 valve closed
12/5/2012	11:33:09 AM	PH3 valve closed
12/5/2012	11:33:09 AM	SiCl4 pre valve closed
12/5/2012	11:33:09 AM	SiCl4 post valve closed
12/5/2012	11:33:09 AM	Bypass valve closed
12/5/2012	11:33:09 AM	Bubbler valve closed
12/5/2012	11:33:09 AM	Helium valve opened
12/5/2012	11:33:09 AM	Main Vac valve opened
12/5/2012	11:33:09 AM	Helium MFC set to  20.000000
12/5/2012	11:33:09 AM	H2 MFC set to  0.000000
12/5/2012	11:33:09 AM	BCl3 MFC set to  0.000000
12/5/2012	11:33:09 AM	PH3 MFC set to  0.000000
12/5/2012	11:33:09 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:33:09 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:33:09 AM	Tube furnace set to 0
12/5/2012	11:33:39 AM	Helium valve closed
12/5/2012	11:33:39 AM	H2 valve closed
12/5/2012	11:33:39 AM	BCl3 valve closed
12/5/2012	11:33:39 AM	PH3 valve closed
12/5/2012	11:33:39 AM	SiCl4 pre valve closed
12/5/2012	11:33:39 AM	SiCl4 post valve closed
12/5/2012	11:33:39 AM	Bypass valve closed
12/5/2012	11:33:39 AM	Bubbler valve closed
12/5/2012	11:33:39 AM	Main Vac valve opened
12/5/2012	11:33:39 AM	Helium MFC set to  0.000000
12/5/2012	11:33:39 AM	H2 MFC set to  0.000000
12/5/2012	11:33:39 AM	BCl3 MFC set to  0.000000
12/5/2012	11:33:39 AM	PH3 MFC set to  0.000000
12/5/2012	11:33:39 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:33:39 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:33:40 AM	Tube furnace set to 0
12/5/2012	11:34:10 AM	H2 valve closed
12/5/2012	11:34:10 AM	BCl3 valve closed
12/5/2012	11:34:10 AM	PH3 valve closed
12/5/2012	11:34:10 AM	SiCl4 pre valve closed
12/5/2012	11:34:10 AM	SiCl4 post valve closed
12/5/2012	11:34:10 AM	Bypass valve closed
12/5/2012	11:34:10 AM	Bubbler valve closed
12/5/2012	11:34:10 AM	Helium valve opened
12/5/2012	11:34:10 AM	Main Vac valve opened
12/5/2012	11:34:10 AM	Helium MFC set to  20.000000
12/5/2012	11:34:10 AM	H2 MFC set to  0.000000
12/5/2012	11:34:10 AM	BCl3 MFC set to  0.000000
12/5/2012	11:34:10 AM	PH3 MFC set to  0.000000
12/5/2012	11:34:10 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:34:10 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:34:10 AM	Tube furnace set to 0
12/5/2012	11:34:40 AM	Helium valve closed
12/5/2012	11:34:40 AM	H2 valve closed
12/5/2012	11:34:40 AM	BCl3 valve closed
12/5/2012	11:34:40 AM	PH3 valve closed
12/5/2012	11:34:40 AM	SiCl4 pre valve closed
12/5/2012	11:34:40 AM	SiCl4 post valve closed
12/5/2012	11:34:40 AM	Bypass valve closed
12/5/2012	11:34:40 AM	Bubbler valve closed
12/5/2012	11:34:40 AM	Main Vac valve opened
12/5/2012	11:34:40 AM	Helium MFC set to  0.000000
12/5/2012	11:34:40 AM	H2 MFC set to  0.000000
12/5/2012	11:34:40 AM	BCl3 MFC set to  0.000000
12/5/2012	11:34:40 AM	PH3 MFC set to  0.000000
12/5/2012	11:34:40 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:34:40 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:34:40 AM	Tube furnace set to 0
12/5/2012	11:35:10 AM	H2 valve closed
12/5/2012	11:35:10 AM	BCl3 valve closed
12/5/2012	11:35:10 AM	PH3 valve closed
12/5/2012	11:35:10 AM	SiCl4 pre valve closed
12/5/2012	11:35:10 AM	SiCl4 post valve closed
12/5/2012	11:35:10 AM	Bypass valve closed
12/5/2012	11:35:10 AM	Bubbler valve closed
12/5/2012	11:35:10 AM	Helium valve opened
12/5/2012	11:35:10 AM	Main Vac valve opened
12/5/2012	11:35:10 AM	Helium MFC set to  20.000000
12/5/2012	11:35:10 AM	H2 MFC set to  0.000000
12/5/2012	11:35:10 AM	BCl3 MFC set to  0.000000
12/5/2012	11:35:10 AM	PH3 MFC set to  0.000000
12/5/2012	11:35:10 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:35:10 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:35:10 AM	Tube furnace set to 0
12/5/2012	11:35:40 AM	Helium valve closed
12/5/2012	11:35:40 AM	H2 valve closed
12/5/2012	11:35:40 AM	BCl3 valve closed
12/5/2012	11:35:40 AM	PH3 valve closed
12/5/2012	11:35:40 AM	SiCl4 pre valve closed
12/5/2012	11:35:40 AM	SiCl4 post valve closed
12/5/2012	11:35:40 AM	Bypass valve closed
12/5/2012	11:35:40 AM	Bubbler valve closed
12/5/2012	11:35:40 AM	Main Vac valve opened
12/5/2012	11:35:40 AM	Helium MFC set to  0.000000
12/5/2012	11:35:40 AM	H2 MFC set to  0.000000
12/5/2012	11:35:40 AM	BCl3 MFC set to  0.000000
12/5/2012	11:35:40 AM	PH3 MFC set to  0.000000
12/5/2012	11:35:40 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:35:40 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:35:40 AM	Tube furnace set to 0
12/5/2012	11:36:11 AM	H2 valve closed
12/5/2012	11:36:11 AM	BCl3 valve closed
12/5/2012	11:36:11 AM	PH3 valve closed
12/5/2012	11:36:11 AM	SiCl4 pre valve closed
12/5/2012	11:36:11 AM	SiCl4 post valve closed
12/5/2012	11:36:11 AM	Bypass valve closed
12/5/2012	11:36:11 AM	Bubbler valve closed
12/5/2012	11:36:11 AM	Helium valve opened
12/5/2012	11:36:11 AM	Main Vac valve opened
12/5/2012	11:36:11 AM	Helium MFC set to  20.000000
12/5/2012	11:36:11 AM	H2 MFC set to  0.000000
12/5/2012	11:36:11 AM	BCl3 MFC set to  0.000000
12/5/2012	11:36:11 AM	PH3 MFC set to  0.000000
12/5/2012	11:36:11 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:36:11 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:36:11 AM	Tube furnace set to 0
12/5/2012	11:36:41 AM	Helium valve closed
12/5/2012	11:36:41 AM	H2 valve closed
12/5/2012	11:36:41 AM	BCl3 valve closed
12/5/2012	11:36:41 AM	PH3 valve closed
12/5/2012	11:36:41 AM	SiCl4 pre valve closed
12/5/2012	11:36:41 AM	SiCl4 post valve closed
12/5/2012	11:36:41 AM	Bypass valve closed
12/5/2012	11:36:41 AM	Bubbler valve closed
12/5/2012	11:36:41 AM	Main Vac valve opened
12/5/2012	11:36:41 AM	Helium MFC set to  0.000000
12/5/2012	11:36:41 AM	H2 MFC set to  0.000000
12/5/2012	11:36:41 AM	BCl3 MFC set to  0.000000
12/5/2012	11:36:41 AM	PH3 MFC set to  0.000000
12/5/2012	11:36:41 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:36:41 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:36:41 AM	Tube furnace set to 0
12/5/2012	11:36:42 AM	Run finished at 11:36 AM
12/5/2012	11:36:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/5/2012	11:48:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/5/2012	11:48:17 AM	Recipe started at 11:48 AM
12/5/2012	11:48:17 AM	Helium valve closed
12/5/2012	11:48:17 AM	H2 valve closed
12/5/2012	11:48:17 AM	BCl3 valve closed
12/5/2012	11:48:17 AM	PH3 valve closed
12/5/2012	11:48:17 AM	SiCl4 pre valve closed
12/5/2012	11:48:17 AM	SiCl4 post valve closed
12/5/2012	11:48:17 AM	Main Vac valve closed
12/5/2012	11:48:17 AM	Bubbler valve closed
12/5/2012	11:48:17 AM	Bypass valve opened
12/5/2012	11:48:17 AM	Helium MFC set to  0.000000
12/5/2012	11:48:17 AM	H2 MFC set to  0.000000
12/5/2012	11:48:17 AM	BCl3 MFC set to  0.000000
12/5/2012	11:48:17 AM	PH3 MFC set to  0.000000
12/5/2012	11:48:17 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:48:17 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:48:17 AM	Tube furnace set to 0
12/5/2012	11:48:18 AM	Helium valve closed
12/5/2012	11:48:18 AM	H2 valve closed
12/5/2012	11:48:18 AM	BCl3 valve closed
12/5/2012	11:48:18 AM	PH3 valve closed
12/5/2012	11:48:18 AM	SiCl4 pre valve closed
12/5/2012	11:48:18 AM	SiCl4 post valve closed
12/5/2012	11:48:18 AM	Main Vac valve closed
12/5/2012	11:48:18 AM	Bubbler valve closed
12/5/2012	11:48:18 AM	Bypass valve opened
12/5/2012	11:48:18 AM	Helium MFC set to  0.000000
12/5/2012	11:48:18 AM	H2 MFC set to  0.000000
12/5/2012	11:48:18 AM	BCl3 MFC set to  0.000000
12/5/2012	11:48:18 AM	PH3 MFC set to  0.000000
12/5/2012	11:48:18 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:48:18 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:48:18 AM	Tube furnace set to 0
12/5/2012	11:48:18 AM	Helium valve closed
12/5/2012	11:48:18 AM	H2 valve closed
12/5/2012	11:48:18 AM	BCl3 valve closed
12/5/2012	11:48:18 AM	PH3 valve closed
12/5/2012	11:48:18 AM	SiCl4 pre valve closed
12/5/2012	11:48:18 AM	SiCl4 post valve closed
12/5/2012	11:48:18 AM	Bypass valve closed
12/5/2012	11:48:18 AM	Bubbler valve closed
12/5/2012	11:48:18 AM	Main Vac valve opened
12/5/2012	11:48:18 AM	Helium MFC set to  0.000000
12/5/2012	11:48:18 AM	H2 MFC set to  0.000000
12/5/2012	11:48:18 AM	BCl3 MFC set to  0.000000
12/5/2012	11:48:18 AM	PH3 MFC set to  0.000000
12/5/2012	11:48:18 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:48:18 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:48:18 AM	Tube furnace set to 0
12/5/2012	11:48:19 AM	H2 valve closed
12/5/2012	11:48:19 AM	BCl3 valve closed
12/5/2012	11:48:19 AM	PH3 valve closed
12/5/2012	11:48:19 AM	SiCl4 pre valve closed
12/5/2012	11:48:19 AM	SiCl4 post valve closed
12/5/2012	11:48:19 AM	Bypass valve closed
12/5/2012	11:48:19 AM	Bubbler valve closed
12/5/2012	11:48:19 AM	Helium valve opened
12/5/2012	11:48:19 AM	Main Vac valve opened
12/5/2012	11:48:19 AM	Helium MFC set to  20.000000
12/5/2012	11:48:19 AM	H2 MFC set to  0.000000
12/5/2012	11:48:19 AM	BCl3 MFC set to  0.000000
12/5/2012	11:48:19 AM	PH3 MFC set to  0.000000
12/5/2012	11:48:19 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:48:19 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:48:19 AM	Tube furnace set to 0
12/5/2012	11:48:49 AM	Helium valve closed
12/5/2012	11:48:49 AM	H2 valve closed
12/5/2012	11:48:50 AM	BCl3 valve closed
12/5/2012	11:48:50 AM	PH3 valve closed
12/5/2012	11:48:50 AM	SiCl4 pre valve closed
12/5/2012	11:48:50 AM	SiCl4 post valve closed
12/5/2012	11:48:50 AM	Bypass valve closed
12/5/2012	11:48:50 AM	Bubbler valve closed
12/5/2012	11:48:50 AM	Main Vac valve opened
12/5/2012	11:48:50 AM	Helium MFC set to  0.000000
12/5/2012	11:48:50 AM	H2 MFC set to  0.000000
12/5/2012	11:48:50 AM	BCl3 MFC set to  0.000000
12/5/2012	11:48:50 AM	PH3 MFC set to  0.000000
12/5/2012	11:48:50 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:48:50 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:48:50 AM	Tube furnace set to 0
12/5/2012	11:49:20 AM	H2 valve closed
12/5/2012	11:49:20 AM	BCl3 valve closed
12/5/2012	11:49:20 AM	PH3 valve closed
12/5/2012	11:49:20 AM	SiCl4 pre valve closed
12/5/2012	11:49:20 AM	SiCl4 post valve closed
12/5/2012	11:49:20 AM	Bypass valve closed
12/5/2012	11:49:20 AM	Bubbler valve closed
12/5/2012	11:49:20 AM	Helium valve opened
12/5/2012	11:49:20 AM	Main Vac valve opened
12/5/2012	11:49:20 AM	Helium MFC set to  20.000000
12/5/2012	11:49:20 AM	H2 MFC set to  0.000000
12/5/2012	11:49:20 AM	BCl3 MFC set to  0.000000
12/5/2012	11:49:20 AM	PH3 MFC set to  0.000000
12/5/2012	11:49:20 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:49:20 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:49:20 AM	Tube furnace set to 0
12/5/2012	11:49:50 AM	Helium valve closed
12/5/2012	11:49:50 AM	H2 valve closed
12/5/2012	11:49:50 AM	BCl3 valve closed
12/5/2012	11:49:50 AM	PH3 valve closed
12/5/2012	11:49:50 AM	SiCl4 pre valve closed
12/5/2012	11:49:50 AM	SiCl4 post valve closed
12/5/2012	11:49:50 AM	Bypass valve closed
12/5/2012	11:49:50 AM	Bubbler valve closed
12/5/2012	11:49:50 AM	Main Vac valve opened
12/5/2012	11:49:50 AM	Helium MFC set to  0.000000
12/5/2012	11:49:50 AM	H2 MFC set to  0.000000
12/5/2012	11:49:50 AM	BCl3 MFC set to  0.000000
12/5/2012	11:49:50 AM	PH3 MFC set to  0.000000
12/5/2012	11:49:50 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:49:50 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:49:50 AM	Tube furnace set to 0
12/5/2012	11:50:20 AM	H2 valve closed
12/5/2012	11:50:20 AM	BCl3 valve closed
12/5/2012	11:50:20 AM	PH3 valve closed
12/5/2012	11:50:20 AM	SiCl4 pre valve closed
12/5/2012	11:50:20 AM	SiCl4 post valve closed
12/5/2012	11:50:20 AM	Bypass valve closed
12/5/2012	11:50:20 AM	Bubbler valve closed
12/5/2012	11:50:20 AM	Helium valve opened
12/5/2012	11:50:20 AM	Main Vac valve opened
12/5/2012	11:50:20 AM	Helium MFC set to  20.000000
12/5/2012	11:50:20 AM	H2 MFC set to  0.000000
12/5/2012	11:50:20 AM	BCl3 MFC set to  0.000000
12/5/2012	11:50:20 AM	PH3 MFC set to  0.000000
12/5/2012	11:50:20 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:50:20 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:50:20 AM	Tube furnace set to 0
12/5/2012	11:50:50 AM	Helium valve closed
12/5/2012	11:50:50 AM	H2 valve closed
12/5/2012	11:50:50 AM	BCl3 valve closed
12/5/2012	11:50:50 AM	PH3 valve closed
12/5/2012	11:50:50 AM	SiCl4 pre valve closed
12/5/2012	11:50:50 AM	SiCl4 post valve closed
12/5/2012	11:50:50 AM	Bypass valve closed
12/5/2012	11:50:51 AM	Bubbler valve closed
12/5/2012	11:50:51 AM	Main Vac valve opened
12/5/2012	11:50:51 AM	Helium MFC set to  0.000000
12/5/2012	11:50:51 AM	H2 MFC set to  0.000000
12/5/2012	11:50:51 AM	BCl3 MFC set to  0.000000
12/5/2012	11:50:51 AM	PH3 MFC set to  0.000000
12/5/2012	11:50:51 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:50:51 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:50:51 AM	Tube furnace set to 0
12/5/2012	11:51:21 AM	H2 valve closed
12/5/2012	11:51:21 AM	BCl3 valve closed
12/5/2012	11:51:21 AM	PH3 valve closed
12/5/2012	11:51:21 AM	SiCl4 pre valve closed
12/5/2012	11:51:21 AM	SiCl4 post valve closed
12/5/2012	11:51:21 AM	Bypass valve closed
12/5/2012	11:51:21 AM	Bubbler valve closed
12/5/2012	11:51:21 AM	Helium valve opened
12/5/2012	11:51:21 AM	Main Vac valve opened
12/5/2012	11:51:21 AM	Helium MFC set to  20.000000
12/5/2012	11:51:21 AM	H2 MFC set to  0.000000
12/5/2012	11:51:21 AM	BCl3 MFC set to  0.000000
12/5/2012	11:51:21 AM	PH3 MFC set to  0.000000
12/5/2012	11:51:21 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:51:21 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:51:21 AM	Tube furnace set to 0
12/5/2012	11:51:51 AM	Helium valve closed
12/5/2012	11:51:51 AM	H2 valve closed
12/5/2012	11:51:51 AM	BCl3 valve closed
12/5/2012	11:51:51 AM	PH3 valve closed
12/5/2012	11:51:51 AM	SiCl4 pre valve closed
12/5/2012	11:51:51 AM	SiCl4 post valve closed
12/5/2012	11:51:51 AM	Bypass valve closed
12/5/2012	11:51:51 AM	Bubbler valve closed
12/5/2012	11:51:51 AM	Main Vac valve opened
12/5/2012	11:51:51 AM	Helium MFC set to  0.000000
12/5/2012	11:51:51 AM	H2 MFC set to  0.000000
12/5/2012	11:51:51 AM	BCl3 MFC set to  0.000000
12/5/2012	11:51:51 AM	PH3 MFC set to  0.000000
12/5/2012	11:51:51 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:51:51 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:51:51 AM	Tube furnace set to 0
12/5/2012	11:52:21 AM	H2 valve closed
12/5/2012	11:52:21 AM	BCl3 valve closed
12/5/2012	11:52:21 AM	PH3 valve closed
12/5/2012	11:52:21 AM	SiCl4 pre valve closed
12/5/2012	11:52:21 AM	SiCl4 post valve closed
12/5/2012	11:52:21 AM	Bypass valve closed
12/5/2012	11:52:21 AM	Bubbler valve closed
12/5/2012	11:52:21 AM	Helium valve opened
12/5/2012	11:52:21 AM	Main Vac valve opened
12/5/2012	11:52:21 AM	Helium MFC set to  20.000000
12/5/2012	11:52:21 AM	H2 MFC set to  0.000000
12/5/2012	11:52:21 AM	BCl3 MFC set to  0.000000
12/5/2012	11:52:21 AM	PH3 MFC set to  0.000000
12/5/2012	11:52:21 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:52:21 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:52:21 AM	Tube furnace set to 0
12/5/2012	11:52:51 AM	Helium valve closed
12/5/2012	11:52:51 AM	H2 valve closed
12/5/2012	11:52:51 AM	BCl3 valve closed
12/5/2012	11:52:51 AM	PH3 valve closed
12/5/2012	11:52:51 AM	SiCl4 pre valve closed
12/5/2012	11:52:51 AM	SiCl4 post valve closed
12/5/2012	11:52:51 AM	Bypass valve closed
12/5/2012	11:52:51 AM	Bubbler valve closed
12/5/2012	11:52:51 AM	Main Vac valve opened
12/5/2012	11:52:51 AM	Helium MFC set to  0.000000
12/5/2012	11:52:51 AM	H2 MFC set to  0.000000
12/5/2012	11:52:51 AM	BCl3 MFC set to  0.000000
12/5/2012	11:52:52 AM	PH3 MFC set to  0.000000
12/5/2012	11:52:52 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:52:52 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:52:52 AM	Tube furnace set to 0
12/5/2012	11:53:22 AM	H2 valve closed
12/5/2012	11:53:22 AM	BCl3 valve closed
12/5/2012	11:53:22 AM	PH3 valve closed
12/5/2012	11:53:22 AM	SiCl4 pre valve closed
12/5/2012	11:53:22 AM	SiCl4 post valve closed
12/5/2012	11:53:22 AM	Bypass valve closed
12/5/2012	11:53:22 AM	Bubbler valve closed
12/5/2012	11:53:22 AM	Helium valve opened
12/5/2012	11:53:22 AM	Main Vac valve opened
12/5/2012	11:53:22 AM	Helium MFC set to  20.000000
12/5/2012	11:53:22 AM	H2 MFC set to  0.000000
12/5/2012	11:53:22 AM	BCl3 MFC set to  0.000000
12/5/2012	11:53:22 AM	PH3 MFC set to  0.000000
12/5/2012	11:53:22 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:53:22 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:53:22 AM	Tube furnace set to 0
12/5/2012	11:53:52 AM	Helium valve closed
12/5/2012	11:53:52 AM	H2 valve closed
12/5/2012	11:53:52 AM	BCl3 valve closed
12/5/2012	11:53:52 AM	PH3 valve closed
12/5/2012	11:53:52 AM	SiCl4 pre valve closed
12/5/2012	11:53:52 AM	SiCl4 post valve closed
12/5/2012	11:53:52 AM	Bypass valve closed
12/5/2012	11:53:52 AM	Bubbler valve closed
12/5/2012	11:53:52 AM	Main Vac valve opened
12/5/2012	11:53:52 AM	Helium MFC set to  0.000000
12/5/2012	11:53:52 AM	H2 MFC set to  0.000000
12/5/2012	11:53:52 AM	BCl3 MFC set to  0.000000
12/5/2012	11:53:52 AM	PH3 MFC set to  0.000000
12/5/2012	11:53:52 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:53:52 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:53:52 AM	Tube furnace set to 0
12/5/2012	11:54:22 AM	H2 valve closed
12/5/2012	11:54:22 AM	BCl3 valve closed
12/5/2012	11:54:22 AM	PH3 valve closed
12/5/2012	11:54:22 AM	SiCl4 pre valve closed
12/5/2012	11:54:22 AM	SiCl4 post valve closed
12/5/2012	11:54:22 AM	Bypass valve closed
12/5/2012	11:54:22 AM	Bubbler valve closed
12/5/2012	11:54:22 AM	Helium valve opened
12/5/2012	11:54:22 AM	Main Vac valve opened
12/5/2012	11:54:22 AM	Helium MFC set to  20.000000
12/5/2012	11:54:22 AM	H2 MFC set to  0.000000
12/5/2012	11:54:22 AM	BCl3 MFC set to  0.000000
12/5/2012	11:54:22 AM	PH3 MFC set to  0.000000
12/5/2012	11:54:22 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:54:22 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:54:22 AM	Tube furnace set to 0
12/5/2012	11:54:52 AM	Helium valve closed
12/5/2012	11:54:52 AM	H2 valve closed
12/5/2012	11:54:52 AM	BCl3 valve closed
12/5/2012	11:54:52 AM	PH3 valve closed
12/5/2012	11:54:52 AM	SiCl4 pre valve closed
12/5/2012	11:54:52 AM	SiCl4 post valve closed
12/5/2012	11:54:52 AM	Bypass valve closed
12/5/2012	11:54:52 AM	Bubbler valve closed
12/5/2012	11:54:52 AM	Main Vac valve opened
12/5/2012	11:54:52 AM	Helium MFC set to  0.000000
12/5/2012	11:54:52 AM	H2 MFC set to  0.000000
12/5/2012	11:54:52 AM	BCl3 MFC set to  0.000000
12/5/2012	11:54:52 AM	PH3 MFC set to  0.000000
12/5/2012	11:54:52 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:54:53 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:54:53 AM	Tube furnace set to 0
12/5/2012	11:55:23 AM	H2 valve closed
12/5/2012	11:55:23 AM	BCl3 valve closed
12/5/2012	11:55:23 AM	PH3 valve closed
12/5/2012	11:55:23 AM	SiCl4 pre valve closed
12/5/2012	11:55:23 AM	SiCl4 post valve closed
12/5/2012	11:55:23 AM	Bypass valve closed
12/5/2012	11:55:23 AM	Bubbler valve closed
12/5/2012	11:55:23 AM	Helium valve opened
12/5/2012	11:55:23 AM	Main Vac valve opened
12/5/2012	11:55:23 AM	Helium MFC set to  20.000000
12/5/2012	11:55:23 AM	H2 MFC set to  0.000000
12/5/2012	11:55:23 AM	BCl3 MFC set to  0.000000
12/5/2012	11:55:23 AM	PH3 MFC set to  0.000000
12/5/2012	11:55:23 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:55:23 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:55:23 AM	Tube furnace set to 0
12/5/2012	11:55:53 AM	Helium valve closed
12/5/2012	11:55:53 AM	H2 valve closed
12/5/2012	11:55:53 AM	BCl3 valve closed
12/5/2012	11:55:53 AM	PH3 valve closed
12/5/2012	11:55:53 AM	SiCl4 pre valve closed
12/5/2012	11:55:53 AM	SiCl4 post valve closed
12/5/2012	11:55:53 AM	Bypass valve closed
12/5/2012	11:55:53 AM	Bubbler valve closed
12/5/2012	11:55:53 AM	Main Vac valve opened
12/5/2012	11:55:53 AM	Helium MFC set to  0.000000
12/5/2012	11:55:53 AM	H2 MFC set to  0.000000
12/5/2012	11:55:53 AM	BCl3 MFC set to  0.000000
12/5/2012	11:55:53 AM	PH3 MFC set to  0.000000
12/5/2012	11:55:53 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:55:53 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:55:53 AM	Tube furnace set to 0
12/5/2012	11:56:23 AM	H2 valve closed
12/5/2012	11:56:23 AM	BCl3 valve closed
12/5/2012	11:56:23 AM	PH3 valve closed
12/5/2012	11:56:23 AM	SiCl4 pre valve closed
12/5/2012	11:56:23 AM	SiCl4 post valve closed
12/5/2012	11:56:23 AM	Bypass valve closed
12/5/2012	11:56:23 AM	Bubbler valve closed
12/5/2012	11:56:23 AM	Helium valve opened
12/5/2012	11:56:23 AM	Main Vac valve opened
12/5/2012	11:56:23 AM	Helium MFC set to  20.000000
12/5/2012	11:56:23 AM	H2 MFC set to  0.000000
12/5/2012	11:56:23 AM	BCl3 MFC set to  0.000000
12/5/2012	11:56:23 AM	PH3 MFC set to  0.000000
12/5/2012	11:56:23 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:56:23 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:56:23 AM	Tube furnace set to 0
12/5/2012	11:56:53 AM	Helium valve closed
12/5/2012	11:56:53 AM	H2 valve closed
12/5/2012	11:56:53 AM	BCl3 valve closed
12/5/2012	11:56:53 AM	PH3 valve closed
12/5/2012	11:56:53 AM	SiCl4 pre valve closed
12/5/2012	11:56:53 AM	SiCl4 post valve closed
12/5/2012	11:56:53 AM	Bypass valve closed
12/5/2012	11:56:53 AM	Bubbler valve closed
12/5/2012	11:56:53 AM	Main Vac valve opened
12/5/2012	11:56:53 AM	Helium MFC set to  0.000000
12/5/2012	11:56:53 AM	H2 MFC set to  0.000000
12/5/2012	11:56:53 AM	BCl3 MFC set to  0.000000
12/5/2012	11:56:53 AM	PH3 MFC set to  0.000000
12/5/2012	11:56:53 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:56:54 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:56:54 AM	Tube furnace set to 0
12/5/2012	11:57:24 AM	H2 valve closed
12/5/2012	11:57:24 AM	BCl3 valve closed
12/5/2012	11:57:24 AM	PH3 valve closed
12/5/2012	11:57:24 AM	SiCl4 pre valve closed
12/5/2012	11:57:24 AM	SiCl4 post valve closed
12/5/2012	11:57:24 AM	Bypass valve closed
12/5/2012	11:57:24 AM	Bubbler valve closed
12/5/2012	11:57:24 AM	Helium valve opened
12/5/2012	11:57:24 AM	Main Vac valve opened
12/5/2012	11:57:24 AM	Helium MFC set to  20.000000
12/5/2012	11:57:24 AM	H2 MFC set to  0.000000
12/5/2012	11:57:24 AM	BCl3 MFC set to  0.000000
12/5/2012	11:57:24 AM	PH3 MFC set to  0.000000
12/5/2012	11:57:24 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:57:24 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:57:24 AM	Tube furnace set to 0
12/5/2012	11:57:54 AM	Helium valve closed
12/5/2012	11:57:54 AM	H2 valve closed
12/5/2012	11:57:54 AM	BCl3 valve closed
12/5/2012	11:57:54 AM	PH3 valve closed
12/5/2012	11:57:54 AM	SiCl4 pre valve closed
12/5/2012	11:57:54 AM	SiCl4 post valve closed
12/5/2012	11:57:54 AM	Bypass valve closed
12/5/2012	11:57:54 AM	Bubbler valve closed
12/5/2012	11:57:54 AM	Main Vac valve opened
12/5/2012	11:57:54 AM	Helium MFC set to  0.000000
12/5/2012	11:57:54 AM	H2 MFC set to  0.000000
12/5/2012	11:57:54 AM	BCl3 MFC set to  0.000000
12/5/2012	11:57:54 AM	PH3 MFC set to  0.000000
12/5/2012	11:57:54 AM	SiCl4 MFC set to  0.000000
12/5/2012	11:57:54 AM	Bypass solenoid MFC set to  0.000000
12/5/2012	11:57:54 AM	Tube furnace set to 0
12/5/2012	11:57:55 AM	Run finished at 11:57 AM
12/5/2012	11:57:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/5/2012	12:02:24 PM	Main Vac valve closed
12/5/2012	12:02:37 PM	Main Vac valve opened
12/5/2012	12:03:19 PM	Recipe started at 12:03 PM
12/5/2012	12:03:20 PM	Helium valve closed
12/5/2012	12:03:20 PM	H2 valve closed
12/5/2012	12:03:20 PM	BCl3 valve closed
12/5/2012	12:03:20 PM	PH3 valve closed
12/5/2012	12:03:20 PM	SiCl4 pre valve closed
12/5/2012	12:03:20 PM	SiCl4 post valve closed
12/5/2012	12:03:20 PM	Main Vac valve closed
12/5/2012	12:03:20 PM	Bypass valve closed
12/5/2012	12:03:20 PM	Bubbler valve closed
12/5/2012	12:03:20 PM	Helium MFC set to  0.000000
12/5/2012	12:03:20 PM	H2 MFC set to  0.000000
12/5/2012	12:03:20 PM	BCl3 MFC set to  0.000000
12/5/2012	12:03:20 PM	PH3 MFC set to  0.000000
12/5/2012	12:03:20 PM	SiCl4 MFC set to  0.000000
12/5/2012	12:03:20 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	12:03:20 PM	Tube furnace set to 0
12/5/2012	12:03:23 PM	Helium valve closed
12/5/2012	12:03:23 PM	BCl3 valve closed
12/5/2012	12:03:23 PM	PH3 valve closed
12/5/2012	12:03:23 PM	SiCl4 pre valve closed
12/5/2012	12:03:23 PM	SiCl4 post valve closed
12/5/2012	12:03:23 PM	Main Vac valve closed
12/5/2012	12:03:23 PM	Bypass valve closed
12/5/2012	12:03:23 PM	Bubbler valve closed
12/5/2012	12:03:23 PM	H2 valve opened
12/5/2012	12:03:23 PM	Helium MFC set to  0.000000
12/5/2012	12:03:23 PM	H2 MFC set to  500.000000
12/5/2012	12:03:23 PM	BCl3 MFC set to  0.000000
12/5/2012	12:03:23 PM	PH3 MFC set to  0.000000
12/5/2012	12:03:23 PM	SiCl4 MFC set to  0.000000
12/5/2012	12:03:23 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	12:03:23 PM	Tube furnace set to 0
12/5/2012	12:04:35 PM	Helium valve closed
12/5/2012	12:04:35 PM	BCl3 valve closed
12/5/2012	12:04:35 PM	PH3 valve closed
12/5/2012	12:04:35 PM	SiCl4 pre valve closed
12/5/2012	12:04:35 PM	SiCl4 post valve closed
12/5/2012	12:04:35 PM	Main Vac valve closed
12/5/2012	12:04:35 PM	Bypass valve closed
12/5/2012	12:04:35 PM	H2 valve opened
12/5/2012	12:04:35 PM	Bubbler valve opened
12/5/2012	12:04:35 PM	Helium MFC set to  0.000000
12/5/2012	12:04:35 PM	H2 MFC set to  500.000000
12/5/2012	12:04:35 PM	BCl3 MFC set to  0.000000
12/5/2012	12:04:35 PM	PH3 MFC set to  0.000000
12/5/2012	12:04:35 PM	SiCl4 MFC set to  0.000000
12/5/2012	12:04:35 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	12:04:35 PM	Tube furnace set to 0
12/5/2012	12:04:36 PM	Helium valve closed
12/5/2012	12:04:36 PM	BCl3 valve closed
12/5/2012	12:04:36 PM	PH3 valve closed
12/5/2012	12:04:36 PM	SiCl4 pre valve closed
12/5/2012	12:04:36 PM	SiCl4 post valve closed
12/5/2012	12:04:36 PM	Main Vac valve closed
12/5/2012	12:04:36 PM	Bypass valve closed
12/5/2012	12:04:36 PM	H2 valve opened
12/5/2012	12:04:36 PM	Bubbler valve opened
12/5/2012	12:04:36 PM	Helium MFC set to  0.000000
12/5/2012	12:04:36 PM	H2 MFC set to  500.000000
12/5/2012	12:04:36 PM	BCl3 MFC set to  0.000000
12/5/2012	12:04:36 PM	PH3 MFC set to  0.000000
12/5/2012	12:04:36 PM	SiCl4 MFC set to  0.000000
12/5/2012	12:04:36 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	12:04:36 PM	Tube furnace set to 1000
12/5/2012	12:34:36 PM	Helium valve closed
12/5/2012	12:34:36 PM	PH3 valve closed
12/5/2012	12:34:36 PM	Main Vac valve closed
12/5/2012	12:34:36 PM	Bypass valve closed
12/5/2012	12:34:36 PM	H2 valve opened
12/5/2012	12:34:36 PM	BCl3 valve opened
12/5/2012	12:34:36 PM	SiCl4 pre valve opened
12/5/2012	12:34:36 PM	SiCl4 post valve opened
12/5/2012	12:34:36 PM	Bubbler valve opened
12/5/2012	12:34:36 PM	Helium MFC set to  0.000000
12/5/2012	12:34:36 PM	H2 MFC set to  500.000000
12/5/2012	12:34:36 PM	BCl3 MFC set to  1.000000
12/5/2012	12:34:36 PM	PH3 MFC set to  0.000000
12/5/2012	12:34:36 PM	SiCl4 MFC set to  50.000000
12/5/2012	12:34:36 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	12:34:37 PM	Tube furnace set to 1000
12/5/2012	12:46:37 PM	Helium valve closed
12/5/2012	12:46:37 PM	BCl3 valve closed
12/5/2012	12:46:37 PM	PH3 valve closed
12/5/2012	12:46:37 PM	SiCl4 pre valve closed
12/5/2012	12:46:37 PM	SiCl4 post valve closed
12/5/2012	12:46:37 PM	Main Vac valve closed
12/5/2012	12:46:37 PM	Bypass valve closed
12/5/2012	12:46:37 PM	H2 valve opened
12/5/2012	12:46:37 PM	Bubbler valve opened
12/5/2012	12:46:37 PM	Helium MFC set to  0.000000
12/5/2012	12:46:37 PM	H2 MFC set to  500.000000
12/5/2012	12:46:37 PM	BCl3 MFC set to  0.000000
12/5/2012	12:46:37 PM	PH3 MFC set to  0.000000
12/5/2012	12:46:37 PM	SiCl4 MFC set to  0.000000
12/5/2012	12:46:37 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	12:46:37 PM	Tube furnace set to 750
12/5/2012	12:51:37 PM	H2 valve closed
12/5/2012	12:51:37 PM	BCl3 valve closed
12/5/2012	12:51:37 PM	PH3 valve closed
12/5/2012	12:51:37 PM	SiCl4 pre valve closed
12/5/2012	12:51:37 PM	SiCl4 post valve closed
12/5/2012	12:51:37 PM	Main Vac valve closed
12/5/2012	12:51:37 PM	Bypass valve closed
12/5/2012	12:51:37 PM	Helium valve opened
12/5/2012	12:51:37 PM	Bubbler valve opened
12/5/2012	12:51:37 PM	Helium MFC set to  500.000000
12/5/2012	12:51:37 PM	H2 MFC set to  0.000000
12/5/2012	12:51:37 PM	BCl3 MFC set to  0.000000
12/5/2012	12:51:37 PM	PH3 MFC set to  0.000000
12/5/2012	12:51:37 PM	SiCl4 MFC set to  0.000000
12/5/2012	12:51:37 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	12:51:37 PM	Tube furnace set to 0
12/5/2012	1:03:45 PM	Helium valve closed
12/5/2012	1:03:45 PM	H2 valve closed
12/5/2012	1:03:45 PM	BCl3 valve closed
12/5/2012	1:03:45 PM	PH3 valve closed
12/5/2012	1:03:45 PM	SiCl4 pre valve closed
12/5/2012	1:03:45 PM	SiCl4 post valve closed
12/5/2012	1:03:45 PM	Main Vac valve closed
12/5/2012	1:03:45 PM	Bypass valve closed
12/5/2012	1:03:45 PM	Bubbler valve closed
12/5/2012	1:03:45 PM	Helium MFC set to  0.000000
12/5/2012	1:03:45 PM	H2 MFC set to  0.000000
12/5/2012	1:03:45 PM	BCl3 MFC set to  0.000000
12/5/2012	1:03:45 PM	PH3 MFC set to  0.000000
12/5/2012	1:03:45 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:03:45 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:03:45 PM	Tube furnace set to 0
12/5/2012	1:03:46 PM	Run finished at 1:03 PM
12/5/2012	1:09:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/5/2012	1:09:01 PM	Recipe started at 1:09 PM
12/5/2012	1:09:01 PM	Helium valve closed
12/5/2012	1:09:01 PM	H2 valve closed
12/5/2012	1:09:01 PM	BCl3 valve closed
12/5/2012	1:09:01 PM	PH3 valve closed
12/5/2012	1:09:01 PM	SiCl4 pre valve closed
12/5/2012	1:09:01 PM	SiCl4 post valve closed
12/5/2012	1:09:01 PM	Main Vac valve closed
12/5/2012	1:09:01 PM	Bubbler valve closed
12/5/2012	1:09:01 PM	Bypass valve opened
12/5/2012	1:09:01 PM	Helium MFC set to  0.000000
12/5/2012	1:09:01 PM	H2 MFC set to  0.000000
12/5/2012	1:09:01 PM	BCl3 MFC set to  0.000000
12/5/2012	1:09:01 PM	PH3 MFC set to  0.000000
12/5/2012	1:09:01 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:09:01 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:09:01 PM	Tube furnace set to 0
12/5/2012	1:10:24 PM	Helium valve closed
12/5/2012	1:10:24 PM	H2 valve closed
12/5/2012	1:10:24 PM	BCl3 valve closed
12/5/2012	1:10:24 PM	PH3 valve closed
12/5/2012	1:10:24 PM	SiCl4 pre valve closed
12/5/2012	1:10:24 PM	SiCl4 post valve closed
12/5/2012	1:10:24 PM	Main Vac valve closed
12/5/2012	1:10:24 PM	Bubbler valve closed
12/5/2012	1:10:24 PM	Bypass valve opened
12/5/2012	1:10:24 PM	Helium MFC set to  0.000000
12/5/2012	1:10:24 PM	H2 MFC set to  0.000000
12/5/2012	1:10:24 PM	BCl3 MFC set to  0.000000
12/5/2012	1:10:24 PM	PH3 MFC set to  0.000000
12/5/2012	1:10:24 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:10:24 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:10:24 PM	Tube furnace set to 0
12/5/2012	1:11:24 PM	Helium valve closed
12/5/2012	1:11:24 PM	H2 valve closed
12/5/2012	1:11:24 PM	BCl3 valve closed
12/5/2012	1:11:24 PM	PH3 valve closed
12/5/2012	1:11:24 PM	SiCl4 pre valve closed
12/5/2012	1:11:24 PM	SiCl4 post valve closed
12/5/2012	1:11:24 PM	Bypass valve closed
12/5/2012	1:11:24 PM	Bubbler valve closed
12/5/2012	1:11:24 PM	Main Vac valve opened
12/5/2012	1:11:24 PM	Helium MFC set to  0.000000
12/5/2012	1:11:24 PM	H2 MFC set to  0.000000
12/5/2012	1:11:24 PM	BCl3 MFC set to  0.000000
12/5/2012	1:11:24 PM	PH3 MFC set to  0.000000
12/5/2012	1:11:24 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:11:24 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:11:25 PM	Tube furnace set to 0
12/5/2012	1:11:26 PM	Run finished at 1:11 PM
12/5/2012	1:11:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/5/2012	1:21:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/5/2012	1:21:56 PM	Recipe started at 1:21 PM
12/5/2012	1:21:56 PM	Helium valve closed
12/5/2012	1:21:56 PM	H2 valve closed
12/5/2012	1:21:56 PM	BCl3 valve closed
12/5/2012	1:21:56 PM	PH3 valve closed
12/5/2012	1:21:56 PM	SiCl4 pre valve closed
12/5/2012	1:21:56 PM	SiCl4 post valve closed
12/5/2012	1:21:57 PM	Main Vac valve closed
12/5/2012	1:21:57 PM	Bubbler valve closed
12/5/2012	1:21:57 PM	Bypass valve opened
12/5/2012	1:21:57 PM	Helium MFC set to  0.000000
12/5/2012	1:21:57 PM	H2 MFC set to  0.000000
12/5/2012	1:21:57 PM	BCl3 MFC set to  0.000000
12/5/2012	1:21:57 PM	PH3 MFC set to  0.000000
12/5/2012	1:21:57 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:21:57 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:21:57 PM	Tube furnace set to 0
12/5/2012	1:21:57 PM	Helium valve closed
12/5/2012	1:21:57 PM	H2 valve closed
12/5/2012	1:21:57 PM	BCl3 valve closed
12/5/2012	1:21:57 PM	PH3 valve closed
12/5/2012	1:21:57 PM	SiCl4 pre valve closed
12/5/2012	1:21:57 PM	SiCl4 post valve closed
12/5/2012	1:21:57 PM	Main Vac valve closed
12/5/2012	1:21:57 PM	Bubbler valve closed
12/5/2012	1:21:57 PM	Bypass valve opened
12/5/2012	1:21:57 PM	Helium MFC set to  0.000000
12/5/2012	1:21:57 PM	H2 MFC set to  0.000000
12/5/2012	1:21:57 PM	BCl3 MFC set to  0.000000
12/5/2012	1:21:57 PM	PH3 MFC set to  0.000000
12/5/2012	1:21:57 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:21:57 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:21:57 PM	Tube furnace set to 0
12/5/2012	1:21:57 PM	Helium valve closed
12/5/2012	1:21:57 PM	H2 valve closed
12/5/2012	1:21:57 PM	BCl3 valve closed
12/5/2012	1:21:57 PM	PH3 valve closed
12/5/2012	1:21:57 PM	SiCl4 pre valve closed
12/5/2012	1:21:57 PM	SiCl4 post valve closed
12/5/2012	1:21:57 PM	Bypass valve closed
12/5/2012	1:21:57 PM	Bubbler valve closed
12/5/2012	1:21:57 PM	Main Vac valve opened
12/5/2012	1:21:58 PM	Helium MFC set to  0.000000
12/5/2012	1:21:58 PM	H2 MFC set to  0.000000
12/5/2012	1:21:58 PM	BCl3 MFC set to  0.000000
12/5/2012	1:21:58 PM	PH3 MFC set to  0.000000
12/5/2012	1:21:58 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:21:58 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:21:58 PM	Tube furnace set to 0
12/5/2012	1:22:28 PM	H2 valve closed
12/5/2012	1:22:28 PM	BCl3 valve closed
12/5/2012	1:22:28 PM	PH3 valve closed
12/5/2012	1:22:28 PM	SiCl4 pre valve closed
12/5/2012	1:22:28 PM	SiCl4 post valve closed
12/5/2012	1:22:28 PM	Bypass valve closed
12/5/2012	1:22:28 PM	Bubbler valve closed
12/5/2012	1:22:28 PM	Helium valve opened
12/5/2012	1:22:28 PM	Main Vac valve opened
12/5/2012	1:22:28 PM	Helium MFC set to  20.000000
12/5/2012	1:22:28 PM	H2 MFC set to  0.000000
12/5/2012	1:22:28 PM	BCl3 MFC set to  0.000000
12/5/2012	1:22:28 PM	PH3 MFC set to  0.000000
12/5/2012	1:22:28 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:22:28 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:22:28 PM	Tube furnace set to 0
12/5/2012	1:22:58 PM	Helium valve closed
12/5/2012	1:22:58 PM	H2 valve closed
12/5/2012	1:22:58 PM	BCl3 valve closed
12/5/2012	1:22:58 PM	PH3 valve closed
12/5/2012	1:22:58 PM	SiCl4 pre valve closed
12/5/2012	1:22:58 PM	SiCl4 post valve closed
12/5/2012	1:22:58 PM	Bypass valve closed
12/5/2012	1:22:58 PM	Bubbler valve closed
12/5/2012	1:22:58 PM	Main Vac valve opened
12/5/2012	1:22:58 PM	Helium MFC set to  0.000000
12/5/2012	1:22:58 PM	H2 MFC set to  0.000000
12/5/2012	1:22:58 PM	BCl3 MFC set to  0.000000
12/5/2012	1:22:58 PM	PH3 MFC set to  0.000000
12/5/2012	1:22:58 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:22:58 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:22:58 PM	Tube furnace set to 0
12/5/2012	1:23:28 PM	H2 valve closed
12/5/2012	1:23:28 PM	BCl3 valve closed
12/5/2012	1:23:28 PM	PH3 valve closed
12/5/2012	1:23:28 PM	SiCl4 pre valve closed
12/5/2012	1:23:28 PM	SiCl4 post valve closed
12/5/2012	1:23:28 PM	Bypass valve closed
12/5/2012	1:23:28 PM	Bubbler valve closed
12/5/2012	1:23:28 PM	Helium valve opened
12/5/2012	1:23:28 PM	Main Vac valve opened
12/5/2012	1:23:28 PM	Helium MFC set to  20.000000
12/5/2012	1:23:28 PM	H2 MFC set to  0.000000
12/5/2012	1:23:28 PM	BCl3 MFC set to  0.000000
12/5/2012	1:23:28 PM	PH3 MFC set to  0.000000
12/5/2012	1:23:28 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:23:28 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:23:28 PM	Tube furnace set to 0
12/5/2012	1:23:58 PM	Helium valve closed
12/5/2012	1:23:58 PM	H2 valve closed
12/5/2012	1:23:58 PM	BCl3 valve closed
12/5/2012	1:23:58 PM	PH3 valve closed
12/5/2012	1:23:58 PM	SiCl4 pre valve closed
12/5/2012	1:23:58 PM	SiCl4 post valve closed
12/5/2012	1:23:58 PM	Bypass valve closed
12/5/2012	1:23:58 PM	Bubbler valve closed
12/5/2012	1:23:58 PM	Main Vac valve opened
12/5/2012	1:23:58 PM	Helium MFC set to  0.000000
12/5/2012	1:23:58 PM	H2 MFC set to  0.000000
12/5/2012	1:23:58 PM	BCl3 MFC set to  0.000000
12/5/2012	1:23:58 PM	PH3 MFC set to  0.000000
12/5/2012	1:23:59 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:23:59 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:23:59 PM	Tube furnace set to 0
12/5/2012	1:24:29 PM	H2 valve closed
12/5/2012	1:24:29 PM	BCl3 valve closed
12/5/2012	1:24:29 PM	PH3 valve closed
12/5/2012	1:24:29 PM	SiCl4 pre valve closed
12/5/2012	1:24:29 PM	SiCl4 post valve closed
12/5/2012	1:24:29 PM	Bypass valve closed
12/5/2012	1:24:29 PM	Bubbler valve closed
12/5/2012	1:24:29 PM	Helium valve opened
12/5/2012	1:24:29 PM	Main Vac valve opened
12/5/2012	1:24:29 PM	Helium MFC set to  20.000000
12/5/2012	1:24:29 PM	H2 MFC set to  0.000000
12/5/2012	1:24:29 PM	BCl3 MFC set to  0.000000
12/5/2012	1:24:29 PM	PH3 MFC set to  0.000000
12/5/2012	1:24:29 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:24:29 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:24:29 PM	Tube furnace set to 0
12/5/2012	1:24:59 PM	Helium valve closed
12/5/2012	1:24:59 PM	H2 valve closed
12/5/2012	1:24:59 PM	BCl3 valve closed
12/5/2012	1:24:59 PM	PH3 valve closed
12/5/2012	1:24:59 PM	SiCl4 pre valve closed
12/5/2012	1:24:59 PM	SiCl4 post valve closed
12/5/2012	1:24:59 PM	Bypass valve closed
12/5/2012	1:24:59 PM	Bubbler valve closed
12/5/2012	1:24:59 PM	Main Vac valve opened
12/5/2012	1:24:59 PM	Helium MFC set to  0.000000
12/5/2012	1:24:59 PM	H2 MFC set to  0.000000
12/5/2012	1:24:59 PM	BCl3 MFC set to  0.000000
12/5/2012	1:24:59 PM	PH3 MFC set to  0.000000
12/5/2012	1:24:59 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:24:59 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:24:59 PM	Tube furnace set to 0
12/5/2012	1:25:29 PM	H2 valve closed
12/5/2012	1:25:29 PM	BCl3 valve closed
12/5/2012	1:25:29 PM	PH3 valve closed
12/5/2012	1:25:29 PM	SiCl4 pre valve closed
12/5/2012	1:25:29 PM	SiCl4 post valve closed
12/5/2012	1:25:29 PM	Bypass valve closed
12/5/2012	1:25:29 PM	Bubbler valve closed
12/5/2012	1:25:29 PM	Helium valve opened
12/5/2012	1:25:29 PM	Main Vac valve opened
12/5/2012	1:25:29 PM	Helium MFC set to  20.000000
12/5/2012	1:25:29 PM	H2 MFC set to  0.000000
12/5/2012	1:25:29 PM	BCl3 MFC set to  0.000000
12/5/2012	1:25:29 PM	PH3 MFC set to  0.000000
12/5/2012	1:25:29 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:25:29 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:25:29 PM	Tube furnace set to 0
12/5/2012	1:25:59 PM	Helium valve closed
12/5/2012	1:25:59 PM	H2 valve closed
12/5/2012	1:25:59 PM	BCl3 valve closed
12/5/2012	1:25:59 PM	PH3 valve closed
12/5/2012	1:25:59 PM	SiCl4 pre valve closed
12/5/2012	1:25:59 PM	SiCl4 post valve closed
12/5/2012	1:25:59 PM	Bypass valve closed
12/5/2012	1:25:59 PM	Bubbler valve closed
12/5/2012	1:25:59 PM	Main Vac valve opened
12/5/2012	1:25:59 PM	Helium MFC set to  0.000000
12/5/2012	1:25:59 PM	H2 MFC set to  0.000000
12/5/2012	1:25:59 PM	BCl3 MFC set to  0.000000
12/5/2012	1:25:59 PM	PH3 MFC set to  0.000000
12/5/2012	1:25:59 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:25:59 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:26:00 PM	Tube furnace set to 0
12/5/2012	1:26:30 PM	H2 valve closed
12/5/2012	1:26:30 PM	BCl3 valve closed
12/5/2012	1:26:30 PM	PH3 valve closed
12/5/2012	1:26:30 PM	SiCl4 pre valve closed
12/5/2012	1:26:30 PM	SiCl4 post valve closed
12/5/2012	1:26:30 PM	Bypass valve closed
12/5/2012	1:26:30 PM	Bubbler valve closed
12/5/2012	1:26:30 PM	Helium valve opened
12/5/2012	1:26:30 PM	Main Vac valve opened
12/5/2012	1:26:30 PM	Helium MFC set to  20.000000
12/5/2012	1:26:30 PM	H2 MFC set to  0.000000
12/5/2012	1:26:30 PM	BCl3 MFC set to  0.000000
12/5/2012	1:26:30 PM	PH3 MFC set to  0.000000
12/5/2012	1:26:30 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:26:30 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:26:30 PM	Tube furnace set to 0
12/5/2012	1:27:00 PM	Helium valve closed
12/5/2012	1:27:00 PM	H2 valve closed
12/5/2012	1:27:00 PM	BCl3 valve closed
12/5/2012	1:27:00 PM	PH3 valve closed
12/5/2012	1:27:00 PM	SiCl4 pre valve closed
12/5/2012	1:27:00 PM	SiCl4 post valve closed
12/5/2012	1:27:00 PM	Bypass valve closed
12/5/2012	1:27:00 PM	Bubbler valve closed
12/5/2012	1:27:00 PM	Main Vac valve opened
12/5/2012	1:27:00 PM	Helium MFC set to  0.000000
12/5/2012	1:27:00 PM	H2 MFC set to  0.000000
12/5/2012	1:27:00 PM	BCl3 MFC set to  0.000000
12/5/2012	1:27:00 PM	PH3 MFC set to  0.000000
12/5/2012	1:27:00 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:27:00 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:27:00 PM	Tube furnace set to 0
12/5/2012	1:27:30 PM	H2 valve closed
12/5/2012	1:27:30 PM	BCl3 valve closed
12/5/2012	1:27:30 PM	PH3 valve closed
12/5/2012	1:27:30 PM	SiCl4 pre valve closed
12/5/2012	1:27:30 PM	SiCl4 post valve closed
12/5/2012	1:27:30 PM	Bypass valve closed
12/5/2012	1:27:30 PM	Bubbler valve closed
12/5/2012	1:27:30 PM	Helium valve opened
12/5/2012	1:27:30 PM	Main Vac valve opened
12/5/2012	1:27:30 PM	Helium MFC set to  20.000000
12/5/2012	1:27:30 PM	H2 MFC set to  0.000000
12/5/2012	1:27:30 PM	BCl3 MFC set to  0.000000
12/5/2012	1:27:30 PM	PH3 MFC set to  0.000000
12/5/2012	1:27:30 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:27:30 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:27:30 PM	Tube furnace set to 0
12/5/2012	1:28:00 PM	Helium valve closed
12/5/2012	1:28:00 PM	H2 valve closed
12/5/2012	1:28:00 PM	BCl3 valve closed
12/5/2012	1:28:00 PM	PH3 valve closed
12/5/2012	1:28:00 PM	SiCl4 pre valve closed
12/5/2012	1:28:00 PM	SiCl4 post valve closed
12/5/2012	1:28:00 PM	Bypass valve closed
12/5/2012	1:28:00 PM	Bubbler valve closed
12/5/2012	1:28:00 PM	Main Vac valve opened
12/5/2012	1:28:00 PM	Helium MFC set to  0.000000
12/5/2012	1:28:00 PM	H2 MFC set to  0.000000
12/5/2012	1:28:00 PM	BCl3 MFC set to  0.000000
12/5/2012	1:28:00 PM	PH3 MFC set to  0.000000
12/5/2012	1:28:00 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:28:00 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:28:01 PM	Tube furnace set to 0
12/5/2012	1:28:31 PM	H2 valve closed
12/5/2012	1:28:31 PM	BCl3 valve closed
12/5/2012	1:28:31 PM	PH3 valve closed
12/5/2012	1:28:31 PM	SiCl4 pre valve closed
12/5/2012	1:28:31 PM	SiCl4 post valve closed
12/5/2012	1:28:31 PM	Bypass valve closed
12/5/2012	1:28:31 PM	Bubbler valve closed
12/5/2012	1:28:31 PM	Helium valve opened
12/5/2012	1:28:31 PM	Main Vac valve opened
12/5/2012	1:28:31 PM	Helium MFC set to  20.000000
12/5/2012	1:28:31 PM	H2 MFC set to  0.000000
12/5/2012	1:28:31 PM	BCl3 MFC set to  0.000000
12/5/2012	1:28:31 PM	PH3 MFC set to  0.000000
12/5/2012	1:28:31 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:28:31 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:28:31 PM	Tube furnace set to 0
12/5/2012	1:29:01 PM	Helium valve closed
12/5/2012	1:29:01 PM	H2 valve closed
12/5/2012	1:29:01 PM	BCl3 valve closed
12/5/2012	1:29:01 PM	PH3 valve closed
12/5/2012	1:29:01 PM	SiCl4 pre valve closed
12/5/2012	1:29:01 PM	SiCl4 post valve closed
12/5/2012	1:29:01 PM	Bypass valve closed
12/5/2012	1:29:01 PM	Bubbler valve closed
12/5/2012	1:29:01 PM	Main Vac valve opened
12/5/2012	1:29:01 PM	Helium MFC set to  0.000000
12/5/2012	1:29:01 PM	H2 MFC set to  0.000000
12/5/2012	1:29:01 PM	BCl3 MFC set to  0.000000
12/5/2012	1:29:01 PM	PH3 MFC set to  0.000000
12/5/2012	1:29:01 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:29:01 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:29:01 PM	Tube furnace set to 0
12/5/2012	1:29:31 PM	H2 valve closed
12/5/2012	1:29:31 PM	BCl3 valve closed
12/5/2012	1:29:31 PM	PH3 valve closed
12/5/2012	1:29:31 PM	SiCl4 pre valve closed
12/5/2012	1:29:31 PM	SiCl4 post valve closed
12/5/2012	1:29:31 PM	Bypass valve closed
12/5/2012	1:29:31 PM	Bubbler valve closed
12/5/2012	1:29:31 PM	Helium valve opened
12/5/2012	1:29:31 PM	Main Vac valve opened
12/5/2012	1:29:31 PM	Helium MFC set to  20.000000
12/5/2012	1:29:31 PM	H2 MFC set to  0.000000
12/5/2012	1:29:31 PM	BCl3 MFC set to  0.000000
12/5/2012	1:29:31 PM	PH3 MFC set to  0.000000
12/5/2012	1:29:31 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:29:31 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:29:31 PM	Tube furnace set to 0
12/5/2012	1:30:01 PM	Helium valve closed
12/5/2012	1:30:01 PM	H2 valve closed
12/5/2012	1:30:01 PM	BCl3 valve closed
12/5/2012	1:30:01 PM	PH3 valve closed
12/5/2012	1:30:01 PM	SiCl4 pre valve closed
12/5/2012	1:30:01 PM	SiCl4 post valve closed
12/5/2012	1:30:01 PM	Bypass valve closed
12/5/2012	1:30:01 PM	Bubbler valve closed
12/5/2012	1:30:01 PM	Main Vac valve opened
12/5/2012	1:30:01 PM	Helium MFC set to  0.000000
12/5/2012	1:30:01 PM	H2 MFC set to  0.000000
12/5/2012	1:30:01 PM	BCl3 MFC set to  0.000000
12/5/2012	1:30:01 PM	PH3 MFC set to  0.000000
12/5/2012	1:30:01 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:30:01 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:30:02 PM	Tube furnace set to 0
12/5/2012	1:30:32 PM	H2 valve closed
12/5/2012	1:30:32 PM	BCl3 valve closed
12/5/2012	1:30:32 PM	PH3 valve closed
12/5/2012	1:30:32 PM	SiCl4 pre valve closed
12/5/2012	1:30:32 PM	SiCl4 post valve closed
12/5/2012	1:30:32 PM	Bypass valve closed
12/5/2012	1:30:32 PM	Bubbler valve closed
12/5/2012	1:30:32 PM	Helium valve opened
12/5/2012	1:30:32 PM	Main Vac valve opened
12/5/2012	1:30:32 PM	Helium MFC set to  20.000000
12/5/2012	1:30:32 PM	H2 MFC set to  0.000000
12/5/2012	1:30:32 PM	BCl3 MFC set to  0.000000
12/5/2012	1:30:32 PM	PH3 MFC set to  0.000000
12/5/2012	1:30:32 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:30:32 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:30:32 PM	Tube furnace set to 0
12/5/2012	1:31:02 PM	Helium valve closed
12/5/2012	1:31:02 PM	H2 valve closed
12/5/2012	1:31:02 PM	BCl3 valve closed
12/5/2012	1:31:02 PM	PH3 valve closed
12/5/2012	1:31:02 PM	SiCl4 pre valve closed
12/5/2012	1:31:02 PM	SiCl4 post valve closed
12/5/2012	1:31:02 PM	Bypass valve closed
12/5/2012	1:31:02 PM	Bubbler valve closed
12/5/2012	1:31:02 PM	Main Vac valve opened
12/5/2012	1:31:02 PM	Helium MFC set to  0.000000
12/5/2012	1:31:02 PM	H2 MFC set to  0.000000
12/5/2012	1:31:02 PM	BCl3 MFC set to  0.000000
12/5/2012	1:31:02 PM	PH3 MFC set to  0.000000
12/5/2012	1:31:02 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:31:02 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:31:02 PM	Tube furnace set to 0
12/5/2012	1:31:32 PM	H2 valve closed
12/5/2012	1:31:32 PM	BCl3 valve closed
12/5/2012	1:31:32 PM	PH3 valve closed
12/5/2012	1:31:32 PM	SiCl4 pre valve closed
12/5/2012	1:31:32 PM	SiCl4 post valve closed
12/5/2012	1:31:32 PM	Bypass valve closed
12/5/2012	1:31:32 PM	Bubbler valve closed
12/5/2012	1:31:32 PM	Helium valve opened
12/5/2012	1:31:32 PM	Main Vac valve opened
12/5/2012	1:31:32 PM	Helium MFC set to  20.000000
12/5/2012	1:31:32 PM	H2 MFC set to  0.000000
12/5/2012	1:31:32 PM	BCl3 MFC set to  0.000000
12/5/2012	1:31:32 PM	PH3 MFC set to  0.000000
12/5/2012	1:31:32 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:31:32 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:31:32 PM	Tube furnace set to 0
12/5/2012	1:32:02 PM	Helium valve closed
12/5/2012	1:32:02 PM	H2 valve closed
12/5/2012	1:32:02 PM	BCl3 valve closed
12/5/2012	1:32:02 PM	PH3 valve closed
12/5/2012	1:32:02 PM	SiCl4 pre valve closed
12/5/2012	1:32:02 PM	SiCl4 post valve closed
12/5/2012	1:32:02 PM	Bypass valve closed
12/5/2012	1:32:02 PM	Bubbler valve closed
12/5/2012	1:32:02 PM	Main Vac valve opened
12/5/2012	1:32:02 PM	Helium MFC set to  0.000000
12/5/2012	1:32:02 PM	H2 MFC set to  0.000000
12/5/2012	1:32:02 PM	BCl3 MFC set to  0.000000
12/5/2012	1:32:02 PM	PH3 MFC set to  0.000000
12/5/2012	1:32:02 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:32:02 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:32:03 PM	Tube furnace set to 0
12/5/2012	1:32:04 PM	Run finished at 1:32 PM
12/5/2012	1:32:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/5/2012	1:33:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/5/2012	1:33:21 PM	Recipe started at 1:33 PM
12/5/2012	1:33:21 PM	Helium valve closed
12/5/2012	1:33:21 PM	H2 valve closed
12/5/2012	1:33:21 PM	BCl3 valve closed
12/5/2012	1:33:21 PM	PH3 valve closed
12/5/2012	1:33:21 PM	SiCl4 pre valve closed
12/5/2012	1:33:21 PM	SiCl4 post valve closed
12/5/2012	1:33:21 PM	Main Vac valve closed
12/5/2012	1:33:21 PM	Bubbler valve closed
12/5/2012	1:33:21 PM	Bypass valve opened
12/5/2012	1:33:21 PM	Helium MFC set to  0.000000
12/5/2012	1:33:21 PM	H2 MFC set to  0.000000
12/5/2012	1:33:21 PM	BCl3 MFC set to  0.000000
12/5/2012	1:33:21 PM	PH3 MFC set to  0.000000
12/5/2012	1:33:21 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:33:21 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:33:22 PM	Tube furnace set to 0
12/5/2012	1:33:22 PM	Helium valve closed
12/5/2012	1:33:22 PM	H2 valve closed
12/5/2012	1:33:22 PM	BCl3 valve closed
12/5/2012	1:33:22 PM	PH3 valve closed
12/5/2012	1:33:22 PM	SiCl4 pre valve closed
12/5/2012	1:33:22 PM	SiCl4 post valve closed
12/5/2012	1:33:22 PM	Main Vac valve closed
12/5/2012	1:33:22 PM	Bubbler valve closed
12/5/2012	1:33:22 PM	Bypass valve opened
12/5/2012	1:33:22 PM	Helium MFC set to  0.000000
12/5/2012	1:33:22 PM	H2 MFC set to  0.000000
12/5/2012	1:33:22 PM	BCl3 MFC set to  0.000000
12/5/2012	1:33:22 PM	PH3 MFC set to  0.000000
12/5/2012	1:33:22 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:33:22 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:33:22 PM	Tube furnace set to 0
12/5/2012	1:33:22 PM	Helium valve closed
12/5/2012	1:33:22 PM	H2 valve closed
12/5/2012	1:33:22 PM	BCl3 valve closed
12/5/2012	1:33:22 PM	PH3 valve closed
12/5/2012	1:33:22 PM	SiCl4 pre valve closed
12/5/2012	1:33:22 PM	SiCl4 post valve closed
12/5/2012	1:33:22 PM	Bypass valve closed
12/5/2012	1:33:22 PM	Bubbler valve closed
12/5/2012	1:33:22 PM	Main Vac valve opened
12/5/2012	1:33:22 PM	Helium MFC set to  0.000000
12/5/2012	1:33:22 PM	H2 MFC set to  0.000000
12/5/2012	1:33:22 PM	BCl3 MFC set to  0.000000
12/5/2012	1:33:22 PM	PH3 MFC set to  0.000000
12/5/2012	1:33:22 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:33:22 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:33:23 PM	Tube furnace set to 0
12/5/2012	1:33:24 PM	H2 valve closed
12/5/2012	1:33:24 PM	BCl3 valve closed
12/5/2012	1:33:24 PM	PH3 valve closed
12/5/2012	1:33:24 PM	SiCl4 pre valve closed
12/5/2012	1:33:24 PM	SiCl4 post valve closed
12/5/2012	1:33:24 PM	Bypass valve closed
12/5/2012	1:33:24 PM	Bubbler valve closed
12/5/2012	1:33:24 PM	Helium valve opened
12/5/2012	1:33:24 PM	Main Vac valve opened
12/5/2012	1:33:24 PM	Helium MFC set to  20.000000
12/5/2012	1:33:24 PM	H2 MFC set to  0.000000
12/5/2012	1:33:24 PM	BCl3 MFC set to  0.000000
12/5/2012	1:33:24 PM	PH3 MFC set to  0.000000
12/5/2012	1:33:24 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:33:24 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:33:24 PM	Tube furnace set to 0
12/5/2012	1:33:54 PM	Helium valve closed
12/5/2012	1:33:54 PM	H2 valve closed
12/5/2012	1:33:54 PM	BCl3 valve closed
12/5/2012	1:33:54 PM	PH3 valve closed
12/5/2012	1:33:54 PM	SiCl4 pre valve closed
12/5/2012	1:33:54 PM	SiCl4 post valve closed
12/5/2012	1:33:54 PM	Bypass valve closed
12/5/2012	1:33:54 PM	Bubbler valve closed
12/5/2012	1:33:54 PM	Main Vac valve opened
12/5/2012	1:33:54 PM	Helium MFC set to  0.000000
12/5/2012	1:33:54 PM	H2 MFC set to  0.000000
12/5/2012	1:33:54 PM	BCl3 MFC set to  0.000000
12/5/2012	1:33:54 PM	PH3 MFC set to  0.000000
12/5/2012	1:33:54 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:33:54 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:33:54 PM	Tube furnace set to 0
12/5/2012	1:34:24 PM	H2 valve closed
12/5/2012	1:34:24 PM	BCl3 valve closed
12/5/2012	1:34:24 PM	PH3 valve closed
12/5/2012	1:34:24 PM	SiCl4 pre valve closed
12/5/2012	1:34:24 PM	SiCl4 post valve closed
12/5/2012	1:34:24 PM	Bypass valve closed
12/5/2012	1:34:24 PM	Bubbler valve closed
12/5/2012	1:34:24 PM	Helium valve opened
12/5/2012	1:34:24 PM	Main Vac valve opened
12/5/2012	1:34:24 PM	Helium MFC set to  20.000000
12/5/2012	1:34:24 PM	H2 MFC set to  0.000000
12/5/2012	1:34:24 PM	BCl3 MFC set to  0.000000
12/5/2012	1:34:24 PM	PH3 MFC set to  0.000000
12/5/2012	1:34:24 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:34:24 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:34:24 PM	Tube furnace set to 0
12/5/2012	1:34:54 PM	Helium valve closed
12/5/2012	1:34:54 PM	H2 valve closed
12/5/2012	1:34:54 PM	BCl3 valve closed
12/5/2012	1:34:54 PM	PH3 valve closed
12/5/2012	1:34:54 PM	SiCl4 pre valve closed
12/5/2012	1:34:54 PM	SiCl4 post valve closed
12/5/2012	1:34:54 PM	Bypass valve closed
12/5/2012	1:34:54 PM	Bubbler valve closed
12/5/2012	1:34:54 PM	Main Vac valve opened
12/5/2012	1:34:54 PM	Helium MFC set to  0.000000
12/5/2012	1:34:54 PM	H2 MFC set to  0.000000
12/5/2012	1:34:54 PM	BCl3 MFC set to  0.000000
12/5/2012	1:34:54 PM	PH3 MFC set to  0.000000
12/5/2012	1:34:54 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:34:54 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:34:54 PM	Tube furnace set to 0
12/5/2012	1:35:24 PM	H2 valve closed
12/5/2012	1:35:24 PM	BCl3 valve closed
12/5/2012	1:35:25 PM	PH3 valve closed
12/5/2012	1:35:25 PM	SiCl4 pre valve closed
12/5/2012	1:35:25 PM	SiCl4 post valve closed
12/5/2012	1:35:25 PM	Bypass valve closed
12/5/2012	1:35:25 PM	Bubbler valve closed
12/5/2012	1:35:25 PM	Helium valve opened
12/5/2012	1:35:25 PM	Main Vac valve opened
12/5/2012	1:35:25 PM	Helium MFC set to  20.000000
12/5/2012	1:35:25 PM	H2 MFC set to  0.000000
12/5/2012	1:35:25 PM	BCl3 MFC set to  0.000000
12/5/2012	1:35:25 PM	PH3 MFC set to  0.000000
12/5/2012	1:35:25 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:35:25 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:35:25 PM	Tube furnace set to 0
12/5/2012	1:35:55 PM	Helium valve closed
12/5/2012	1:35:55 PM	H2 valve closed
12/5/2012	1:35:55 PM	BCl3 valve closed
12/5/2012	1:35:55 PM	PH3 valve closed
12/5/2012	1:35:55 PM	SiCl4 pre valve closed
12/5/2012	1:35:55 PM	SiCl4 post valve closed
12/5/2012	1:35:55 PM	Bypass valve closed
12/5/2012	1:35:55 PM	Bubbler valve closed
12/5/2012	1:35:55 PM	Main Vac valve opened
12/5/2012	1:35:55 PM	Helium MFC set to  0.000000
12/5/2012	1:35:55 PM	H2 MFC set to  0.000000
12/5/2012	1:35:55 PM	BCl3 MFC set to  0.000000
12/5/2012	1:35:55 PM	PH3 MFC set to  0.000000
12/5/2012	1:35:55 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:35:55 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:35:55 PM	Tube furnace set to 0
12/5/2012	1:36:25 PM	H2 valve closed
12/5/2012	1:36:25 PM	BCl3 valve closed
12/5/2012	1:36:25 PM	PH3 valve closed
12/5/2012	1:36:25 PM	SiCl4 pre valve closed
12/5/2012	1:36:25 PM	SiCl4 post valve closed
12/5/2012	1:36:25 PM	Bypass valve closed
12/5/2012	1:36:25 PM	Bubbler valve closed
12/5/2012	1:36:25 PM	Helium valve opened
12/5/2012	1:36:25 PM	Main Vac valve opened
12/5/2012	1:36:25 PM	Helium MFC set to  20.000000
12/5/2012	1:36:25 PM	H2 MFC set to  0.000000
12/5/2012	1:36:25 PM	BCl3 MFC set to  0.000000
12/5/2012	1:36:25 PM	PH3 MFC set to  0.000000
12/5/2012	1:36:25 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:36:25 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:36:25 PM	Tube furnace set to 0
12/5/2012	1:36:55 PM	Helium valve closed
12/5/2012	1:36:55 PM	H2 valve closed
12/5/2012	1:36:55 PM	BCl3 valve closed
12/5/2012	1:36:55 PM	PH3 valve closed
12/5/2012	1:36:55 PM	SiCl4 pre valve closed
12/5/2012	1:36:55 PM	SiCl4 post valve closed
12/5/2012	1:36:55 PM	Bypass valve closed
12/5/2012	1:36:55 PM	Bubbler valve closed
12/5/2012	1:36:55 PM	Main Vac valve opened
12/5/2012	1:36:55 PM	Helium MFC set to  0.000000
12/5/2012	1:36:55 PM	H2 MFC set to  0.000000
12/5/2012	1:36:55 PM	BCl3 MFC set to  0.000000
12/5/2012	1:36:55 PM	PH3 MFC set to  0.000000
12/5/2012	1:36:55 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:36:55 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:36:55 PM	Tube furnace set to 0
12/5/2012	1:37:25 PM	H2 valve closed
12/5/2012	1:37:25 PM	BCl3 valve closed
12/5/2012	1:37:25 PM	PH3 valve closed
12/5/2012	1:37:25 PM	SiCl4 pre valve closed
12/5/2012	1:37:25 PM	SiCl4 post valve closed
12/5/2012	1:37:26 PM	Bypass valve closed
12/5/2012	1:37:26 PM	Bubbler valve closed
12/5/2012	1:37:26 PM	Helium valve opened
12/5/2012	1:37:26 PM	Main Vac valve opened
12/5/2012	1:37:26 PM	Helium MFC set to  20.000000
12/5/2012	1:37:26 PM	H2 MFC set to  0.000000
12/5/2012	1:37:26 PM	BCl3 MFC set to  0.000000
12/5/2012	1:37:26 PM	PH3 MFC set to  0.000000
12/5/2012	1:37:26 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:37:26 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:37:26 PM	Tube furnace set to 0
12/5/2012	1:37:56 PM	Helium valve closed
12/5/2012	1:37:56 PM	H2 valve closed
12/5/2012	1:37:56 PM	BCl3 valve closed
12/5/2012	1:37:56 PM	PH3 valve closed
12/5/2012	1:37:56 PM	SiCl4 pre valve closed
12/5/2012	1:37:56 PM	SiCl4 post valve closed
12/5/2012	1:37:56 PM	Bypass valve closed
12/5/2012	1:37:56 PM	Bubbler valve closed
12/5/2012	1:37:56 PM	Main Vac valve opened
12/5/2012	1:37:56 PM	Helium MFC set to  0.000000
12/5/2012	1:37:56 PM	H2 MFC set to  0.000000
12/5/2012	1:37:56 PM	BCl3 MFC set to  0.000000
12/5/2012	1:37:56 PM	PH3 MFC set to  0.000000
12/5/2012	1:37:56 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:37:56 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:37:56 PM	Tube furnace set to 0
12/5/2012	1:38:26 PM	H2 valve closed
12/5/2012	1:38:26 PM	BCl3 valve closed
12/5/2012	1:38:26 PM	PH3 valve closed
12/5/2012	1:38:26 PM	SiCl4 pre valve closed
12/5/2012	1:38:26 PM	SiCl4 post valve closed
12/5/2012	1:38:26 PM	Bypass valve closed
12/5/2012	1:38:26 PM	Bubbler valve closed
12/5/2012	1:38:26 PM	Helium valve opened
12/5/2012	1:38:26 PM	Main Vac valve opened
12/5/2012	1:38:26 PM	Helium MFC set to  20.000000
12/5/2012	1:38:26 PM	H2 MFC set to  0.000000
12/5/2012	1:38:26 PM	BCl3 MFC set to  0.000000
12/5/2012	1:38:26 PM	PH3 MFC set to  0.000000
12/5/2012	1:38:26 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:38:26 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:38:26 PM	Tube furnace set to 0
12/5/2012	1:38:56 PM	Helium valve closed
12/5/2012	1:38:56 PM	H2 valve closed
12/5/2012	1:38:56 PM	BCl3 valve closed
12/5/2012	1:38:56 PM	PH3 valve closed
12/5/2012	1:38:56 PM	SiCl4 pre valve closed
12/5/2012	1:38:56 PM	SiCl4 post valve closed
12/5/2012	1:38:56 PM	Bypass valve closed
12/5/2012	1:38:56 PM	Bubbler valve closed
12/5/2012	1:38:56 PM	Main Vac valve opened
12/5/2012	1:38:56 PM	Helium MFC set to  0.000000
12/5/2012	1:38:56 PM	H2 MFC set to  0.000000
12/5/2012	1:38:56 PM	BCl3 MFC set to  0.000000
12/5/2012	1:38:56 PM	PH3 MFC set to  0.000000
12/5/2012	1:38:56 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:38:56 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:38:56 PM	Tube furnace set to 0
12/5/2012	1:39:26 PM	H2 valve closed
12/5/2012	1:39:26 PM	BCl3 valve closed
12/5/2012	1:39:26 PM	PH3 valve closed
12/5/2012	1:39:26 PM	SiCl4 pre valve closed
12/5/2012	1:39:26 PM	SiCl4 post valve closed
12/5/2012	1:39:26 PM	Bypass valve closed
12/5/2012	1:39:26 PM	Bubbler valve closed
12/5/2012	1:39:26 PM	Helium valve opened
12/5/2012	1:39:26 PM	Main Vac valve opened
12/5/2012	1:39:27 PM	Helium MFC set to  20.000000
12/5/2012	1:39:27 PM	H2 MFC set to  0.000000
12/5/2012	1:39:27 PM	BCl3 MFC set to  0.000000
12/5/2012	1:39:27 PM	PH3 MFC set to  0.000000
12/5/2012	1:39:27 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:39:27 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:39:27 PM	Tube furnace set to 0
12/5/2012	1:39:57 PM	Helium valve closed
12/5/2012	1:39:57 PM	H2 valve closed
12/5/2012	1:39:57 PM	BCl3 valve closed
12/5/2012	1:39:57 PM	PH3 valve closed
12/5/2012	1:39:57 PM	SiCl4 pre valve closed
12/5/2012	1:39:57 PM	SiCl4 post valve closed
12/5/2012	1:39:57 PM	Bypass valve closed
12/5/2012	1:39:57 PM	Bubbler valve closed
12/5/2012	1:39:57 PM	Main Vac valve opened
12/5/2012	1:39:57 PM	Helium MFC set to  0.000000
12/5/2012	1:39:57 PM	H2 MFC set to  0.000000
12/5/2012	1:39:57 PM	BCl3 MFC set to  0.000000
12/5/2012	1:39:57 PM	PH3 MFC set to  0.000000
12/5/2012	1:39:57 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:39:57 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:39:57 PM	Tube furnace set to 0
12/5/2012	1:40:27 PM	H2 valve closed
12/5/2012	1:40:27 PM	BCl3 valve closed
12/5/2012	1:40:27 PM	PH3 valve closed
12/5/2012	1:40:27 PM	SiCl4 pre valve closed
12/5/2012	1:40:27 PM	SiCl4 post valve closed
12/5/2012	1:40:27 PM	Bypass valve closed
12/5/2012	1:40:27 PM	Bubbler valve closed
12/5/2012	1:40:27 PM	Helium valve opened
12/5/2012	1:40:27 PM	Main Vac valve opened
12/5/2012	1:40:27 PM	Helium MFC set to  20.000000
12/5/2012	1:40:27 PM	H2 MFC set to  0.000000
12/5/2012	1:40:27 PM	BCl3 MFC set to  0.000000
12/5/2012	1:40:27 PM	PH3 MFC set to  0.000000
12/5/2012	1:40:27 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:40:27 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:40:27 PM	Tube furnace set to 0
12/5/2012	1:40:57 PM	Helium valve closed
12/5/2012	1:40:57 PM	H2 valve closed
12/5/2012	1:40:57 PM	BCl3 valve closed
12/5/2012	1:40:57 PM	PH3 valve closed
12/5/2012	1:40:57 PM	SiCl4 pre valve closed
12/5/2012	1:40:57 PM	SiCl4 post valve closed
12/5/2012	1:40:57 PM	Bypass valve closed
12/5/2012	1:40:57 PM	Bubbler valve closed
12/5/2012	1:40:57 PM	Main Vac valve opened
12/5/2012	1:40:57 PM	Helium MFC set to  0.000000
12/5/2012	1:40:57 PM	H2 MFC set to  0.000000
12/5/2012	1:40:57 PM	BCl3 MFC set to  0.000000
12/5/2012	1:40:57 PM	PH3 MFC set to  0.000000
12/5/2012	1:40:57 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:40:57 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:40:57 PM	Tube furnace set to 0
12/5/2012	1:41:27 PM	H2 valve closed
12/5/2012	1:41:27 PM	BCl3 valve closed
12/5/2012	1:41:27 PM	PH3 valve closed
12/5/2012	1:41:27 PM	SiCl4 pre valve closed
12/5/2012	1:41:27 PM	SiCl4 post valve closed
12/5/2012	1:41:27 PM	Bypass valve closed
12/5/2012	1:41:27 PM	Bubbler valve closed
12/5/2012	1:41:27 PM	Helium valve opened
12/5/2012	1:41:27 PM	Main Vac valve opened
12/5/2012	1:41:27 PM	Helium MFC set to  20.000000
12/5/2012	1:41:27 PM	H2 MFC set to  0.000000
12/5/2012	1:41:27 PM	BCl3 MFC set to  0.000000
12/5/2012	1:41:27 PM	PH3 MFC set to  0.000000
12/5/2012	1:41:28 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:41:28 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:41:28 PM	Tube furnace set to 0
12/5/2012	1:41:58 PM	Helium valve closed
12/5/2012	1:41:58 PM	H2 valve closed
12/5/2012	1:41:58 PM	BCl3 valve closed
12/5/2012	1:41:58 PM	PH3 valve closed
12/5/2012	1:41:58 PM	SiCl4 pre valve closed
12/5/2012	1:41:58 PM	SiCl4 post valve closed
12/5/2012	1:41:58 PM	Bypass valve closed
12/5/2012	1:41:58 PM	Bubbler valve closed
12/5/2012	1:41:58 PM	Main Vac valve opened
12/5/2012	1:41:58 PM	Helium MFC set to  0.000000
12/5/2012	1:41:58 PM	H2 MFC set to  0.000000
12/5/2012	1:41:58 PM	BCl3 MFC set to  0.000000
12/5/2012	1:41:58 PM	PH3 MFC set to  0.000000
12/5/2012	1:41:58 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:41:58 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:41:58 PM	Tube furnace set to 0
12/5/2012	1:42:28 PM	H2 valve closed
12/5/2012	1:42:28 PM	BCl3 valve closed
12/5/2012	1:42:28 PM	PH3 valve closed
12/5/2012	1:42:28 PM	SiCl4 pre valve closed
12/5/2012	1:42:28 PM	SiCl4 post valve closed
12/5/2012	1:42:28 PM	Bypass valve closed
12/5/2012	1:42:28 PM	Bubbler valve closed
12/5/2012	1:42:28 PM	Helium valve opened
12/5/2012	1:42:28 PM	Main Vac valve opened
12/5/2012	1:42:28 PM	Helium MFC set to  20.000000
12/5/2012	1:42:28 PM	H2 MFC set to  0.000000
12/5/2012	1:42:28 PM	BCl3 MFC set to  0.000000
12/5/2012	1:42:28 PM	PH3 MFC set to  0.000000
12/5/2012	1:42:28 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:42:28 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:42:28 PM	Tube furnace set to 0
12/5/2012	1:42:58 PM	Helium valve closed
12/5/2012	1:42:58 PM	H2 valve closed
12/5/2012	1:42:58 PM	BCl3 valve closed
12/5/2012	1:42:58 PM	PH3 valve closed
12/5/2012	1:42:58 PM	SiCl4 pre valve closed
12/5/2012	1:42:58 PM	SiCl4 post valve closed
12/5/2012	1:42:58 PM	Bypass valve closed
12/5/2012	1:42:58 PM	Bubbler valve closed
12/5/2012	1:42:58 PM	Main Vac valve opened
12/5/2012	1:42:58 PM	Helium MFC set to  0.000000
12/5/2012	1:42:58 PM	H2 MFC set to  0.000000
12/5/2012	1:42:58 PM	BCl3 MFC set to  0.000000
12/5/2012	1:42:58 PM	PH3 MFC set to  0.000000
12/5/2012	1:42:58 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:42:58 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:42:58 PM	Tube furnace set to 0
12/5/2012	1:42:59 PM	Run finished at 1:42 PM
12/5/2012	1:42:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/5/2012	1:45:39 PM	Main Vac valve closed
12/5/2012	1:45:52 PM	Main Vac valve opened
12/5/2012	1:46:55 PM	Recipe started at 1:46 PM
12/5/2012	1:46:55 PM	Helium valve closed
12/5/2012	1:46:55 PM	H2 valve closed
12/5/2012	1:46:55 PM	BCl3 valve closed
12/5/2012	1:46:55 PM	PH3 valve closed
12/5/2012	1:46:55 PM	SiCl4 pre valve closed
12/5/2012	1:46:55 PM	SiCl4 post valve closed
12/5/2012	1:46:55 PM	Main Vac valve closed
12/5/2012	1:46:55 PM	Bypass valve closed
12/5/2012	1:46:55 PM	Bubbler valve closed
12/5/2012	1:46:55 PM	Helium MFC set to  0.000000
12/5/2012	1:46:55 PM	H2 MFC set to  0.000000
12/5/2012	1:46:55 PM	BCl3 MFC set to  0.000000
12/5/2012	1:46:55 PM	PH3 MFC set to  0.000000
12/5/2012	1:46:55 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:46:55 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:46:55 PM	Tube furnace set to 0
12/5/2012	1:46:58 PM	Helium valve closed
12/5/2012	1:46:58 PM	BCl3 valve closed
12/5/2012	1:46:58 PM	PH3 valve closed
12/5/2012	1:46:58 PM	SiCl4 pre valve closed
12/5/2012	1:46:58 PM	SiCl4 post valve closed
12/5/2012	1:46:58 PM	Main Vac valve closed
12/5/2012	1:46:58 PM	Bypass valve closed
12/5/2012	1:46:58 PM	Bubbler valve closed
12/5/2012	1:46:58 PM	H2 valve opened
12/5/2012	1:46:58 PM	Helium MFC set to  0.000000
12/5/2012	1:46:58 PM	H2 MFC set to  500.000000
12/5/2012	1:46:58 PM	BCl3 MFC set to  0.000000
12/5/2012	1:46:58 PM	PH3 MFC set to  0.000000
12/5/2012	1:46:58 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:46:58 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:46:58 PM	Tube furnace set to 0
12/5/2012	1:48:10 PM	Helium valve closed
12/5/2012	1:48:10 PM	BCl3 valve closed
12/5/2012	1:48:10 PM	PH3 valve closed
12/5/2012	1:48:10 PM	SiCl4 pre valve closed
12/5/2012	1:48:10 PM	SiCl4 post valve closed
12/5/2012	1:48:10 PM	Main Vac valve closed
12/5/2012	1:48:10 PM	Bypass valve closed
12/5/2012	1:48:10 PM	H2 valve opened
12/5/2012	1:48:10 PM	Bubbler valve opened
12/5/2012	1:48:10 PM	Helium MFC set to  0.000000
12/5/2012	1:48:10 PM	H2 MFC set to  500.000000
12/5/2012	1:48:10 PM	BCl3 MFC set to  0.000000
12/5/2012	1:48:10 PM	PH3 MFC set to  0.000000
12/5/2012	1:48:10 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:48:10 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:48:10 PM	Tube furnace set to 0
12/5/2012	1:48:11 PM	Helium valve closed
12/5/2012	1:48:11 PM	BCl3 valve closed
12/5/2012	1:48:11 PM	PH3 valve closed
12/5/2012	1:48:11 PM	SiCl4 pre valve closed
12/5/2012	1:48:11 PM	SiCl4 post valve closed
12/5/2012	1:48:11 PM	Main Vac valve closed
12/5/2012	1:48:11 PM	Bypass valve closed
12/5/2012	1:48:11 PM	H2 valve opened
12/5/2012	1:48:11 PM	Bubbler valve opened
12/5/2012	1:48:11 PM	Helium MFC set to  0.000000
12/5/2012	1:48:11 PM	H2 MFC set to  500.000000
12/5/2012	1:48:11 PM	BCl3 MFC set to  0.000000
12/5/2012	1:48:11 PM	PH3 MFC set to  0.000000
12/5/2012	1:48:11 PM	SiCl4 MFC set to  0.000000
12/5/2012	1:48:11 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	1:48:11 PM	Tube furnace set to 1000
12/5/2012	2:18:11 PM	Helium valve closed
12/5/2012	2:18:11 PM	PH3 valve closed
12/5/2012	2:18:11 PM	Main Vac valve closed
12/5/2012	2:18:11 PM	Bypass valve closed
12/5/2012	2:18:11 PM	H2 valve opened
12/5/2012	2:18:11 PM	BCl3 valve opened
12/5/2012	2:18:11 PM	SiCl4 pre valve opened
12/5/2012	2:18:11 PM	SiCl4 post valve opened
12/5/2012	2:18:11 PM	Bubbler valve opened
12/5/2012	2:18:11 PM	Helium MFC set to  0.000000
12/5/2012	2:18:11 PM	H2 MFC set to  500.000000
12/5/2012	2:18:11 PM	BCl3 MFC set to  1.000000
12/5/2012	2:18:11 PM	PH3 MFC set to  0.000000
12/5/2012	2:18:11 PM	SiCl4 MFC set to  50.000000
12/5/2012	2:18:12 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	2:18:12 PM	Tube furnace set to 1000
12/5/2012	2:30:12 PM	Helium valve closed
12/5/2012	2:30:12 PM	BCl3 valve closed
12/5/2012	2:30:12 PM	PH3 valve closed
12/5/2012	2:30:12 PM	SiCl4 pre valve closed
12/5/2012	2:30:12 PM	SiCl4 post valve closed
12/5/2012	2:30:12 PM	Main Vac valve closed
12/5/2012	2:30:12 PM	Bypass valve closed
12/5/2012	2:30:12 PM	H2 valve opened
12/5/2012	2:30:12 PM	Bubbler valve opened
12/5/2012	2:30:12 PM	Helium MFC set to  0.000000
12/5/2012	2:30:12 PM	H2 MFC set to  500.000000
12/5/2012	2:30:12 PM	BCl3 MFC set to  0.000000
12/5/2012	2:30:12 PM	PH3 MFC set to  0.000000
12/5/2012	2:30:12 PM	SiCl4 MFC set to  0.000000
12/5/2012	2:30:12 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	2:30:12 PM	Tube furnace set to 750
12/5/2012	2:35:12 PM	H2 valve closed
12/5/2012	2:35:12 PM	BCl3 valve closed
12/5/2012	2:35:12 PM	PH3 valve closed
12/5/2012	2:35:12 PM	SiCl4 pre valve closed
12/5/2012	2:35:12 PM	SiCl4 post valve closed
12/5/2012	2:35:12 PM	Main Vac valve closed
12/5/2012	2:35:12 PM	Bypass valve closed
12/5/2012	2:35:12 PM	Helium valve opened
12/5/2012	2:35:12 PM	Bubbler valve opened
12/5/2012	2:35:12 PM	Helium MFC set to  500.000000
12/5/2012	2:35:12 PM	H2 MFC set to  0.000000
12/5/2012	2:35:12 PM	BCl3 MFC set to  0.000000
12/5/2012	2:35:12 PM	PH3 MFC set to  0.000000
12/5/2012	2:35:12 PM	SiCl4 MFC set to  0.000000
12/5/2012	2:35:12 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	2:35:12 PM	Tube furnace set to 0
12/5/2012	2:49:40 PM	Helium valve closed
12/5/2012	2:49:40 PM	H2 valve closed
12/5/2012	2:49:40 PM	BCl3 valve closed
12/5/2012	2:49:40 PM	PH3 valve closed
12/5/2012	2:49:40 PM	SiCl4 pre valve closed
12/5/2012	2:49:40 PM	SiCl4 post valve closed
12/5/2012	2:49:40 PM	Main Vac valve closed
12/5/2012	2:49:40 PM	Bypass valve closed
12/5/2012	2:49:40 PM	Bubbler valve closed
12/5/2012	2:49:40 PM	Helium MFC set to  0.000000
12/5/2012	2:49:40 PM	H2 MFC set to  0.000000
12/5/2012	2:49:40 PM	BCl3 MFC set to  0.000000
12/5/2012	2:49:40 PM	PH3 MFC set to  0.000000
12/5/2012	2:49:40 PM	SiCl4 MFC set to  0.000000
12/5/2012	2:49:40 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	2:49:40 PM	Tube furnace set to 0
12/5/2012	2:49:41 PM	Run finished at 2:49 PM
12/5/2012	2:52:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/5/2012	2:52:39 PM	Recipe started at 2:52 PM
12/5/2012	2:52:39 PM	Helium valve closed
12/5/2012	2:52:39 PM	H2 valve closed
12/5/2012	2:52:39 PM	BCl3 valve closed
12/5/2012	2:52:39 PM	PH3 valve closed
12/5/2012	2:52:39 PM	SiCl4 pre valve closed
12/5/2012	2:52:39 PM	SiCl4 post valve closed
12/5/2012	2:52:39 PM	Main Vac valve closed
12/5/2012	2:52:39 PM	Bubbler valve closed
12/5/2012	2:52:39 PM	Bypass valve opened
12/5/2012	2:52:39 PM	Helium MFC set to  0.000000
12/5/2012	2:52:39 PM	H2 MFC set to  0.000000
12/5/2012	2:52:39 PM	BCl3 MFC set to  0.000000
12/5/2012	2:52:39 PM	PH3 MFC set to  0.000000
12/5/2012	2:52:39 PM	SiCl4 MFC set to  0.000000
12/5/2012	2:52:39 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	2:52:39 PM	Tube furnace set to 0
12/5/2012	2:53:55 PM	Helium valve closed
12/5/2012	2:53:55 PM	H2 valve closed
12/5/2012	2:53:55 PM	BCl3 valve closed
12/5/2012	2:53:55 PM	PH3 valve closed
12/5/2012	2:53:55 PM	SiCl4 pre valve closed
12/5/2012	2:53:55 PM	SiCl4 post valve closed
12/5/2012	2:53:55 PM	Main Vac valve closed
12/5/2012	2:53:55 PM	Bubbler valve closed
12/5/2012	2:53:55 PM	Bypass valve opened
12/5/2012	2:53:55 PM	Helium MFC set to  0.000000
12/5/2012	2:53:55 PM	H2 MFC set to  0.000000
12/5/2012	2:53:55 PM	BCl3 MFC set to  0.000000
12/5/2012	2:53:55 PM	PH3 MFC set to  0.000000
12/5/2012	2:53:55 PM	SiCl4 MFC set to  0.000000
12/5/2012	2:53:55 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	2:53:55 PM	Tube furnace set to 0
12/5/2012	2:54:26 PM	Helium valve closed
12/5/2012	2:54:26 PM	H2 valve closed
12/5/2012	2:54:26 PM	BCl3 valve closed
12/5/2012	2:54:26 PM	PH3 valve closed
12/5/2012	2:54:26 PM	SiCl4 pre valve closed
12/5/2012	2:54:26 PM	SiCl4 post valve closed
12/5/2012	2:54:26 PM	Bypass valve closed
12/5/2012	2:54:26 PM	Bubbler valve closed
12/5/2012	2:54:26 PM	Main Vac valve opened
12/5/2012	2:54:26 PM	Helium MFC set to  0.000000
12/5/2012	2:54:26 PM	H2 MFC set to  0.000000
12/5/2012	2:54:26 PM	BCl3 MFC set to  0.000000
12/5/2012	2:54:26 PM	PH3 MFC set to  0.000000
12/5/2012	2:54:26 PM	SiCl4 MFC set to  0.000000
12/5/2012	2:54:26 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	2:54:26 PM	Tube furnace set to 0
12/5/2012	2:54:27 PM	Run finished at 2:54 PM
12/5/2012	2:54:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/5/2012	3:09:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/5/2012	3:09:26 PM	Recipe started at 3:09 PM
12/5/2012	3:09:26 PM	Helium valve closed
12/5/2012	3:09:26 PM	H2 valve closed
12/5/2012	3:09:26 PM	BCl3 valve closed
12/5/2012	3:09:26 PM	PH3 valve closed
12/5/2012	3:09:26 PM	SiCl4 pre valve closed
12/5/2012	3:09:26 PM	SiCl4 post valve closed
12/5/2012	3:09:26 PM	Main Vac valve closed
12/5/2012	3:09:26 PM	Bubbler valve closed
12/5/2012	3:09:26 PM	Bypass valve opened
12/5/2012	3:09:26 PM	Helium MFC set to  0.000000
12/5/2012	3:09:26 PM	H2 MFC set to  0.000000
12/5/2012	3:09:26 PM	BCl3 MFC set to  0.000000
12/5/2012	3:09:26 PM	PH3 MFC set to  0.000000
12/5/2012	3:09:26 PM	SiCl4 MFC set to  0.000000
12/5/2012	3:09:26 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	3:09:26 PM	Tube furnace set to 0
12/5/2012	3:09:26 PM	Helium valve closed
12/5/2012	3:09:26 PM	H2 valve closed
12/5/2012	3:09:26 PM	BCl3 valve closed
12/5/2012	3:09:26 PM	PH3 valve closed
12/5/2012	3:09:26 PM	SiCl4 pre valve closed
12/5/2012	3:09:26 PM	SiCl4 post valve closed
12/5/2012	3:09:26 PM	Main Vac valve closed
12/5/2012	3:09:26 PM	Bubbler valve closed
12/5/2012	3:09:26 PM	Bypass valve opened
12/5/2012	3:09:26 PM	Helium MFC set to  0.000000
12/5/2012	3:09:26 PM	H2 MFC set to  0.000000
12/5/2012	3:09:26 PM	BCl3 MFC set to  0.000000
12/5/2012	3:09:26 PM	PH3 MFC set to  0.000000
12/5/2012	3:09:26 PM	SiCl4 MFC set to  0.000000
12/5/2012	3:09:26 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	3:09:26 PM	Tube furnace set to 0
12/5/2012	3:09:27 PM	Helium valve closed
12/5/2012	3:09:27 PM	H2 valve closed
12/5/2012	3:09:27 PM	BCl3 valve closed
12/5/2012	3:09:27 PM	PH3 valve closed
12/5/2012	3:09:27 PM	SiCl4 pre valve closed
12/5/2012	3:09:27 PM	SiCl4 post valve closed
12/5/2012	3:09:27 PM	Bypass valve closed
12/5/2012	3:09:27 PM	Bubbler valve closed
12/5/2012	3:09:27 PM	Main Vac valve opened
12/5/2012	3:09:27 PM	Helium MFC set to  0.000000
12/5/2012	3:09:27 PM	H2 MFC set to  0.000000
12/5/2012	3:09:27 PM	BCl3 MFC set to  0.000000
12/5/2012	3:09:27 PM	PH3 MFC set to  0.000000
12/5/2012	3:09:27 PM	SiCl4 MFC set to  0.000000
12/5/2012	3:09:27 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	3:09:27 PM	Tube furnace set to 0
12/5/2012	3:09:29 PM	H2 valve closed
12/5/2012	3:09:29 PM	BCl3 valve closed
12/5/2012	3:09:29 PM	PH3 valve closed
12/5/2012	3:09:29 PM	SiCl4 pre valve closed
12/5/2012	3:09:29 PM	SiCl4 post valve closed
12/5/2012	3:09:29 PM	Bypass valve closed
12/5/2012	3:09:29 PM	Bubbler valve closed
12/5/2012	3:09:29 PM	Helium valve opened
12/5/2012	3:09:29 PM	Main Vac valve opened
12/5/2012	3:09:29 PM	Helium MFC set to  20.000000
12/5/2012	3:09:29 PM	H2 MFC set to  0.000000
12/5/2012	3:09:29 PM	BCl3 MFC set to  0.000000
12/5/2012	3:09:29 PM	PH3 MFC set to  0.000000
12/5/2012	3:09:30 PM	SiCl4 MFC set to  0.000000
12/5/2012	3:09:30 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	3:09:30 PM	Tube furnace set to 0
12/5/2012	3:10:00 PM	Helium valve closed
12/5/2012	3:10:00 PM	H2 valve closed
12/5/2012	3:10:00 PM	BCl3 valve closed
12/5/2012	3:10:00 PM	PH3 valve closed
12/5/2012	3:10:00 PM	SiCl4 pre valve closed
12/5/2012	3:10:00 PM	SiCl4 post valve closed
12/5/2012	3:10:00 PM	Bypass valve closed
12/5/2012	3:10:00 PM	Bubbler valve closed
12/5/2012	3:10:00 PM	Main Vac valve opened
12/5/2012	3:10:00 PM	Helium MFC set to  0.000000
12/5/2012	3:10:00 PM	H2 MFC set to  0.000000
12/5/2012	3:10:00 PM	BCl3 MFC set to  0.000000
12/5/2012	3:10:00 PM	PH3 MFC set to  0.000000
12/5/2012	3:10:00 PM	SiCl4 MFC set to  0.000000
12/5/2012	3:10:00 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	3:10:00 PM	Tube furnace set to 0
12/5/2012	3:10:30 PM	H2 valve closed
12/5/2012	3:10:30 PM	BCl3 valve closed
12/5/2012	3:10:30 PM	PH3 valve closed
12/5/2012	3:10:30 PM	SiCl4 pre valve closed
12/5/2012	3:10:30 PM	SiCl4 post valve closed
12/5/2012	3:10:30 PM	Bypass valve closed
12/5/2012	3:10:30 PM	Bubbler valve closed
12/5/2012	3:10:30 PM	Helium valve opened
12/5/2012	3:10:30 PM	Main Vac valve opened
12/5/2012	3:10:30 PM	Helium MFC set to  20.000000
12/5/2012	3:10:30 PM	H2 MFC set to  0.000000
12/5/2012	3:10:30 PM	BCl3 MFC set to  0.000000
12/5/2012	3:10:30 PM	PH3 MFC set to  0.000000
12/5/2012	3:10:30 PM	SiCl4 MFC set to  0.000000
12/5/2012	3:10:30 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	3:10:30 PM	Tube furnace set to 0
12/5/2012	3:11:00 PM	Helium valve closed
12/5/2012	3:11:00 PM	H2 valve closed
12/5/2012	3:11:00 PM	BCl3 valve closed
12/5/2012	3:11:00 PM	PH3 valve closed
12/5/2012	3:11:00 PM	SiCl4 pre valve closed
12/5/2012	3:11:00 PM	SiCl4 post valve closed
12/5/2012	3:11:00 PM	Bypass valve closed
12/5/2012	3:11:00 PM	Bubbler valve closed
12/5/2012	3:11:00 PM	Main Vac valve opened
12/5/2012	3:11:00 PM	Helium MFC set to  0.000000
12/5/2012	3:11:00 PM	H2 MFC set to  0.000000
12/5/2012	3:11:00 PM	BCl3 MFC set to  0.000000
12/5/2012	3:11:00 PM	PH3 MFC set to  0.000000
12/5/2012	3:11:00 PM	SiCl4 MFC set to  0.000000
12/5/2012	3:11:00 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	3:11:00 PM	Tube furnace set to 0
12/5/2012	3:11:30 PM	H2 valve closed
12/5/2012	3:11:30 PM	BCl3 valve closed
12/5/2012	3:11:30 PM	PH3 valve closed
12/5/2012	3:11:30 PM	SiCl4 pre valve closed
12/5/2012	3:11:30 PM	SiCl4 post valve closed
12/5/2012	3:11:30 PM	Bypass valve closed
12/5/2012	3:11:30 PM	Bubbler valve closed
12/5/2012	3:11:30 PM	Helium valve opened
12/5/2012	3:11:30 PM	Main Vac valve opened
12/5/2012	3:11:30 PM	Helium MFC set to  20.000000
12/5/2012	3:11:30 PM	H2 MFC set to  0.000000
12/5/2012	3:11:30 PM	BCl3 MFC set to  0.000000
12/5/2012	3:11:30 PM	PH3 MFC set to  0.000000
12/5/2012	3:11:30 PM	SiCl4 MFC set to  0.000000
12/5/2012	3:11:30 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	3:11:31 PM	Tube furnace set to 0
12/5/2012	3:12:01 PM	Helium valve closed
12/5/2012	3:12:01 PM	H2 valve closed
12/5/2012	3:12:01 PM	BCl3 valve closed
12/5/2012	3:12:01 PM	PH3 valve closed
12/5/2012	3:12:01 PM	SiCl4 pre valve closed
12/5/2012	3:12:01 PM	SiCl4 post valve closed
12/5/2012	3:12:01 PM	Bypass valve closed
12/5/2012	3:12:01 PM	Bubbler valve closed
12/5/2012	3:12:01 PM	Main Vac valve opened
12/5/2012	3:12:01 PM	Helium MFC set to  0.000000
12/5/2012	3:12:01 PM	H2 MFC set to  0.000000
12/5/2012	3:12:01 PM	BCl3 MFC set to  0.000000
12/5/2012	3:12:01 PM	PH3 MFC set to  0.000000
12/5/2012	3:12:01 PM	SiCl4 MFC set to  0.000000
12/5/2012	3:12:01 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	3:12:01 PM	Tube furnace set to 0
12/5/2012	3:12:31 PM	H2 valve closed
12/5/2012	3:12:31 PM	BCl3 valve closed
12/5/2012	3:12:31 PM	PH3 valve closed
12/5/2012	3:12:31 PM	SiCl4 pre valve closed
12/5/2012	3:12:31 PM	SiCl4 post valve closed
12/5/2012	3:12:31 PM	Bypass valve closed
12/5/2012	3:12:31 PM	Bubbler valve closed
12/5/2012	3:12:31 PM	Helium valve opened
12/5/2012	3:12:31 PM	Main Vac valve opened
12/5/2012	3:12:31 PM	Helium MFC set to  20.000000
12/5/2012	3:12:31 PM	H2 MFC set to  0.000000
12/5/2012	3:12:31 PM	BCl3 MFC set to  0.000000
12/5/2012	3:12:31 PM	PH3 MFC set to  0.000000
12/5/2012	3:12:31 PM	SiCl4 MFC set to  0.000000
12/5/2012	3:12:31 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	3:12:31 PM	Tube furnace set to 0
12/5/2012	3:13:01 PM	Helium valve closed
12/5/2012	3:13:01 PM	H2 valve closed
12/5/2012	3:13:01 PM	BCl3 valve closed
12/5/2012	3:13:01 PM	PH3 valve closed
12/5/2012	3:13:01 PM	SiCl4 pre valve closed
12/5/2012	3:13:01 PM	SiCl4 post valve closed
12/5/2012	3:13:01 PM	Bypass valve closed
12/5/2012	3:13:01 PM	Bubbler valve closed
12/5/2012	3:13:01 PM	Main Vac valve opened
12/5/2012	3:13:01 PM	Helium MFC set to  0.000000
12/5/2012	3:13:01 PM	H2 MFC set to  0.000000
12/5/2012	3:13:01 PM	BCl3 MFC set to  0.000000
12/5/2012	3:13:01 PM	PH3 MFC set to  0.000000
12/5/2012	3:13:01 PM	SiCl4 MFC set to  0.000000
12/5/2012	3:13:01 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	3:13:01 PM	Tube furnace set to 0
12/5/2012	3:13:31 PM	H2 valve closed
12/5/2012	3:13:31 PM	BCl3 valve closed
12/5/2012	3:13:31 PM	PH3 valve closed
12/5/2012	3:13:31 PM	SiCl4 pre valve closed
12/5/2012	3:13:31 PM	SiCl4 post valve closed
12/5/2012	3:13:31 PM	Bypass valve closed
12/5/2012	3:13:31 PM	Bubbler valve closed
12/5/2012	3:13:31 PM	Helium valve opened
12/5/2012	3:13:31 PM	Main Vac valve opened
12/5/2012	3:13:31 PM	Helium MFC set to  20.000000
12/5/2012	3:13:31 PM	H2 MFC set to  0.000000
12/5/2012	3:13:31 PM	BCl3 MFC set to  0.000000
12/5/2012	3:13:31 PM	PH3 MFC set to  0.000000
12/5/2012	3:13:31 PM	SiCl4 MFC set to  0.000000
12/5/2012	3:13:31 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	3:13:32 PM	Tube furnace set to 0
12/5/2012	3:14:02 PM	Helium valve closed
12/5/2012	3:14:02 PM	H2 valve closed
12/5/2012	3:14:02 PM	BCl3 valve closed
12/5/2012	3:14:02 PM	PH3 valve closed
12/5/2012	3:14:02 PM	SiCl4 pre valve closed
12/5/2012	3:14:02 PM	SiCl4 post valve closed
12/5/2012	3:14:02 PM	Bypass valve closed
12/5/2012	3:14:02 PM	Bubbler valve closed
12/5/2012	3:14:02 PM	Main Vac valve opened
12/5/2012	3:14:02 PM	Helium MFC set to  0.000000
12/5/2012	3:14:02 PM	H2 MFC set to  0.000000
12/5/2012	3:14:02 PM	BCl3 MFC set to  0.000000
12/5/2012	3:14:02 PM	PH3 MFC set to  0.000000
12/5/2012	3:14:02 PM	SiCl4 MFC set to  0.000000
12/5/2012	3:14:02 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	3:14:02 PM	Tube furnace set to 0
12/5/2012	3:14:32 PM	H2 valve closed
12/5/2012	3:14:32 PM	BCl3 valve closed
12/5/2012	3:14:32 PM	PH3 valve closed
12/5/2012	3:14:32 PM	SiCl4 pre valve closed
12/5/2012	3:14:32 PM	SiCl4 post valve closed
12/5/2012	3:14:32 PM	Bypass valve closed
12/5/2012	3:14:32 PM	Bubbler valve closed
12/5/2012	3:14:32 PM	Helium valve opened
12/5/2012	3:14:32 PM	Main Vac valve opened
12/5/2012	3:14:32 PM	Helium MFC set to  20.000000
12/5/2012	3:14:32 PM	H2 MFC set to  0.000000
12/5/2012	3:14:32 PM	BCl3 MFC set to  0.000000
12/5/2012	3:14:32 PM	PH3 MFC set to  0.000000
12/5/2012	3:14:32 PM	SiCl4 MFC set to  0.000000
12/5/2012	3:14:32 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	3:14:32 PM	Tube furnace set to 0
12/5/2012	3:15:02 PM	Helium valve closed
12/5/2012	3:15:02 PM	H2 valve closed
12/5/2012	3:15:02 PM	BCl3 valve closed
12/5/2012	3:15:02 PM	PH3 valve closed
12/5/2012	3:15:02 PM	SiCl4 pre valve closed
12/5/2012	3:15:02 PM	SiCl4 post valve closed
12/5/2012	3:15:02 PM	Bypass valve closed
12/5/2012	3:15:02 PM	Bubbler valve closed
12/5/2012	3:15:02 PM	Main Vac valve opened
12/5/2012	3:15:02 PM	Helium MFC set to  0.000000
12/5/2012	3:15:02 PM	H2 MFC set to  0.000000
12/5/2012	3:15:02 PM	BCl3 MFC set to  0.000000
12/5/2012	3:15:02 PM	PH3 MFC set to  0.000000
12/5/2012	3:15:02 PM	SiCl4 MFC set to  0.000000
12/5/2012	3:15:02 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	3:15:02 PM	Tube furnace set to 0
12/5/2012	3:15:32 PM	H2 valve closed
12/5/2012	3:15:32 PM	BCl3 valve closed
12/5/2012	3:15:32 PM	PH3 valve closed
12/5/2012	3:15:32 PM	SiCl4 pre valve closed
12/5/2012	3:15:32 PM	SiCl4 post valve closed
12/5/2012	3:15:32 PM	Bypass valve closed
12/5/2012	3:15:32 PM	Bubbler valve closed
12/5/2012	3:15:32 PM	Helium valve opened
12/5/2012	3:15:32 PM	Main Vac valve opened
12/5/2012	3:15:32 PM	Helium MFC set to  20.000000
12/5/2012	3:15:32 PM	H2 MFC set to  0.000000
12/5/2012	3:15:32 PM	BCl3 MFC set to  0.000000
12/5/2012	3:15:32 PM	PH3 MFC set to  0.000000
12/5/2012	3:15:32 PM	SiCl4 MFC set to  0.000000
12/5/2012	3:15:32 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	3:15:33 PM	Tube furnace set to 0
12/5/2012	3:16:03 PM	Helium valve closed
12/5/2012	3:16:03 PM	H2 valve closed
12/5/2012	3:16:03 PM	BCl3 valve closed
12/5/2012	3:16:03 PM	PH3 valve closed
12/5/2012	3:16:03 PM	SiCl4 pre valve closed
12/5/2012	3:16:03 PM	SiCl4 post valve closed
12/5/2012	3:16:03 PM	Bypass valve closed
12/5/2012	3:16:03 PM	Bubbler valve closed
12/5/2012	3:16:03 PM	Main Vac valve opened
12/5/2012	3:16:03 PM	Helium MFC set to  0.000000
12/5/2012	3:16:03 PM	H2 MFC set to  0.000000
12/5/2012	3:16:03 PM	BCl3 MFC set to  0.000000
12/5/2012	3:16:03 PM	PH3 MFC set to  0.000000
12/5/2012	3:16:03 PM	SiCl4 MFC set to  0.000000
12/5/2012	3:16:03 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	3:16:03 PM	Tube furnace set to 0
12/5/2012	3:16:33 PM	H2 valve closed
12/5/2012	3:16:33 PM	BCl3 valve closed
12/5/2012	3:16:33 PM	PH3 valve closed
12/5/2012	3:16:33 PM	SiCl4 pre valve closed
12/5/2012	3:16:33 PM	SiCl4 post valve closed
12/5/2012	3:16:33 PM	Bypass valve closed
12/5/2012	3:16:33 PM	Bubbler valve closed
12/5/2012	3:16:33 PM	Helium valve opened
12/5/2012	3:16:33 PM	Main Vac valve opened
12/5/2012	3:16:33 PM	Helium MFC set to  20.000000
12/5/2012	3:16:33 PM	H2 MFC set to  0.000000
12/5/2012	3:16:33 PM	BCl3 MFC set to  0.000000
12/5/2012	3:16:33 PM	PH3 MFC set to  0.000000
12/5/2012	3:16:33 PM	SiCl4 MFC set to  0.000000
12/5/2012	3:16:33 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	3:16:33 PM	Tube furnace set to 0
12/5/2012	3:17:03 PM	Helium valve closed
12/5/2012	3:17:03 PM	H2 valve closed
12/5/2012	3:17:03 PM	BCl3 valve closed
12/5/2012	3:17:03 PM	PH3 valve closed
12/5/2012	3:17:03 PM	SiCl4 pre valve closed
12/5/2012	3:17:03 PM	SiCl4 post valve closed
12/5/2012	3:17:03 PM	Bypass valve closed
12/5/2012	3:17:03 PM	Bubbler valve closed
12/5/2012	3:17:03 PM	Main Vac valve opened
12/5/2012	3:17:03 PM	Helium MFC set to  0.000000
12/5/2012	3:17:03 PM	H2 MFC set to  0.000000
12/5/2012	3:17:03 PM	BCl3 MFC set to  0.000000
12/5/2012	3:17:03 PM	PH3 MFC set to  0.000000
12/5/2012	3:17:03 PM	SiCl4 MFC set to  0.000000
12/5/2012	3:17:03 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	3:17:03 PM	Tube furnace set to 0
12/5/2012	3:17:33 PM	H2 valve closed
12/5/2012	3:17:33 PM	BCl3 valve closed
12/5/2012	3:17:33 PM	PH3 valve closed
12/5/2012	3:17:33 PM	SiCl4 pre valve closed
12/5/2012	3:17:33 PM	SiCl4 post valve closed
12/5/2012	3:17:33 PM	Bypass valve closed
12/5/2012	3:17:33 PM	Bubbler valve closed
12/5/2012	3:17:33 PM	Helium valve opened
12/5/2012	3:17:33 PM	Main Vac valve opened
12/5/2012	3:17:33 PM	Helium MFC set to  20.000000
12/5/2012	3:17:33 PM	H2 MFC set to  0.000000
12/5/2012	3:17:33 PM	BCl3 MFC set to  0.000000
12/5/2012	3:17:33 PM	PH3 MFC set to  0.000000
12/5/2012	3:17:33 PM	SiCl4 MFC set to  0.000000
12/5/2012	3:17:33 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	3:17:34 PM	Tube furnace set to 0
12/5/2012	3:18:04 PM	Helium valve closed
12/5/2012	3:18:04 PM	H2 valve closed
12/5/2012	3:18:04 PM	BCl3 valve closed
12/5/2012	3:18:04 PM	PH3 valve closed
12/5/2012	3:18:04 PM	SiCl4 pre valve closed
12/5/2012	3:18:04 PM	SiCl4 post valve closed
12/5/2012	3:18:04 PM	Bypass valve closed
12/5/2012	3:18:04 PM	Bubbler valve closed
12/5/2012	3:18:04 PM	Main Vac valve opened
12/5/2012	3:18:04 PM	Helium MFC set to  0.000000
12/5/2012	3:18:04 PM	H2 MFC set to  0.000000
12/5/2012	3:18:04 PM	BCl3 MFC set to  0.000000
12/5/2012	3:18:04 PM	PH3 MFC set to  0.000000
12/5/2012	3:18:04 PM	SiCl4 MFC set to  0.000000
12/5/2012	3:18:04 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	3:18:04 PM	Tube furnace set to 0
12/5/2012	3:18:34 PM	H2 valve closed
12/5/2012	3:18:34 PM	BCl3 valve closed
12/5/2012	3:18:34 PM	PH3 valve closed
12/5/2012	3:18:34 PM	SiCl4 pre valve closed
12/5/2012	3:18:34 PM	SiCl4 post valve closed
12/5/2012	3:18:34 PM	Bypass valve closed
12/5/2012	3:18:34 PM	Bubbler valve closed
12/5/2012	3:18:34 PM	Helium valve opened
12/5/2012	3:18:34 PM	Main Vac valve opened
12/5/2012	3:18:34 PM	Helium MFC set to  20.000000
12/5/2012	3:18:34 PM	H2 MFC set to  0.000000
12/5/2012	3:18:34 PM	BCl3 MFC set to  0.000000
12/5/2012	3:18:34 PM	PH3 MFC set to  0.000000
12/5/2012	3:18:34 PM	SiCl4 MFC set to  0.000000
12/5/2012	3:18:34 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	3:18:34 PM	Tube furnace set to 0
12/5/2012	3:19:04 PM	Helium valve closed
12/5/2012	3:19:04 PM	H2 valve closed
12/5/2012	3:19:04 PM	BCl3 valve closed
12/5/2012	3:19:04 PM	PH3 valve closed
12/5/2012	3:19:04 PM	SiCl4 pre valve closed
12/5/2012	3:19:04 PM	SiCl4 post valve closed
12/5/2012	3:19:04 PM	Bypass valve closed
12/5/2012	3:19:04 PM	Bubbler valve closed
12/5/2012	3:19:04 PM	Main Vac valve opened
12/5/2012	3:19:04 PM	Helium MFC set to  0.000000
12/5/2012	3:19:04 PM	H2 MFC set to  0.000000
12/5/2012	3:19:04 PM	BCl3 MFC set to  0.000000
12/5/2012	3:19:04 PM	PH3 MFC set to  0.000000
12/5/2012	3:19:04 PM	SiCl4 MFC set to  0.000000
12/5/2012	3:19:04 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	3:19:04 PM	Tube furnace set to 0
12/5/2012	3:19:05 PM	Run finished at 3:19 PM
12/5/2012	3:19:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/5/2012	3:24:48 PM	Main Vac valve closed
12/5/2012	3:25:02 PM	Main Vac valve opened
12/5/2012	3:25:15 PM	Recipe started at 3:25 PM
12/5/2012	3:25:15 PM	Helium valve closed
12/5/2012	3:25:15 PM	H2 valve closed
12/5/2012	3:25:15 PM	BCl3 valve closed
12/5/2012	3:25:15 PM	PH3 valve closed
12/5/2012	3:25:15 PM	SiCl4 pre valve closed
12/5/2012	3:25:15 PM	SiCl4 post valve closed
12/5/2012	3:25:15 PM	Main Vac valve closed
12/5/2012	3:25:15 PM	Bypass valve closed
12/5/2012	3:25:15 PM	Bubbler valve closed
12/5/2012	3:25:15 PM	Helium MFC set to  0.000000
12/5/2012	3:25:15 PM	H2 MFC set to  0.000000
12/5/2012	3:25:15 PM	BCl3 MFC set to  0.000000
12/5/2012	3:25:16 PM	PH3 MFC set to  0.000000
12/5/2012	3:25:16 PM	SiCl4 MFC set to  0.000000
12/5/2012	3:25:16 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	3:25:16 PM	Tube furnace set to 0
12/5/2012	3:25:19 PM	Helium valve closed
12/5/2012	3:25:19 PM	BCl3 valve closed
12/5/2012	3:25:19 PM	PH3 valve closed
12/5/2012	3:25:19 PM	SiCl4 pre valve closed
12/5/2012	3:25:19 PM	SiCl4 post valve closed
12/5/2012	3:25:19 PM	Main Vac valve closed
12/5/2012	3:25:19 PM	Bypass valve closed
12/5/2012	3:25:19 PM	Bubbler valve closed
12/5/2012	3:25:19 PM	H2 valve opened
12/5/2012	3:25:19 PM	Helium MFC set to  0.000000
12/5/2012	3:25:19 PM	H2 MFC set to  500.000000
12/5/2012	3:25:19 PM	BCl3 MFC set to  0.000000
12/5/2012	3:25:19 PM	PH3 MFC set to  0.000000
12/5/2012	3:25:19 PM	SiCl4 MFC set to  0.000000
12/5/2012	3:25:19 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	3:25:19 PM	Tube furnace set to 0
12/5/2012	3:26:30 PM	Helium valve closed
12/5/2012	3:26:30 PM	BCl3 valve closed
12/5/2012	3:26:30 PM	PH3 valve closed
12/5/2012	3:26:30 PM	SiCl4 pre valve closed
12/5/2012	3:26:30 PM	SiCl4 post valve closed
12/5/2012	3:26:30 PM	Main Vac valve closed
12/5/2012	3:26:30 PM	Bypass valve closed
12/5/2012	3:26:30 PM	H2 valve opened
12/5/2012	3:26:30 PM	Bubbler valve opened
12/5/2012	3:26:30 PM	Helium MFC set to  0.000000
12/5/2012	3:26:30 PM	H2 MFC set to  500.000000
12/5/2012	3:26:30 PM	BCl3 MFC set to  0.000000
12/5/2012	3:26:30 PM	PH3 MFC set to  0.000000
12/5/2012	3:26:30 PM	SiCl4 MFC set to  0.000000
12/5/2012	3:26:30 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	3:26:30 PM	Tube furnace set to 0
12/5/2012	3:26:31 PM	Helium valve closed
12/5/2012	3:26:31 PM	BCl3 valve closed
12/5/2012	3:26:31 PM	PH3 valve closed
12/5/2012	3:26:31 PM	SiCl4 pre valve closed
12/5/2012	3:26:31 PM	SiCl4 post valve closed
12/5/2012	3:26:31 PM	Main Vac valve closed
12/5/2012	3:26:31 PM	Bypass valve closed
12/5/2012	3:26:31 PM	H2 valve opened
12/5/2012	3:26:31 PM	Bubbler valve opened
12/5/2012	3:26:31 PM	Helium MFC set to  0.000000
12/5/2012	3:26:31 PM	H2 MFC set to  500.000000
12/5/2012	3:26:31 PM	BCl3 MFC set to  0.000000
12/5/2012	3:26:31 PM	PH3 MFC set to  0.000000
12/5/2012	3:26:31 PM	SiCl4 MFC set to  0.000000
12/5/2012	3:26:31 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	3:26:32 PM	Tube furnace set to 1000
12/5/2012	3:56:32 PM	Helium valve closed
12/5/2012	3:56:32 PM	PH3 valve closed
12/5/2012	3:56:32 PM	Main Vac valve closed
12/5/2012	3:56:32 PM	Bypass valve closed
12/5/2012	3:56:32 PM	H2 valve opened
12/5/2012	3:56:32 PM	BCl3 valve opened
12/5/2012	3:56:32 PM	SiCl4 pre valve opened
12/5/2012	3:56:32 PM	SiCl4 post valve opened
12/5/2012	3:56:32 PM	Bubbler valve opened
12/5/2012	3:56:32 PM	Helium MFC set to  0.000000
12/5/2012	3:56:32 PM	H2 MFC set to  500.000000
12/5/2012	3:56:32 PM	BCl3 MFC set to  1.000000
12/5/2012	3:56:32 PM	PH3 MFC set to  0.000000
12/5/2012	3:56:32 PM	SiCl4 MFC set to  50.000000
12/5/2012	3:56:32 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	3:56:32 PM	Tube furnace set to 1000
12/5/2012	4:08:32 PM	Helium valve closed
12/5/2012	4:08:32 PM	BCl3 valve closed
12/5/2012	4:08:32 PM	PH3 valve closed
12/5/2012	4:08:32 PM	SiCl4 pre valve closed
12/5/2012	4:08:32 PM	SiCl4 post valve closed
12/5/2012	4:08:32 PM	Main Vac valve closed
12/5/2012	4:08:32 PM	Bypass valve closed
12/5/2012	4:08:32 PM	H2 valve opened
12/5/2012	4:08:32 PM	Bubbler valve opened
12/5/2012	4:08:32 PM	Helium MFC set to  0.000000
12/5/2012	4:08:32 PM	H2 MFC set to  500.000000
12/5/2012	4:08:32 PM	BCl3 MFC set to  0.000000
12/5/2012	4:08:32 PM	PH3 MFC set to  0.000000
12/5/2012	4:08:32 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:08:32 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:08:32 PM	Tube furnace set to 750
12/5/2012	4:13:32 PM	H2 valve closed
12/5/2012	4:13:32 PM	BCl3 valve closed
12/5/2012	4:13:32 PM	PH3 valve closed
12/5/2012	4:13:32 PM	SiCl4 pre valve closed
12/5/2012	4:13:32 PM	SiCl4 post valve closed
12/5/2012	4:13:32 PM	Main Vac valve closed
12/5/2012	4:13:32 PM	Bypass valve closed
12/5/2012	4:13:32 PM	Helium valve opened
12/5/2012	4:13:32 PM	Bubbler valve opened
12/5/2012	4:13:32 PM	Helium MFC set to  500.000000
12/5/2012	4:13:32 PM	H2 MFC set to  0.000000
12/5/2012	4:13:32 PM	BCl3 MFC set to  0.000000
12/5/2012	4:13:32 PM	PH3 MFC set to  0.000000
12/5/2012	4:13:32 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:13:32 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:13:32 PM	Tube furnace set to 0
12/5/2012	4:27:18 PM	Helium valve closed
12/5/2012	4:27:18 PM	H2 valve closed
12/5/2012	4:27:18 PM	BCl3 valve closed
12/5/2012	4:27:18 PM	PH3 valve closed
12/5/2012	4:27:18 PM	SiCl4 pre valve closed
12/5/2012	4:27:18 PM	SiCl4 post valve closed
12/5/2012	4:27:18 PM	Main Vac valve closed
12/5/2012	4:27:18 PM	Bypass valve closed
12/5/2012	4:27:18 PM	Bubbler valve closed
12/5/2012	4:27:18 PM	Helium MFC set to  0.000000
12/5/2012	4:27:18 PM	H2 MFC set to  0.000000
12/5/2012	4:27:18 PM	BCl3 MFC set to  0.000000
12/5/2012	4:27:18 PM	PH3 MFC set to  0.000000
12/5/2012	4:27:18 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:27:18 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:27:18 PM	Tube furnace set to 0
12/5/2012	4:27:19 PM	Run finished at 4:27 PM
12/5/2012	4:32:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/5/2012	4:32:02 PM	Recipe started at 4:32 PM
12/5/2012	4:32:02 PM	Helium valve closed
12/5/2012	4:32:02 PM	H2 valve closed
12/5/2012	4:32:02 PM	BCl3 valve closed
12/5/2012	4:32:02 PM	PH3 valve closed
12/5/2012	4:32:02 PM	SiCl4 pre valve closed
12/5/2012	4:32:02 PM	SiCl4 post valve closed
12/5/2012	4:32:02 PM	Main Vac valve closed
12/5/2012	4:32:02 PM	Bubbler valve closed
12/5/2012	4:32:02 PM	Bypass valve opened
12/5/2012	4:32:02 PM	Helium MFC set to  0.000000
12/5/2012	4:32:02 PM	H2 MFC set to  0.000000
12/5/2012	4:32:02 PM	BCl3 MFC set to  0.000000
12/5/2012	4:32:02 PM	PH3 MFC set to  0.000000
12/5/2012	4:32:02 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:32:02 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:32:02 PM	Tube furnace set to 0
12/5/2012	4:33:23 PM	Helium valve closed
12/5/2012	4:33:23 PM	H2 valve closed
12/5/2012	4:33:23 PM	BCl3 valve closed
12/5/2012	4:33:23 PM	PH3 valve closed
12/5/2012	4:33:23 PM	SiCl4 pre valve closed
12/5/2012	4:33:23 PM	SiCl4 post valve closed
12/5/2012	4:33:23 PM	Main Vac valve closed
12/5/2012	4:33:23 PM	Bubbler valve closed
12/5/2012	4:33:23 PM	Bypass valve opened
12/5/2012	4:33:23 PM	Helium MFC set to  0.000000
12/5/2012	4:33:23 PM	H2 MFC set to  0.000000
12/5/2012	4:33:23 PM	BCl3 MFC set to  0.000000
12/5/2012	4:33:23 PM	PH3 MFC set to  0.000000
12/5/2012	4:33:23 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:33:23 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:33:24 PM	Tube furnace set to 0
12/5/2012	4:33:28 PM	Helium valve closed
12/5/2012	4:33:28 PM	H2 valve closed
12/5/2012	4:33:28 PM	BCl3 valve closed
12/5/2012	4:33:28 PM	PH3 valve closed
12/5/2012	4:33:28 PM	SiCl4 pre valve closed
12/5/2012	4:33:28 PM	SiCl4 post valve closed
12/5/2012	4:33:28 PM	Bypass valve closed
12/5/2012	4:33:28 PM	Bubbler valve closed
12/5/2012	4:33:28 PM	Main Vac valve opened
12/5/2012	4:33:28 PM	Helium MFC set to  0.000000
12/5/2012	4:33:28 PM	H2 MFC set to  0.000000
12/5/2012	4:33:28 PM	BCl3 MFC set to  0.000000
12/5/2012	4:33:28 PM	PH3 MFC set to  0.000000
12/5/2012	4:33:28 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:33:28 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:33:28 PM	Tube furnace set to 0
12/5/2012	4:33:29 PM	Run finished at 4:33 PM
12/5/2012	4:33:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/5/2012	4:34:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/5/2012	4:34:52 PM	Recipe started at 4:34 PM
12/5/2012	4:34:52 PM	Helium valve closed
12/5/2012	4:34:52 PM	H2 valve closed
12/5/2012	4:34:52 PM	BCl3 valve closed
12/5/2012	4:34:52 PM	PH3 valve closed
12/5/2012	4:34:52 PM	SiCl4 pre valve closed
12/5/2012	4:34:52 PM	SiCl4 post valve closed
12/5/2012	4:34:52 PM	Main Vac valve closed
12/5/2012	4:34:52 PM	Bubbler valve closed
12/5/2012	4:34:52 PM	Bypass valve opened
12/5/2012	4:34:52 PM	Helium MFC set to  0.000000
12/5/2012	4:34:52 PM	H2 MFC set to  0.000000
12/5/2012	4:34:52 PM	BCl3 MFC set to  0.000000
12/5/2012	4:34:52 PM	PH3 MFC set to  0.000000
12/5/2012	4:34:52 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:34:52 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:34:52 PM	Tube furnace set to 0
12/5/2012	4:34:52 PM	Helium valve closed
12/5/2012	4:34:52 PM	H2 valve closed
12/5/2012	4:34:52 PM	BCl3 valve closed
12/5/2012	4:34:52 PM	PH3 valve closed
12/5/2012	4:34:52 PM	SiCl4 pre valve closed
12/5/2012	4:34:52 PM	SiCl4 post valve closed
12/5/2012	4:34:52 PM	Main Vac valve closed
12/5/2012	4:34:52 PM	Bubbler valve closed
12/5/2012	4:34:52 PM	Bypass valve opened
12/5/2012	4:34:52 PM	Helium MFC set to  0.000000
12/5/2012	4:34:52 PM	H2 MFC set to  0.000000
12/5/2012	4:34:52 PM	BCl3 MFC set to  0.000000
12/5/2012	4:34:52 PM	PH3 MFC set to  0.000000
12/5/2012	4:34:52 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:34:52 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:34:52 PM	Tube furnace set to 0
12/5/2012	4:34:53 PM	Helium valve closed
12/5/2012	4:34:53 PM	H2 valve closed
12/5/2012	4:34:53 PM	BCl3 valve closed
12/5/2012	4:34:53 PM	PH3 valve closed
12/5/2012	4:34:53 PM	SiCl4 pre valve closed
12/5/2012	4:34:53 PM	SiCl4 post valve closed
12/5/2012	4:34:53 PM	Bypass valve closed
12/5/2012	4:34:53 PM	Bubbler valve closed
12/5/2012	4:34:53 PM	Main Vac valve opened
12/5/2012	4:34:53 PM	Helium MFC set to  0.000000
12/5/2012	4:34:53 PM	H2 MFC set to  0.000000
12/5/2012	4:34:53 PM	BCl3 MFC set to  0.000000
12/5/2012	4:34:53 PM	PH3 MFC set to  0.000000
12/5/2012	4:34:53 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:34:53 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:34:53 PM	Tube furnace set to 0
12/5/2012	4:34:59 PM	H2 valve closed
12/5/2012	4:34:59 PM	BCl3 valve closed
12/5/2012	4:34:59 PM	PH3 valve closed
12/5/2012	4:34:59 PM	SiCl4 pre valve closed
12/5/2012	4:34:59 PM	SiCl4 post valve closed
12/5/2012	4:34:59 PM	Bypass valve closed
12/5/2012	4:34:59 PM	Bubbler valve closed
12/5/2012	4:34:59 PM	Helium valve opened
12/5/2012	4:34:59 PM	Main Vac valve opened
12/5/2012	4:34:59 PM	Helium MFC set to  20.000000
12/5/2012	4:34:59 PM	H2 MFC set to  0.000000
12/5/2012	4:34:59 PM	BCl3 MFC set to  0.000000
12/5/2012	4:34:59 PM	PH3 MFC set to  0.000000
12/5/2012	4:34:59 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:34:59 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:34:59 PM	Tube furnace set to 0
12/5/2012	4:35:30 PM	Helium valve closed
12/5/2012	4:35:30 PM	H2 valve closed
12/5/2012	4:35:30 PM	BCl3 valve closed
12/5/2012	4:35:30 PM	PH3 valve closed
12/5/2012	4:35:30 PM	SiCl4 pre valve closed
12/5/2012	4:35:30 PM	SiCl4 post valve closed
12/5/2012	4:35:30 PM	Bypass valve closed
12/5/2012	4:35:30 PM	Bubbler valve closed
12/5/2012	4:35:30 PM	Main Vac valve opened
12/5/2012	4:35:30 PM	Helium MFC set to  0.000000
12/5/2012	4:35:30 PM	H2 MFC set to  0.000000
12/5/2012	4:35:30 PM	BCl3 MFC set to  0.000000
12/5/2012	4:35:30 PM	PH3 MFC set to  0.000000
12/5/2012	4:35:30 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:35:30 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:35:30 PM	Tube furnace set to 0
12/5/2012	4:36:00 PM	H2 valve closed
12/5/2012	4:36:00 PM	BCl3 valve closed
12/5/2012	4:36:00 PM	PH3 valve closed
12/5/2012	4:36:00 PM	SiCl4 pre valve closed
12/5/2012	4:36:00 PM	SiCl4 post valve closed
12/5/2012	4:36:00 PM	Bypass valve closed
12/5/2012	4:36:00 PM	Bubbler valve closed
12/5/2012	4:36:00 PM	Helium valve opened
12/5/2012	4:36:00 PM	Main Vac valve opened
12/5/2012	4:36:00 PM	Helium MFC set to  20.000000
12/5/2012	4:36:00 PM	H2 MFC set to  0.000000
12/5/2012	4:36:00 PM	BCl3 MFC set to  0.000000
12/5/2012	4:36:00 PM	PH3 MFC set to  0.000000
12/5/2012	4:36:00 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:36:00 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:36:00 PM	Tube furnace set to 0
12/5/2012	4:36:30 PM	Helium valve closed
12/5/2012	4:36:30 PM	H2 valve closed
12/5/2012	4:36:30 PM	BCl3 valve closed
12/5/2012	4:36:30 PM	PH3 valve closed
12/5/2012	4:36:30 PM	SiCl4 pre valve closed
12/5/2012	4:36:30 PM	SiCl4 post valve closed
12/5/2012	4:36:30 PM	Bypass valve closed
12/5/2012	4:36:30 PM	Bubbler valve closed
12/5/2012	4:36:30 PM	Main Vac valve opened
12/5/2012	4:36:30 PM	Helium MFC set to  0.000000
12/5/2012	4:36:30 PM	H2 MFC set to  0.000000
12/5/2012	4:36:30 PM	BCl3 MFC set to  0.000000
12/5/2012	4:36:30 PM	PH3 MFC set to  0.000000
12/5/2012	4:36:30 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:36:30 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:36:30 PM	Tube furnace set to 0
12/5/2012	4:37:00 PM	H2 valve closed
12/5/2012	4:37:00 PM	BCl3 valve closed
12/5/2012	4:37:00 PM	PH3 valve closed
12/5/2012	4:37:00 PM	SiCl4 pre valve closed
12/5/2012	4:37:00 PM	SiCl4 post valve closed
12/5/2012	4:37:00 PM	Bypass valve closed
12/5/2012	4:37:00 PM	Bubbler valve closed
12/5/2012	4:37:00 PM	Helium valve opened
12/5/2012	4:37:00 PM	Main Vac valve opened
12/5/2012	4:37:00 PM	Helium MFC set to  20.000000
12/5/2012	4:37:00 PM	H2 MFC set to  0.000000
12/5/2012	4:37:00 PM	BCl3 MFC set to  0.000000
12/5/2012	4:37:00 PM	PH3 MFC set to  0.000000
12/5/2012	4:37:00 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:37:00 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:37:00 PM	Tube furnace set to 0
12/5/2012	4:37:30 PM	Helium valve closed
12/5/2012	4:37:31 PM	H2 valve closed
12/5/2012	4:37:31 PM	BCl3 valve closed
12/5/2012	4:37:31 PM	PH3 valve closed
12/5/2012	4:37:31 PM	SiCl4 pre valve closed
12/5/2012	4:37:31 PM	SiCl4 post valve closed
12/5/2012	4:37:31 PM	Bypass valve closed
12/5/2012	4:37:31 PM	Bubbler valve closed
12/5/2012	4:37:31 PM	Main Vac valve opened
12/5/2012	4:37:31 PM	Helium MFC set to  0.000000
12/5/2012	4:37:31 PM	H2 MFC set to  0.000000
12/5/2012	4:37:31 PM	BCl3 MFC set to  0.000000
12/5/2012	4:37:31 PM	PH3 MFC set to  0.000000
12/5/2012	4:37:31 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:37:31 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:37:31 PM	Tube furnace set to 0
12/5/2012	4:38:01 PM	H2 valve closed
12/5/2012	4:38:01 PM	BCl3 valve closed
12/5/2012	4:38:01 PM	PH3 valve closed
12/5/2012	4:38:01 PM	SiCl4 pre valve closed
12/5/2012	4:38:01 PM	SiCl4 post valve closed
12/5/2012	4:38:01 PM	Bypass valve closed
12/5/2012	4:38:01 PM	Bubbler valve closed
12/5/2012	4:38:01 PM	Helium valve opened
12/5/2012	4:38:01 PM	Main Vac valve opened
12/5/2012	4:38:01 PM	Helium MFC set to  20.000000
12/5/2012	4:38:01 PM	H2 MFC set to  0.000000
12/5/2012	4:38:01 PM	BCl3 MFC set to  0.000000
12/5/2012	4:38:01 PM	PH3 MFC set to  0.000000
12/5/2012	4:38:01 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:38:01 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:38:01 PM	Tube furnace set to 0
12/5/2012	4:38:31 PM	Helium valve closed
12/5/2012	4:38:31 PM	H2 valve closed
12/5/2012	4:38:31 PM	BCl3 valve closed
12/5/2012	4:38:31 PM	PH3 valve closed
12/5/2012	4:38:31 PM	SiCl4 pre valve closed
12/5/2012	4:38:31 PM	SiCl4 post valve closed
12/5/2012	4:38:31 PM	Bypass valve closed
12/5/2012	4:38:31 PM	Bubbler valve closed
12/5/2012	4:38:31 PM	Main Vac valve opened
12/5/2012	4:38:31 PM	Helium MFC set to  0.000000
12/5/2012	4:38:31 PM	H2 MFC set to  0.000000
12/5/2012	4:38:31 PM	BCl3 MFC set to  0.000000
12/5/2012	4:38:31 PM	PH3 MFC set to  0.000000
12/5/2012	4:38:31 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:38:31 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:38:31 PM	Tube furnace set to 0
12/5/2012	4:39:01 PM	H2 valve closed
12/5/2012	4:39:01 PM	BCl3 valve closed
12/5/2012	4:39:01 PM	PH3 valve closed
12/5/2012	4:39:01 PM	SiCl4 pre valve closed
12/5/2012	4:39:01 PM	SiCl4 post valve closed
12/5/2012	4:39:01 PM	Bypass valve closed
12/5/2012	4:39:01 PM	Bubbler valve closed
12/5/2012	4:39:01 PM	Helium valve opened
12/5/2012	4:39:01 PM	Main Vac valve opened
12/5/2012	4:39:01 PM	Helium MFC set to  20.000000
12/5/2012	4:39:01 PM	H2 MFC set to  0.000000
12/5/2012	4:39:01 PM	BCl3 MFC set to  0.000000
12/5/2012	4:39:01 PM	PH3 MFC set to  0.000000
12/5/2012	4:39:01 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:39:01 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:39:01 PM	Tube furnace set to 0
12/5/2012	4:39:31 PM	Helium valve closed
12/5/2012	4:39:31 PM	H2 valve closed
12/5/2012	4:39:31 PM	BCl3 valve closed
12/5/2012	4:39:31 PM	PH3 valve closed
12/5/2012	4:39:31 PM	SiCl4 pre valve closed
12/5/2012	4:39:32 PM	SiCl4 post valve closed
12/5/2012	4:39:32 PM	Bypass valve closed
12/5/2012	4:39:32 PM	Bubbler valve closed
12/5/2012	4:39:32 PM	Main Vac valve opened
12/5/2012	4:39:32 PM	Helium MFC set to  0.000000
12/5/2012	4:39:32 PM	H2 MFC set to  0.000000
12/5/2012	4:39:32 PM	BCl3 MFC set to  0.000000
12/5/2012	4:39:32 PM	PH3 MFC set to  0.000000
12/5/2012	4:39:32 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:39:32 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:39:32 PM	Tube furnace set to 0
12/5/2012	4:40:02 PM	H2 valve closed
12/5/2012	4:40:02 PM	BCl3 valve closed
12/5/2012	4:40:02 PM	PH3 valve closed
12/5/2012	4:40:02 PM	SiCl4 pre valve closed
12/5/2012	4:40:02 PM	SiCl4 post valve closed
12/5/2012	4:40:02 PM	Bypass valve closed
12/5/2012	4:40:02 PM	Bubbler valve closed
12/5/2012	4:40:02 PM	Helium valve opened
12/5/2012	4:40:02 PM	Main Vac valve opened
12/5/2012	4:40:02 PM	Helium MFC set to  20.000000
12/5/2012	4:40:02 PM	H2 MFC set to  0.000000
12/5/2012	4:40:02 PM	BCl3 MFC set to  0.000000
12/5/2012	4:40:02 PM	PH3 MFC set to  0.000000
12/5/2012	4:40:02 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:40:02 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:40:02 PM	Tube furnace set to 0
12/5/2012	4:40:32 PM	Helium valve closed
12/5/2012	4:40:32 PM	H2 valve closed
12/5/2012	4:40:32 PM	BCl3 valve closed
12/5/2012	4:40:32 PM	PH3 valve closed
12/5/2012	4:40:32 PM	SiCl4 pre valve closed
12/5/2012	4:40:32 PM	SiCl4 post valve closed
12/5/2012	4:40:32 PM	Bypass valve closed
12/5/2012	4:40:32 PM	Bubbler valve closed
12/5/2012	4:40:32 PM	Main Vac valve opened
12/5/2012	4:40:32 PM	Helium MFC set to  0.000000
12/5/2012	4:40:32 PM	H2 MFC set to  0.000000
12/5/2012	4:40:32 PM	BCl3 MFC set to  0.000000
12/5/2012	4:40:32 PM	PH3 MFC set to  0.000000
12/5/2012	4:40:32 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:40:32 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:40:32 PM	Tube furnace set to 0
12/5/2012	4:41:02 PM	H2 valve closed
12/5/2012	4:41:02 PM	BCl3 valve closed
12/5/2012	4:41:02 PM	PH3 valve closed
12/5/2012	4:41:02 PM	SiCl4 pre valve closed
12/5/2012	4:41:02 PM	SiCl4 post valve closed
12/5/2012	4:41:02 PM	Bypass valve closed
12/5/2012	4:41:02 PM	Bubbler valve closed
12/5/2012	4:41:02 PM	Helium valve opened
12/5/2012	4:41:02 PM	Main Vac valve opened
12/5/2012	4:41:02 PM	Helium MFC set to  20.000000
12/5/2012	4:41:02 PM	H2 MFC set to  0.000000
12/5/2012	4:41:02 PM	BCl3 MFC set to  0.000000
12/5/2012	4:41:02 PM	PH3 MFC set to  0.000000
12/5/2012	4:41:02 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:41:02 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:41:02 PM	Tube furnace set to 0
12/5/2012	4:41:32 PM	Helium valve closed
12/5/2012	4:41:32 PM	H2 valve closed
12/5/2012	4:41:32 PM	BCl3 valve closed
12/5/2012	4:41:32 PM	PH3 valve closed
12/5/2012	4:41:32 PM	SiCl4 pre valve closed
12/5/2012	4:41:33 PM	SiCl4 post valve closed
12/5/2012	4:41:33 PM	Bypass valve closed
12/5/2012	4:41:33 PM	Bubbler valve closed
12/5/2012	4:41:33 PM	Main Vac valve opened
12/5/2012	4:41:33 PM	Helium MFC set to  0.000000
12/5/2012	4:41:33 PM	H2 MFC set to  0.000000
12/5/2012	4:41:33 PM	BCl3 MFC set to  0.000000
12/5/2012	4:41:33 PM	PH3 MFC set to  0.000000
12/5/2012	4:41:33 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:41:33 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:41:33 PM	Tube furnace set to 0
12/5/2012	4:42:03 PM	H2 valve closed
12/5/2012	4:42:03 PM	BCl3 valve closed
12/5/2012	4:42:03 PM	PH3 valve closed
12/5/2012	4:42:03 PM	SiCl4 pre valve closed
12/5/2012	4:42:03 PM	SiCl4 post valve closed
12/5/2012	4:42:03 PM	Bypass valve closed
12/5/2012	4:42:03 PM	Bubbler valve closed
12/5/2012	4:42:03 PM	Helium valve opened
12/5/2012	4:42:03 PM	Main Vac valve opened
12/5/2012	4:42:03 PM	Helium MFC set to  20.000000
12/5/2012	4:42:03 PM	H2 MFC set to  0.000000
12/5/2012	4:42:03 PM	BCl3 MFC set to  0.000000
12/5/2012	4:42:03 PM	PH3 MFC set to  0.000000
12/5/2012	4:42:03 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:42:03 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:42:03 PM	Tube furnace set to 0
12/5/2012	4:42:33 PM	Helium valve closed
12/5/2012	4:42:33 PM	H2 valve closed
12/5/2012	4:42:33 PM	BCl3 valve closed
12/5/2012	4:42:33 PM	PH3 valve closed
12/5/2012	4:42:33 PM	SiCl4 pre valve closed
12/5/2012	4:42:33 PM	SiCl4 post valve closed
12/5/2012	4:42:33 PM	Bypass valve closed
12/5/2012	4:42:33 PM	Bubbler valve closed
12/5/2012	4:42:33 PM	Main Vac valve opened
12/5/2012	4:42:33 PM	Helium MFC set to  0.000000
12/5/2012	4:42:33 PM	H2 MFC set to  0.000000
12/5/2012	4:42:33 PM	BCl3 MFC set to  0.000000
12/5/2012	4:42:33 PM	PH3 MFC set to  0.000000
12/5/2012	4:42:33 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:42:33 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:42:33 PM	Tube furnace set to 0
12/5/2012	4:43:03 PM	H2 valve closed
12/5/2012	4:43:03 PM	BCl3 valve closed
12/5/2012	4:43:03 PM	PH3 valve closed
12/5/2012	4:43:03 PM	SiCl4 pre valve closed
12/5/2012	4:43:03 PM	SiCl4 post valve closed
12/5/2012	4:43:03 PM	Bypass valve closed
12/5/2012	4:43:03 PM	Bubbler valve closed
12/5/2012	4:43:03 PM	Helium valve opened
12/5/2012	4:43:03 PM	Main Vac valve opened
12/5/2012	4:43:03 PM	Helium MFC set to  20.000000
12/5/2012	4:43:03 PM	H2 MFC set to  0.000000
12/5/2012	4:43:03 PM	BCl3 MFC set to  0.000000
12/5/2012	4:43:03 PM	PH3 MFC set to  0.000000
12/5/2012	4:43:03 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:43:03 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:43:03 PM	Tube furnace set to 0
12/5/2012	4:43:33 PM	Helium valve closed
12/5/2012	4:43:33 PM	H2 valve closed
12/5/2012	4:43:33 PM	BCl3 valve closed
12/5/2012	4:43:33 PM	PH3 valve closed
12/5/2012	4:43:33 PM	SiCl4 pre valve closed
12/5/2012	4:43:33 PM	SiCl4 post valve closed
12/5/2012	4:43:33 PM	Bypass valve closed
12/5/2012	4:43:33 PM	Bubbler valve closed
12/5/2012	4:43:34 PM	Main Vac valve opened
12/5/2012	4:43:34 PM	Helium MFC set to  0.000000
12/5/2012	4:43:34 PM	H2 MFC set to  0.000000
12/5/2012	4:43:34 PM	BCl3 MFC set to  0.000000
12/5/2012	4:43:34 PM	PH3 MFC set to  0.000000
12/5/2012	4:43:34 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:43:34 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:43:34 PM	Tube furnace set to 0
12/5/2012	4:44:04 PM	H2 valve closed
12/5/2012	4:44:04 PM	BCl3 valve closed
12/5/2012	4:44:04 PM	PH3 valve closed
12/5/2012	4:44:04 PM	SiCl4 pre valve closed
12/5/2012	4:44:04 PM	SiCl4 post valve closed
12/5/2012	4:44:04 PM	Bypass valve closed
12/5/2012	4:44:04 PM	Bubbler valve closed
12/5/2012	4:44:04 PM	Helium valve opened
12/5/2012	4:44:04 PM	Main Vac valve opened
12/5/2012	4:44:04 PM	Helium MFC set to  20.000000
12/5/2012	4:44:04 PM	H2 MFC set to  0.000000
12/5/2012	4:44:04 PM	BCl3 MFC set to  0.000000
12/5/2012	4:44:04 PM	PH3 MFC set to  0.000000
12/5/2012	4:44:04 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:44:04 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:44:04 PM	Tube furnace set to 0
12/5/2012	4:44:34 PM	Helium valve closed
12/5/2012	4:44:34 PM	H2 valve closed
12/5/2012	4:44:34 PM	BCl3 valve closed
12/5/2012	4:44:34 PM	PH3 valve closed
12/5/2012	4:44:34 PM	SiCl4 pre valve closed
12/5/2012	4:44:34 PM	SiCl4 post valve closed
12/5/2012	4:44:34 PM	Bypass valve closed
12/5/2012	4:44:34 PM	Bubbler valve closed
12/5/2012	4:44:34 PM	Main Vac valve opened
12/5/2012	4:44:34 PM	Helium MFC set to  0.000000
12/5/2012	4:44:34 PM	H2 MFC set to  0.000000
12/5/2012	4:44:34 PM	BCl3 MFC set to  0.000000
12/5/2012	4:44:34 PM	PH3 MFC set to  0.000000
12/5/2012	4:44:34 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:44:34 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:44:34 PM	Tube furnace set to 0
12/5/2012	4:44:35 PM	Run finished at 4:44 PM
12/5/2012	4:44:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/5/2012	4:47:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/5/2012	4:47:20 PM	Recipe started at 4:47 PM
12/5/2012	4:47:20 PM	Helium valve closed
12/5/2012	4:47:20 PM	H2 valve closed
12/5/2012	4:47:20 PM	BCl3 valve closed
12/5/2012	4:47:20 PM	PH3 valve closed
12/5/2012	4:47:20 PM	SiCl4 pre valve closed
12/5/2012	4:47:20 PM	SiCl4 post valve closed
12/5/2012	4:47:20 PM	Main Vac valve closed
12/5/2012	4:47:20 PM	Bubbler valve closed
12/5/2012	4:47:20 PM	Bypass valve opened
12/5/2012	4:47:20 PM	Helium MFC set to  0.000000
12/5/2012	4:47:20 PM	H2 MFC set to  0.000000
12/5/2012	4:47:20 PM	BCl3 MFC set to  0.000000
12/5/2012	4:47:20 PM	PH3 MFC set to  0.000000
12/5/2012	4:47:20 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:47:20 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:47:20 PM	Tube furnace set to 0
12/5/2012	4:47:20 PM	Helium valve closed
12/5/2012	4:47:20 PM	H2 valve closed
12/5/2012	4:47:20 PM	BCl3 valve closed
12/5/2012	4:47:20 PM	PH3 valve closed
12/5/2012	4:47:20 PM	SiCl4 pre valve closed
12/5/2012	4:47:20 PM	SiCl4 post valve closed
12/5/2012	4:47:20 PM	Main Vac valve closed
12/5/2012	4:47:20 PM	Bubbler valve closed
12/5/2012	4:47:20 PM	Bypass valve opened
12/5/2012	4:47:20 PM	Helium MFC set to  0.000000
12/5/2012	4:47:20 PM	H2 MFC set to  0.000000
12/5/2012	4:47:20 PM	BCl3 MFC set to  0.000000
12/5/2012	4:47:20 PM	PH3 MFC set to  0.000000
12/5/2012	4:47:20 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:47:20 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:47:20 PM	Tube furnace set to 0
12/5/2012	4:47:21 PM	Helium valve closed
12/5/2012	4:47:21 PM	H2 valve closed
12/5/2012	4:47:21 PM	BCl3 valve closed
12/5/2012	4:47:21 PM	PH3 valve closed
12/5/2012	4:47:21 PM	SiCl4 pre valve closed
12/5/2012	4:47:21 PM	SiCl4 post valve closed
12/5/2012	4:47:21 PM	Bypass valve closed
12/5/2012	4:47:21 PM	Bubbler valve closed
12/5/2012	4:47:21 PM	Main Vac valve opened
12/5/2012	4:47:21 PM	Helium MFC set to  0.000000
12/5/2012	4:47:21 PM	H2 MFC set to  0.000000
12/5/2012	4:47:21 PM	BCl3 MFC set to  0.000000
12/5/2012	4:47:21 PM	PH3 MFC set to  0.000000
12/5/2012	4:47:21 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:47:21 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:47:21 PM	Tube furnace set to 0
12/5/2012	4:47:51 PM	H2 valve closed
12/5/2012	4:47:51 PM	BCl3 valve closed
12/5/2012	4:47:51 PM	PH3 valve closed
12/5/2012	4:47:51 PM	SiCl4 pre valve closed
12/5/2012	4:47:51 PM	SiCl4 post valve closed
12/5/2012	4:47:51 PM	Bypass valve closed
12/5/2012	4:47:51 PM	Bubbler valve closed
12/5/2012	4:47:51 PM	Helium valve opened
12/5/2012	4:47:51 PM	Main Vac valve opened
12/5/2012	4:47:51 PM	Helium MFC set to  20.000000
12/5/2012	4:47:51 PM	H2 MFC set to  0.000000
12/5/2012	4:47:51 PM	BCl3 MFC set to  0.000000
12/5/2012	4:47:51 PM	PH3 MFC set to  0.000000
12/5/2012	4:47:51 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:47:51 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:47:51 PM	Tube furnace set to 0
12/5/2012	4:48:21 PM	Helium valve closed
12/5/2012	4:48:21 PM	H2 valve closed
12/5/2012	4:48:21 PM	BCl3 valve closed
12/5/2012	4:48:21 PM	PH3 valve closed
12/5/2012	4:48:21 PM	SiCl4 pre valve closed
12/5/2012	4:48:21 PM	SiCl4 post valve closed
12/5/2012	4:48:21 PM	Bypass valve closed
12/5/2012	4:48:21 PM	Bubbler valve closed
12/5/2012	4:48:21 PM	Main Vac valve opened
12/5/2012	4:48:21 PM	Helium MFC set to  0.000000
12/5/2012	4:48:21 PM	H2 MFC set to  0.000000
12/5/2012	4:48:21 PM	BCl3 MFC set to  0.000000
12/5/2012	4:48:21 PM	PH3 MFC set to  0.000000
12/5/2012	4:48:21 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:48:21 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:48:21 PM	Tube furnace set to 0
12/5/2012	4:48:51 PM	H2 valve closed
12/5/2012	4:48:51 PM	BCl3 valve closed
12/5/2012	4:48:51 PM	PH3 valve closed
12/5/2012	4:48:51 PM	SiCl4 pre valve closed
12/5/2012	4:48:51 PM	SiCl4 post valve closed
12/5/2012	4:48:51 PM	Bypass valve closed
12/5/2012	4:48:51 PM	Bubbler valve closed
12/5/2012	4:48:51 PM	Helium valve opened
12/5/2012	4:48:51 PM	Main Vac valve opened
12/5/2012	4:48:51 PM	Helium MFC set to  20.000000
12/5/2012	4:48:51 PM	H2 MFC set to  0.000000
12/5/2012	4:48:51 PM	BCl3 MFC set to  0.000000
12/5/2012	4:48:51 PM	PH3 MFC set to  0.000000
12/5/2012	4:48:51 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:48:52 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:48:52 PM	Tube furnace set to 0
12/5/2012	4:49:22 PM	Helium valve closed
12/5/2012	4:49:22 PM	H2 valve closed
12/5/2012	4:49:22 PM	BCl3 valve closed
12/5/2012	4:49:22 PM	PH3 valve closed
12/5/2012	4:49:22 PM	SiCl4 pre valve closed
12/5/2012	4:49:22 PM	SiCl4 post valve closed
12/5/2012	4:49:22 PM	Bypass valve closed
12/5/2012	4:49:22 PM	Bubbler valve closed
12/5/2012	4:49:22 PM	Main Vac valve opened
12/5/2012	4:49:22 PM	Helium MFC set to  0.000000
12/5/2012	4:49:22 PM	H2 MFC set to  0.000000
12/5/2012	4:49:22 PM	BCl3 MFC set to  0.000000
12/5/2012	4:49:22 PM	PH3 MFC set to  0.000000
12/5/2012	4:49:22 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:49:22 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:49:22 PM	Tube furnace set to 0
12/5/2012	4:49:52 PM	H2 valve closed
12/5/2012	4:49:52 PM	BCl3 valve closed
12/5/2012	4:49:52 PM	PH3 valve closed
12/5/2012	4:49:52 PM	SiCl4 pre valve closed
12/5/2012	4:49:52 PM	SiCl4 post valve closed
12/5/2012	4:49:52 PM	Bypass valve closed
12/5/2012	4:49:52 PM	Bubbler valve closed
12/5/2012	4:49:52 PM	Helium valve opened
12/5/2012	4:49:52 PM	Main Vac valve opened
12/5/2012	4:49:52 PM	Helium MFC set to  20.000000
12/5/2012	4:49:52 PM	H2 MFC set to  0.000000
12/5/2012	4:49:52 PM	BCl3 MFC set to  0.000000
12/5/2012	4:49:52 PM	PH3 MFC set to  0.000000
12/5/2012	4:49:52 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:49:52 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:49:52 PM	Tube furnace set to 0
12/5/2012	4:50:22 PM	Helium valve closed
12/5/2012	4:50:22 PM	H2 valve closed
12/5/2012	4:50:22 PM	BCl3 valve closed
12/5/2012	4:50:22 PM	PH3 valve closed
12/5/2012	4:50:22 PM	SiCl4 pre valve closed
12/5/2012	4:50:22 PM	SiCl4 post valve closed
12/5/2012	4:50:22 PM	Bypass valve closed
12/5/2012	4:50:22 PM	Bubbler valve closed
12/5/2012	4:50:22 PM	Main Vac valve opened
12/5/2012	4:50:22 PM	Helium MFC set to  0.000000
12/5/2012	4:50:22 PM	H2 MFC set to  0.000000
12/5/2012	4:50:22 PM	BCl3 MFC set to  0.000000
12/5/2012	4:50:22 PM	PH3 MFC set to  0.000000
12/5/2012	4:50:22 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:50:22 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:50:22 PM	Tube furnace set to 0
12/5/2012	4:50:52 PM	H2 valve closed
12/5/2012	4:50:52 PM	BCl3 valve closed
12/5/2012	4:50:52 PM	PH3 valve closed
12/5/2012	4:50:52 PM	SiCl4 pre valve closed
12/5/2012	4:50:52 PM	SiCl4 post valve closed
12/5/2012	4:50:52 PM	Bypass valve closed
12/5/2012	4:50:52 PM	Bubbler valve closed
12/5/2012	4:50:52 PM	Helium valve opened
12/5/2012	4:50:52 PM	Main Vac valve opened
12/5/2012	4:50:52 PM	Helium MFC set to  20.000000
12/5/2012	4:50:52 PM	H2 MFC set to  0.000000
12/5/2012	4:50:52 PM	BCl3 MFC set to  0.000000
12/5/2012	4:50:52 PM	PH3 MFC set to  0.000000
12/5/2012	4:50:52 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:50:52 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:50:53 PM	Tube furnace set to 0
12/5/2012	4:51:23 PM	Helium valve closed
12/5/2012	4:51:23 PM	H2 valve closed
12/5/2012	4:51:23 PM	BCl3 valve closed
12/5/2012	4:51:23 PM	PH3 valve closed
12/5/2012	4:51:23 PM	SiCl4 pre valve closed
12/5/2012	4:51:23 PM	SiCl4 post valve closed
12/5/2012	4:51:23 PM	Bypass valve closed
12/5/2012	4:51:23 PM	Bubbler valve closed
12/5/2012	4:51:23 PM	Main Vac valve opened
12/5/2012	4:51:23 PM	Helium MFC set to  0.000000
12/5/2012	4:51:23 PM	H2 MFC set to  0.000000
12/5/2012	4:51:23 PM	BCl3 MFC set to  0.000000
12/5/2012	4:51:23 PM	PH3 MFC set to  0.000000
12/5/2012	4:51:23 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:51:23 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:51:23 PM	Tube furnace set to 0
12/5/2012	4:51:53 PM	H2 valve closed
12/5/2012	4:51:53 PM	BCl3 valve closed
12/5/2012	4:51:53 PM	PH3 valve closed
12/5/2012	4:51:53 PM	SiCl4 pre valve closed
12/5/2012	4:51:53 PM	SiCl4 post valve closed
12/5/2012	4:51:53 PM	Bypass valve closed
12/5/2012	4:51:53 PM	Bubbler valve closed
12/5/2012	4:51:53 PM	Helium valve opened
12/5/2012	4:51:53 PM	Main Vac valve opened
12/5/2012	4:51:53 PM	Helium MFC set to  20.000000
12/5/2012	4:51:53 PM	H2 MFC set to  0.000000
12/5/2012	4:51:53 PM	BCl3 MFC set to  0.000000
12/5/2012	4:51:53 PM	PH3 MFC set to  0.000000
12/5/2012	4:51:53 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:51:53 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:51:53 PM	Tube furnace set to 0
12/5/2012	4:52:23 PM	Helium valve closed
12/5/2012	4:52:23 PM	H2 valve closed
12/5/2012	4:52:23 PM	BCl3 valve closed
12/5/2012	4:52:23 PM	PH3 valve closed
12/5/2012	4:52:23 PM	SiCl4 pre valve closed
12/5/2012	4:52:23 PM	SiCl4 post valve closed
12/5/2012	4:52:23 PM	Bypass valve closed
12/5/2012	4:52:23 PM	Bubbler valve closed
12/5/2012	4:52:23 PM	Main Vac valve opened
12/5/2012	4:52:23 PM	Helium MFC set to  0.000000
12/5/2012	4:52:23 PM	H2 MFC set to  0.000000
12/5/2012	4:52:23 PM	BCl3 MFC set to  0.000000
12/5/2012	4:52:23 PM	PH3 MFC set to  0.000000
12/5/2012	4:52:23 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:52:23 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:52:23 PM	Tube furnace set to 0
12/5/2012	4:52:53 PM	H2 valve closed
12/5/2012	4:52:53 PM	BCl3 valve closed
12/5/2012	4:52:53 PM	PH3 valve closed
12/5/2012	4:52:53 PM	SiCl4 pre valve closed
12/5/2012	4:52:53 PM	SiCl4 post valve closed
12/5/2012	4:52:53 PM	Bypass valve closed
12/5/2012	4:52:53 PM	Bubbler valve closed
12/5/2012	4:52:53 PM	Helium valve opened
12/5/2012	4:52:53 PM	Main Vac valve opened
12/5/2012	4:52:53 PM	Helium MFC set to  20.000000
12/5/2012	4:52:53 PM	H2 MFC set to  0.000000
12/5/2012	4:52:53 PM	BCl3 MFC set to  0.000000
12/5/2012	4:52:53 PM	PH3 MFC set to  0.000000
12/5/2012	4:52:53 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:52:53 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:52:54 PM	Tube furnace set to 0
12/5/2012	4:53:24 PM	Helium valve closed
12/5/2012	4:53:24 PM	H2 valve closed
12/5/2012	4:53:24 PM	BCl3 valve closed
12/5/2012	4:53:24 PM	PH3 valve closed
12/5/2012	4:53:24 PM	SiCl4 pre valve closed
12/5/2012	4:53:24 PM	SiCl4 post valve closed
12/5/2012	4:53:24 PM	Bypass valve closed
12/5/2012	4:53:24 PM	Bubbler valve closed
12/5/2012	4:53:24 PM	Main Vac valve opened
12/5/2012	4:53:24 PM	Helium MFC set to  0.000000
12/5/2012	4:53:24 PM	H2 MFC set to  0.000000
12/5/2012	4:53:24 PM	BCl3 MFC set to  0.000000
12/5/2012	4:53:24 PM	PH3 MFC set to  0.000000
12/5/2012	4:53:24 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:53:24 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:53:24 PM	Tube furnace set to 0
12/5/2012	4:53:54 PM	H2 valve closed
12/5/2012	4:53:54 PM	BCl3 valve closed
12/5/2012	4:53:54 PM	PH3 valve closed
12/5/2012	4:53:54 PM	SiCl4 pre valve closed
12/5/2012	4:53:54 PM	SiCl4 post valve closed
12/5/2012	4:53:54 PM	Bypass valve closed
12/5/2012	4:53:54 PM	Bubbler valve closed
12/5/2012	4:53:54 PM	Helium valve opened
12/5/2012	4:53:54 PM	Main Vac valve opened
12/5/2012	4:53:54 PM	Helium MFC set to  20.000000
12/5/2012	4:53:54 PM	H2 MFC set to  0.000000
12/5/2012	4:53:54 PM	BCl3 MFC set to  0.000000
12/5/2012	4:53:54 PM	PH3 MFC set to  0.000000
12/5/2012	4:53:54 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:53:54 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:53:54 PM	Tube furnace set to 0
12/5/2012	4:54:24 PM	Helium valve closed
12/5/2012	4:54:24 PM	H2 valve closed
12/5/2012	4:54:24 PM	BCl3 valve closed
12/5/2012	4:54:24 PM	PH3 valve closed
12/5/2012	4:54:24 PM	SiCl4 pre valve closed
12/5/2012	4:54:24 PM	SiCl4 post valve closed
12/5/2012	4:54:24 PM	Bypass valve closed
12/5/2012	4:54:24 PM	Bubbler valve closed
12/5/2012	4:54:24 PM	Main Vac valve opened
12/5/2012	4:54:24 PM	Helium MFC set to  0.000000
12/5/2012	4:54:24 PM	H2 MFC set to  0.000000
12/5/2012	4:54:24 PM	BCl3 MFC set to  0.000000
12/5/2012	4:54:24 PM	PH3 MFC set to  0.000000
12/5/2012	4:54:24 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:54:24 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:54:24 PM	Tube furnace set to 0
12/5/2012	4:54:54 PM	H2 valve closed
12/5/2012	4:54:54 PM	BCl3 valve closed
12/5/2012	4:54:54 PM	PH3 valve closed
12/5/2012	4:54:54 PM	SiCl4 pre valve closed
12/5/2012	4:54:54 PM	SiCl4 post valve closed
12/5/2012	4:54:54 PM	Bypass valve closed
12/5/2012	4:54:54 PM	Bubbler valve closed
12/5/2012	4:54:54 PM	Helium valve opened
12/5/2012	4:54:54 PM	Main Vac valve opened
12/5/2012	4:54:54 PM	Helium MFC set to  20.000000
12/5/2012	4:54:54 PM	H2 MFC set to  0.000000
12/5/2012	4:54:54 PM	BCl3 MFC set to  0.000000
12/5/2012	4:54:54 PM	PH3 MFC set to  0.000000
12/5/2012	4:54:54 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:54:54 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:54:55 PM	Tube furnace set to 0
12/5/2012	4:55:25 PM	Helium valve closed
12/5/2012	4:55:25 PM	H2 valve closed
12/5/2012	4:55:25 PM	BCl3 valve closed
12/5/2012	4:55:25 PM	PH3 valve closed
12/5/2012	4:55:25 PM	SiCl4 pre valve closed
12/5/2012	4:55:25 PM	SiCl4 post valve closed
12/5/2012	4:55:25 PM	Bypass valve closed
12/5/2012	4:55:25 PM	Bubbler valve closed
12/5/2012	4:55:25 PM	Main Vac valve opened
12/5/2012	4:55:25 PM	Helium MFC set to  0.000000
12/5/2012	4:55:25 PM	H2 MFC set to  0.000000
12/5/2012	4:55:25 PM	BCl3 MFC set to  0.000000
12/5/2012	4:55:25 PM	PH3 MFC set to  0.000000
12/5/2012	4:55:25 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:55:25 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:55:25 PM	Tube furnace set to 0
12/5/2012	4:55:55 PM	H2 valve closed
12/5/2012	4:55:55 PM	BCl3 valve closed
12/5/2012	4:55:55 PM	PH3 valve closed
12/5/2012	4:55:55 PM	SiCl4 pre valve closed
12/5/2012	4:55:55 PM	SiCl4 post valve closed
12/5/2012	4:55:55 PM	Bypass valve closed
12/5/2012	4:55:55 PM	Bubbler valve closed
12/5/2012	4:55:55 PM	Helium valve opened
12/5/2012	4:55:55 PM	Main Vac valve opened
12/5/2012	4:55:55 PM	Helium MFC set to  20.000000
12/5/2012	4:55:55 PM	H2 MFC set to  0.000000
12/5/2012	4:55:55 PM	BCl3 MFC set to  0.000000
12/5/2012	4:55:55 PM	PH3 MFC set to  0.000000
12/5/2012	4:55:55 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:55:55 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:55:55 PM	Tube furnace set to 0
12/5/2012	4:56:25 PM	Helium valve closed
12/5/2012	4:56:25 PM	H2 valve closed
12/5/2012	4:56:25 PM	BCl3 valve closed
12/5/2012	4:56:25 PM	PH3 valve closed
12/5/2012	4:56:25 PM	SiCl4 pre valve closed
12/5/2012	4:56:25 PM	SiCl4 post valve closed
12/5/2012	4:56:25 PM	Bypass valve closed
12/5/2012	4:56:25 PM	Bubbler valve closed
12/5/2012	4:56:25 PM	Main Vac valve opened
12/5/2012	4:56:25 PM	Helium MFC set to  0.000000
12/5/2012	4:56:25 PM	H2 MFC set to  0.000000
12/5/2012	4:56:25 PM	BCl3 MFC set to  0.000000
12/5/2012	4:56:25 PM	PH3 MFC set to  0.000000
12/5/2012	4:56:25 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:56:25 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:56:25 PM	Tube furnace set to 0
12/5/2012	4:56:55 PM	H2 valve closed
12/5/2012	4:56:55 PM	BCl3 valve closed
12/5/2012	4:56:55 PM	PH3 valve closed
12/5/2012	4:56:55 PM	SiCl4 pre valve closed
12/5/2012	4:56:55 PM	SiCl4 post valve closed
12/5/2012	4:56:55 PM	Bypass valve closed
12/5/2012	4:56:55 PM	Bubbler valve closed
12/5/2012	4:56:55 PM	Helium valve opened
12/5/2012	4:56:55 PM	Main Vac valve opened
12/5/2012	4:56:55 PM	Helium MFC set to  20.000000
12/5/2012	4:56:55 PM	H2 MFC set to  0.000000
12/5/2012	4:56:55 PM	BCl3 MFC set to  0.000000
12/5/2012	4:56:55 PM	PH3 MFC set to  0.000000
12/5/2012	4:56:55 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:56:55 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:56:56 PM	Tube furnace set to 0
12/5/2012	4:57:26 PM	Helium valve closed
12/5/2012	4:57:26 PM	H2 valve closed
12/5/2012	4:57:26 PM	BCl3 valve closed
12/5/2012	4:57:26 PM	PH3 valve closed
12/5/2012	4:57:26 PM	SiCl4 pre valve closed
12/5/2012	4:57:26 PM	SiCl4 post valve closed
12/5/2012	4:57:26 PM	Bypass valve closed
12/5/2012	4:57:26 PM	Bubbler valve closed
12/5/2012	4:57:26 PM	Main Vac valve opened
12/5/2012	4:57:26 PM	Helium MFC set to  0.000000
12/5/2012	4:57:26 PM	H2 MFC set to  0.000000
12/5/2012	4:57:26 PM	BCl3 MFC set to  0.000000
12/5/2012	4:57:26 PM	PH3 MFC set to  0.000000
12/5/2012	4:57:26 PM	SiCl4 MFC set to  0.000000
12/5/2012	4:57:26 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	4:57:26 PM	Tube furnace set to 0
12/5/2012	4:57:27 PM	Run finished at 4:57 PM
12/5/2012	4:57:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/5/2012	5:15:18 PM	Main Vac valve closed
12/5/2012	5:15:30 PM	Main Vac valve opened
12/5/2012	5:15:38 PM	Recipe started at 5:15 PM
12/5/2012	5:15:38 PM	Helium valve closed
12/5/2012	5:15:38 PM	H2 valve closed
12/5/2012	5:15:38 PM	BCl3 valve closed
12/5/2012	5:15:38 PM	PH3 valve closed
12/5/2012	5:15:38 PM	SiCl4 pre valve closed
12/5/2012	5:15:38 PM	SiCl4 post valve closed
12/5/2012	5:15:39 PM	Main Vac valve closed
12/5/2012	5:15:39 PM	Bypass valve closed
12/5/2012	5:15:39 PM	Bubbler valve closed
12/5/2012	5:15:39 PM	Helium MFC set to  0.000000
12/5/2012	5:15:39 PM	H2 MFC set to  0.000000
12/5/2012	5:15:39 PM	BCl3 MFC set to  0.000000
12/5/2012	5:15:39 PM	PH3 MFC set to  0.000000
12/5/2012	5:15:39 PM	SiCl4 MFC set to  0.000000
12/5/2012	5:15:39 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	5:15:39 PM	Tube furnace set to 0
12/5/2012	5:15:42 PM	Helium valve closed
12/5/2012	5:15:42 PM	BCl3 valve closed
12/5/2012	5:15:42 PM	PH3 valve closed
12/5/2012	5:15:42 PM	SiCl4 pre valve closed
12/5/2012	5:15:42 PM	SiCl4 post valve closed
12/5/2012	5:15:42 PM	Main Vac valve closed
12/5/2012	5:15:42 PM	Bypass valve closed
12/5/2012	5:15:42 PM	Bubbler valve closed
12/5/2012	5:15:42 PM	H2 valve opened
12/5/2012	5:15:42 PM	Helium MFC set to  0.000000
12/5/2012	5:15:42 PM	H2 MFC set to  500.000000
12/5/2012	5:15:42 PM	BCl3 MFC set to  0.000000
12/5/2012	5:15:42 PM	PH3 MFC set to  0.000000
12/5/2012	5:15:42 PM	SiCl4 MFC set to  0.000000
12/5/2012	5:15:42 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	5:15:42 PM	Tube furnace set to 0
12/5/2012	5:16:54 PM	Helium valve closed
12/5/2012	5:16:54 PM	BCl3 valve closed
12/5/2012	5:16:54 PM	PH3 valve closed
12/5/2012	5:16:54 PM	SiCl4 pre valve closed
12/5/2012	5:16:54 PM	SiCl4 post valve closed
12/5/2012	5:16:54 PM	Main Vac valve closed
12/5/2012	5:16:54 PM	Bypass valve closed
12/5/2012	5:16:54 PM	H2 valve opened
12/5/2012	5:16:54 PM	Bubbler valve opened
12/5/2012	5:16:54 PM	Helium MFC set to  0.000000
12/5/2012	5:16:54 PM	H2 MFC set to  500.000000
12/5/2012	5:16:54 PM	BCl3 MFC set to  0.000000
12/5/2012	5:16:54 PM	PH3 MFC set to  0.000000
12/5/2012	5:16:54 PM	SiCl4 MFC set to  0.000000
12/5/2012	5:16:54 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	5:16:54 PM	Tube furnace set to 0
12/5/2012	5:16:55 PM	Helium valve closed
12/5/2012	5:16:55 PM	BCl3 valve closed
12/5/2012	5:16:55 PM	PH3 valve closed
12/5/2012	5:16:55 PM	SiCl4 pre valve closed
12/5/2012	5:16:55 PM	SiCl4 post valve closed
12/5/2012	5:16:55 PM	Main Vac valve closed
12/5/2012	5:16:55 PM	Bypass valve closed
12/5/2012	5:16:55 PM	H2 valve opened
12/5/2012	5:16:55 PM	Bubbler valve opened
12/5/2012	5:16:55 PM	Helium MFC set to  0.000000
12/5/2012	5:16:55 PM	H2 MFC set to  500.000000
12/5/2012	5:16:55 PM	BCl3 MFC set to  0.000000
12/5/2012	5:16:55 PM	PH3 MFC set to  0.000000
12/5/2012	5:16:55 PM	SiCl4 MFC set to  0.000000
12/5/2012	5:16:55 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	5:16:55 PM	Tube furnace set to 1000
12/5/2012	5:46:55 PM	Helium valve closed
12/5/2012	5:46:55 PM	PH3 valve closed
12/5/2012	5:46:55 PM	Main Vac valve closed
12/5/2012	5:46:55 PM	Bypass valve closed
12/5/2012	5:46:55 PM	H2 valve opened
12/5/2012	5:46:55 PM	BCl3 valve opened
12/5/2012	5:46:55 PM	SiCl4 pre valve opened
12/5/2012	5:46:55 PM	SiCl4 post valve opened
12/5/2012	5:46:55 PM	Bubbler valve opened
12/5/2012	5:46:55 PM	Helium MFC set to  0.000000
12/5/2012	5:46:55 PM	H2 MFC set to  500.000000
12/5/2012	5:46:55 PM	BCl3 MFC set to  1.000000
12/5/2012	5:46:55 PM	PH3 MFC set to  0.000000
12/5/2012	5:46:55 PM	SiCl4 MFC set to  50.000000
12/5/2012	5:46:55 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	5:46:55 PM	Tube furnace set to 1000
12/5/2012	5:58:55 PM	Helium valve closed
12/5/2012	5:58:55 PM	BCl3 valve closed
12/5/2012	5:58:55 PM	PH3 valve closed
12/5/2012	5:58:55 PM	SiCl4 pre valve closed
12/5/2012	5:58:55 PM	SiCl4 post valve closed
12/5/2012	5:58:55 PM	Main Vac valve closed
12/5/2012	5:58:55 PM	Bypass valve closed
12/5/2012	5:58:55 PM	H2 valve opened
12/5/2012	5:58:55 PM	Bubbler valve opened
12/5/2012	5:58:55 PM	Helium MFC set to  0.000000
12/5/2012	5:58:55 PM	H2 MFC set to  500.000000
12/5/2012	5:58:55 PM	BCl3 MFC set to  0.000000
12/5/2012	5:58:55 PM	PH3 MFC set to  0.000000
12/5/2012	5:58:55 PM	SiCl4 MFC set to  0.000000
12/5/2012	5:58:55 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	5:58:56 PM	Tube furnace set to 750
12/5/2012	6:03:56 PM	H2 valve closed
12/5/2012	6:03:56 PM	BCl3 valve closed
12/5/2012	6:03:56 PM	PH3 valve closed
12/5/2012	6:03:56 PM	SiCl4 pre valve closed
12/5/2012	6:03:56 PM	SiCl4 post valve closed
12/5/2012	6:03:56 PM	Main Vac valve closed
12/5/2012	6:03:56 PM	Bypass valve closed
12/5/2012	6:03:56 PM	Helium valve opened
12/5/2012	6:03:56 PM	Bubbler valve opened
12/5/2012	6:03:56 PM	Helium MFC set to  500.000000
12/5/2012	6:03:56 PM	H2 MFC set to  0.000000
12/5/2012	6:03:56 PM	BCl3 MFC set to  0.000000
12/5/2012	6:03:56 PM	PH3 MFC set to  0.000000
12/5/2012	6:03:56 PM	SiCl4 MFC set to  0.000000
12/5/2012	6:03:56 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	6:03:56 PM	Tube furnace set to 0
12/5/2012	6:11:34 PM	Helium valve closed
12/5/2012	6:11:34 PM	H2 valve closed
12/5/2012	6:11:34 PM	BCl3 valve closed
12/5/2012	6:11:34 PM	PH3 valve closed
12/5/2012	6:11:34 PM	SiCl4 pre valve closed
12/5/2012	6:11:34 PM	SiCl4 post valve closed
12/5/2012	6:11:34 PM	Main Vac valve closed
12/5/2012	6:11:34 PM	Bypass valve closed
12/5/2012	6:11:34 PM	Bubbler valve closed
12/5/2012	6:11:34 PM	Helium MFC set to  0.000000
12/5/2012	6:11:34 PM	H2 MFC set to  0.000000
12/5/2012	6:11:34 PM	BCl3 MFC set to  0.000000
12/5/2012	6:11:34 PM	PH3 MFC set to  0.000000
12/5/2012	6:11:34 PM	SiCl4 MFC set to  0.000000
12/5/2012	6:11:34 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	6:11:35 PM	Tube furnace set to 0
12/5/2012	6:11:36 PM	Run finished at 6:11 PM
12/5/2012	6:14:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/5/2012	6:14:24 PM	Recipe started at 6:14 PM
12/5/2012	6:14:24 PM	Helium valve closed
12/5/2012	6:14:24 PM	H2 valve closed
12/5/2012	6:14:24 PM	BCl3 valve closed
12/5/2012	6:14:24 PM	PH3 valve closed
12/5/2012	6:14:24 PM	SiCl4 pre valve closed
12/5/2012	6:14:24 PM	SiCl4 post valve closed
12/5/2012	6:14:24 PM	Main Vac valve closed
12/5/2012	6:14:24 PM	Bubbler valve closed
12/5/2012	6:14:24 PM	Bypass valve opened
12/5/2012	6:14:24 PM	Helium MFC set to  0.000000
12/5/2012	6:14:24 PM	H2 MFC set to  0.000000
12/5/2012	6:14:24 PM	BCl3 MFC set to  0.000000
12/5/2012	6:14:24 PM	PH3 MFC set to  0.000000
12/5/2012	6:14:24 PM	SiCl4 MFC set to  0.000000
12/5/2012	6:14:24 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	6:14:25 PM	Tube furnace set to 0
12/5/2012	6:15:39 PM	Helium valve closed
12/5/2012	6:15:39 PM	H2 valve closed
12/5/2012	6:15:39 PM	BCl3 valve closed
12/5/2012	6:15:39 PM	PH3 valve closed
12/5/2012	6:15:39 PM	SiCl4 pre valve closed
12/5/2012	6:15:39 PM	SiCl4 post valve closed
12/5/2012	6:15:39 PM	Main Vac valve closed
12/5/2012	6:15:39 PM	Bubbler valve closed
12/5/2012	6:15:39 PM	Bypass valve opened
12/5/2012	6:15:39 PM	Helium MFC set to  0.000000
12/5/2012	6:15:39 PM	H2 MFC set to  0.000000
12/5/2012	6:15:39 PM	BCl3 MFC set to  0.000000
12/5/2012	6:15:39 PM	PH3 MFC set to  0.000000
12/5/2012	6:15:39 PM	SiCl4 MFC set to  0.000000
12/5/2012	6:15:39 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	6:15:39 PM	Tube furnace set to 0
12/5/2012	6:15:41 PM	Helium valve closed
12/5/2012	6:15:41 PM	H2 valve closed
12/5/2012	6:15:41 PM	BCl3 valve closed
12/5/2012	6:15:41 PM	PH3 valve closed
12/5/2012	6:15:41 PM	SiCl4 pre valve closed
12/5/2012	6:15:41 PM	SiCl4 post valve closed
12/5/2012	6:15:41 PM	Bypass valve closed
12/5/2012	6:15:41 PM	Bubbler valve closed
12/5/2012	6:15:41 PM	Main Vac valve opened
12/5/2012	6:15:41 PM	Helium MFC set to  0.000000
12/5/2012	6:15:41 PM	H2 MFC set to  0.000000
12/5/2012	6:15:41 PM	BCl3 MFC set to  0.000000
12/5/2012	6:15:41 PM	PH3 MFC set to  0.000000
12/5/2012	6:15:41 PM	SiCl4 MFC set to  0.000000
12/5/2012	6:15:41 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	6:15:41 PM	Tube furnace set to 0
12/5/2012	6:15:42 PM	Run finished at 6:15 PM
12/5/2012	6:15:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/5/2012	6:15:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/5/2012	6:16:01 PM	Recipe started at 6:15 PM
12/5/2012	6:16:01 PM	Helium valve closed
12/5/2012	6:16:01 PM	H2 valve closed
12/5/2012	6:16:01 PM	BCl3 valve closed
12/5/2012	6:16:01 PM	PH3 valve closed
12/5/2012	6:16:01 PM	SiCl4 pre valve closed
12/5/2012	6:16:01 PM	SiCl4 post valve closed
12/5/2012	6:16:01 PM	Main Vac valve closed
12/5/2012	6:16:01 PM	Bubbler valve closed
12/5/2012	6:16:01 PM	Bypass valve opened
12/5/2012	6:16:01 PM	Helium MFC set to  0.000000
12/5/2012	6:16:01 PM	H2 MFC set to  0.000000
12/5/2012	6:16:01 PM	BCl3 MFC set to  0.000000
12/5/2012	6:16:01 PM	PH3 MFC set to  0.000000
12/5/2012	6:16:01 PM	SiCl4 MFC set to  0.000000
12/5/2012	6:16:01 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	6:16:01 PM	Tube furnace set to 0
12/5/2012	6:16:02 PM	Helium valve closed
12/5/2012	6:16:02 PM	H2 valve closed
12/5/2012	6:16:02 PM	BCl3 valve closed
12/5/2012	6:16:02 PM	PH3 valve closed
12/5/2012	6:16:02 PM	SiCl4 pre valve closed
12/5/2012	6:16:02 PM	SiCl4 post valve closed
12/5/2012	6:16:02 PM	Main Vac valve closed
12/5/2012	6:16:02 PM	Bubbler valve closed
12/5/2012	6:16:02 PM	Bypass valve opened
12/5/2012	6:16:02 PM	Helium MFC set to  0.000000
12/5/2012	6:16:02 PM	H2 MFC set to  0.000000
12/5/2012	6:16:02 PM	BCl3 MFC set to  0.000000
12/5/2012	6:16:02 PM	PH3 MFC set to  0.000000
12/5/2012	6:16:02 PM	SiCl4 MFC set to  0.000000
12/5/2012	6:16:02 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	6:16:02 PM	Tube furnace set to 0
12/5/2012	6:16:02 PM	Helium valve closed
12/5/2012	6:16:02 PM	H2 valve closed
12/5/2012	6:16:02 PM	BCl3 valve closed
12/5/2012	6:16:02 PM	PH3 valve closed
12/5/2012	6:16:02 PM	SiCl4 pre valve closed
12/5/2012	6:16:02 PM	SiCl4 post valve closed
12/5/2012	6:16:02 PM	Bypass valve closed
12/5/2012	6:16:02 PM	Bubbler valve closed
12/5/2012	6:16:02 PM	Main Vac valve opened
12/5/2012	6:16:02 PM	Helium MFC set to  0.000000
12/5/2012	6:16:02 PM	H2 MFC set to  0.000000
12/5/2012	6:16:02 PM	BCl3 MFC set to  0.000000
12/5/2012	6:16:02 PM	PH3 MFC set to  0.000000
12/5/2012	6:16:02 PM	SiCl4 MFC set to  0.000000
12/5/2012	6:16:02 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	6:16:02 PM	Tube furnace set to 0
12/5/2012	6:16:32 PM	H2 valve closed
12/5/2012	6:16:32 PM	BCl3 valve closed
12/5/2012	6:16:32 PM	PH3 valve closed
12/5/2012	6:16:32 PM	SiCl4 pre valve closed
12/5/2012	6:16:32 PM	SiCl4 post valve closed
12/5/2012	6:16:32 PM	Bypass valve closed
12/5/2012	6:16:32 PM	Bubbler valve closed
12/5/2012	6:16:32 PM	Helium valve opened
12/5/2012	6:16:32 PM	Main Vac valve opened
12/5/2012	6:16:32 PM	Helium MFC set to  20.000000
12/5/2012	6:16:32 PM	H2 MFC set to  0.000000
12/5/2012	6:16:32 PM	BCl3 MFC set to  0.000000
12/5/2012	6:16:32 PM	PH3 MFC set to  0.000000
12/5/2012	6:16:32 PM	SiCl4 MFC set to  0.000000
12/5/2012	6:16:32 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	6:16:33 PM	Tube furnace set to 0
12/5/2012	6:17:03 PM	Helium valve closed
12/5/2012	6:17:03 PM	H2 valve closed
12/5/2012	6:17:03 PM	BCl3 valve closed
12/5/2012	6:17:03 PM	PH3 valve closed
12/5/2012	6:17:03 PM	SiCl4 pre valve closed
12/5/2012	6:17:03 PM	SiCl4 post valve closed
12/5/2012	6:17:03 PM	Bypass valve closed
12/5/2012	6:17:03 PM	Bubbler valve closed
12/5/2012	6:17:03 PM	Main Vac valve opened
12/5/2012	6:17:03 PM	Helium MFC set to  0.000000
12/5/2012	6:17:03 PM	H2 MFC set to  0.000000
12/5/2012	6:17:03 PM	BCl3 MFC set to  0.000000
12/5/2012	6:17:03 PM	PH3 MFC set to  0.000000
12/5/2012	6:17:03 PM	SiCl4 MFC set to  0.000000
12/5/2012	6:17:03 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	6:17:03 PM	Tube furnace set to 0
12/5/2012	6:17:33 PM	H2 valve closed
12/5/2012	6:17:33 PM	BCl3 valve closed
12/5/2012	6:17:33 PM	PH3 valve closed
12/5/2012	6:17:33 PM	SiCl4 pre valve closed
12/5/2012	6:17:33 PM	SiCl4 post valve closed
12/5/2012	6:17:33 PM	Bypass valve closed
12/5/2012	6:17:33 PM	Bubbler valve closed
12/5/2012	6:17:33 PM	Helium valve opened
12/5/2012	6:17:33 PM	Main Vac valve opened
12/5/2012	6:17:33 PM	Helium MFC set to  20.000000
12/5/2012	6:17:33 PM	H2 MFC set to  0.000000
12/5/2012	6:17:33 PM	BCl3 MFC set to  0.000000
12/5/2012	6:17:33 PM	PH3 MFC set to  0.000000
12/5/2012	6:17:33 PM	SiCl4 MFC set to  0.000000
12/5/2012	6:17:33 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	6:17:33 PM	Tube furnace set to 0
12/5/2012	6:18:03 PM	Helium valve closed
12/5/2012	6:18:03 PM	H2 valve closed
12/5/2012	6:18:03 PM	BCl3 valve closed
12/5/2012	6:18:03 PM	PH3 valve closed
12/5/2012	6:18:03 PM	SiCl4 pre valve closed
12/5/2012	6:18:03 PM	SiCl4 post valve closed
12/5/2012	6:18:03 PM	Bypass valve closed
12/5/2012	6:18:03 PM	Bubbler valve closed
12/5/2012	6:18:03 PM	Main Vac valve opened
12/5/2012	6:18:03 PM	Helium MFC set to  0.000000
12/5/2012	6:18:03 PM	H2 MFC set to  0.000000
12/5/2012	6:18:03 PM	BCl3 MFC set to  0.000000
12/5/2012	6:18:03 PM	PH3 MFC set to  0.000000
12/5/2012	6:18:03 PM	SiCl4 MFC set to  0.000000
12/5/2012	6:18:03 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	6:18:03 PM	Tube furnace set to 0
12/5/2012	6:18:33 PM	H2 valve closed
12/5/2012	6:18:33 PM	BCl3 valve closed
12/5/2012	6:18:33 PM	PH3 valve closed
12/5/2012	6:18:33 PM	SiCl4 pre valve closed
12/5/2012	6:18:33 PM	SiCl4 post valve closed
12/5/2012	6:18:33 PM	Bypass valve closed
12/5/2012	6:18:33 PM	Bubbler valve closed
12/5/2012	6:18:33 PM	Helium valve opened
12/5/2012	6:18:33 PM	Main Vac valve opened
12/5/2012	6:18:33 PM	Helium MFC set to  20.000000
12/5/2012	6:18:33 PM	H2 MFC set to  0.000000
12/5/2012	6:18:33 PM	BCl3 MFC set to  0.000000
12/5/2012	6:18:33 PM	PH3 MFC set to  0.000000
12/5/2012	6:18:33 PM	SiCl4 MFC set to  0.000000
12/5/2012	6:18:33 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	6:18:34 PM	Tube furnace set to 0
12/5/2012	6:19:04 PM	Helium valve closed
12/5/2012	6:19:04 PM	H2 valve closed
12/5/2012	6:19:04 PM	BCl3 valve closed
12/5/2012	6:19:04 PM	PH3 valve closed
12/5/2012	6:19:04 PM	SiCl4 pre valve closed
12/5/2012	6:19:04 PM	SiCl4 post valve closed
12/5/2012	6:19:04 PM	Bypass valve closed
12/5/2012	6:19:04 PM	Bubbler valve closed
12/5/2012	6:19:04 PM	Main Vac valve opened
12/5/2012	6:19:04 PM	Helium MFC set to  0.000000
12/5/2012	6:19:04 PM	H2 MFC set to  0.000000
12/5/2012	6:19:04 PM	BCl3 MFC set to  0.000000
12/5/2012	6:19:04 PM	PH3 MFC set to  0.000000
12/5/2012	6:19:04 PM	SiCl4 MFC set to  0.000000
12/5/2012	6:19:04 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	6:19:04 PM	Tube furnace set to 0
12/5/2012	6:19:34 PM	H2 valve closed
12/5/2012	6:19:34 PM	BCl3 valve closed
12/5/2012	6:19:34 PM	PH3 valve closed
12/5/2012	6:19:34 PM	SiCl4 pre valve closed
12/5/2012	6:19:34 PM	SiCl4 post valve closed
12/5/2012	6:19:34 PM	Bypass valve closed
12/5/2012	6:19:34 PM	Bubbler valve closed
12/5/2012	6:19:34 PM	Helium valve opened
12/5/2012	6:19:34 PM	Main Vac valve opened
12/5/2012	6:19:34 PM	Helium MFC set to  20.000000
12/5/2012	6:19:34 PM	H2 MFC set to  0.000000
12/5/2012	6:19:34 PM	BCl3 MFC set to  0.000000
12/5/2012	6:19:34 PM	PH3 MFC set to  0.000000
12/5/2012	6:19:34 PM	SiCl4 MFC set to  0.000000
12/5/2012	6:19:34 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	6:19:34 PM	Tube furnace set to 0
12/5/2012	6:20:04 PM	Helium valve closed
12/5/2012	6:20:04 PM	H2 valve closed
12/5/2012	6:20:04 PM	BCl3 valve closed
12/5/2012	6:20:04 PM	PH3 valve closed
12/5/2012	6:20:04 PM	SiCl4 pre valve closed
12/5/2012	6:20:04 PM	SiCl4 post valve closed
12/5/2012	6:20:04 PM	Bypass valve closed
12/5/2012	6:20:04 PM	Bubbler valve closed
12/5/2012	6:20:04 PM	Main Vac valve opened
12/5/2012	6:20:04 PM	Helium MFC set to  0.000000
12/5/2012	6:20:04 PM	H2 MFC set to  0.000000
12/5/2012	6:20:04 PM	BCl3 MFC set to  0.000000
12/5/2012	6:20:04 PM	PH3 MFC set to  0.000000
12/5/2012	6:20:04 PM	SiCl4 MFC set to  0.000000
12/5/2012	6:20:04 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	6:20:04 PM	Tube furnace set to 0
12/5/2012	6:20:34 PM	H2 valve closed
12/5/2012	6:20:34 PM	BCl3 valve closed
12/5/2012	6:20:34 PM	PH3 valve closed
12/5/2012	6:20:34 PM	SiCl4 pre valve closed
12/5/2012	6:20:34 PM	SiCl4 post valve closed
12/5/2012	6:20:34 PM	Bypass valve closed
12/5/2012	6:20:34 PM	Bubbler valve closed
12/5/2012	6:20:34 PM	Helium valve opened
12/5/2012	6:20:34 PM	Main Vac valve opened
12/5/2012	6:20:34 PM	Helium MFC set to  20.000000
12/5/2012	6:20:34 PM	H2 MFC set to  0.000000
12/5/2012	6:20:34 PM	BCl3 MFC set to  0.000000
12/5/2012	6:20:34 PM	PH3 MFC set to  0.000000
12/5/2012	6:20:34 PM	SiCl4 MFC set to  0.000000
12/5/2012	6:20:34 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	6:20:34 PM	Tube furnace set to 0
12/5/2012	6:21:04 PM	Helium valve closed
12/5/2012	6:21:04 PM	H2 valve closed
12/5/2012	6:21:05 PM	BCl3 valve closed
12/5/2012	6:21:05 PM	PH3 valve closed
12/5/2012	6:21:05 PM	SiCl4 pre valve closed
12/5/2012	6:21:05 PM	SiCl4 post valve closed
12/5/2012	6:21:05 PM	Bypass valve closed
12/5/2012	6:21:05 PM	Bubbler valve closed
12/5/2012	6:21:05 PM	Main Vac valve opened
12/5/2012	6:21:05 PM	Helium MFC set to  0.000000
12/5/2012	6:21:05 PM	H2 MFC set to  0.000000
12/5/2012	6:21:05 PM	BCl3 MFC set to  0.000000
12/5/2012	6:21:05 PM	PH3 MFC set to  0.000000
12/5/2012	6:21:05 PM	SiCl4 MFC set to  0.000000
12/5/2012	6:21:05 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	6:21:05 PM	Tube furnace set to 0
12/5/2012	6:21:35 PM	H2 valve closed
12/5/2012	6:21:35 PM	BCl3 valve closed
12/5/2012	6:21:35 PM	PH3 valve closed
12/5/2012	6:21:35 PM	SiCl4 pre valve closed
12/5/2012	6:21:35 PM	SiCl4 post valve closed
12/5/2012	6:21:35 PM	Bypass valve closed
12/5/2012	6:21:35 PM	Bubbler valve closed
12/5/2012	6:21:35 PM	Helium valve opened
12/5/2012	6:21:35 PM	Main Vac valve opened
12/5/2012	6:21:35 PM	Helium MFC set to  20.000000
12/5/2012	6:21:35 PM	H2 MFC set to  0.000000
12/5/2012	6:21:35 PM	BCl3 MFC set to  0.000000
12/5/2012	6:21:35 PM	PH3 MFC set to  0.000000
12/5/2012	6:21:35 PM	SiCl4 MFC set to  0.000000
12/5/2012	6:21:35 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	6:21:35 PM	Tube furnace set to 0
12/5/2012	6:22:05 PM	Helium valve closed
12/5/2012	6:22:05 PM	H2 valve closed
12/5/2012	6:22:05 PM	BCl3 valve closed
12/5/2012	6:22:05 PM	PH3 valve closed
12/5/2012	6:22:05 PM	SiCl4 pre valve closed
12/5/2012	6:22:05 PM	SiCl4 post valve closed
12/5/2012	6:22:05 PM	Bypass valve closed
12/5/2012	6:22:05 PM	Bubbler valve closed
12/5/2012	6:22:05 PM	Main Vac valve opened
12/5/2012	6:22:05 PM	Helium MFC set to  0.000000
12/5/2012	6:22:05 PM	H2 MFC set to  0.000000
12/5/2012	6:22:05 PM	BCl3 MFC set to  0.000000
12/5/2012	6:22:05 PM	PH3 MFC set to  0.000000
12/5/2012	6:22:05 PM	SiCl4 MFC set to  0.000000
12/5/2012	6:22:05 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	6:22:05 PM	Tube furnace set to 0
12/5/2012	6:22:35 PM	H2 valve closed
12/5/2012	6:22:35 PM	BCl3 valve closed
12/5/2012	6:22:35 PM	PH3 valve closed
12/5/2012	6:22:35 PM	SiCl4 pre valve closed
12/5/2012	6:22:35 PM	SiCl4 post valve closed
12/5/2012	6:22:35 PM	Bypass valve closed
12/5/2012	6:22:35 PM	Bubbler valve closed
12/5/2012	6:22:35 PM	Helium valve opened
12/5/2012	6:22:35 PM	Main Vac valve opened
12/5/2012	6:22:35 PM	Helium MFC set to  20.000000
12/5/2012	6:22:35 PM	H2 MFC set to  0.000000
12/5/2012	6:22:35 PM	BCl3 MFC set to  0.000000
12/5/2012	6:22:35 PM	PH3 MFC set to  0.000000
12/5/2012	6:22:35 PM	SiCl4 MFC set to  0.000000
12/5/2012	6:22:35 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	6:22:35 PM	Tube furnace set to 0
12/5/2012	6:23:05 PM	Helium valve closed
12/5/2012	6:23:05 PM	H2 valve closed
12/5/2012	6:23:05 PM	BCl3 valve closed
12/5/2012	6:23:05 PM	PH3 valve closed
12/5/2012	6:23:05 PM	SiCl4 pre valve closed
12/5/2012	6:23:06 PM	SiCl4 post valve closed
12/5/2012	6:23:06 PM	Bypass valve closed
12/5/2012	6:23:06 PM	Bubbler valve closed
12/5/2012	6:23:06 PM	Main Vac valve opened
12/5/2012	6:23:06 PM	Helium MFC set to  0.000000
12/5/2012	6:23:06 PM	H2 MFC set to  0.000000
12/5/2012	6:23:06 PM	BCl3 MFC set to  0.000000
12/5/2012	6:23:06 PM	PH3 MFC set to  0.000000
12/5/2012	6:23:06 PM	SiCl4 MFC set to  0.000000
12/5/2012	6:23:06 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	6:23:06 PM	Tube furnace set to 0
12/5/2012	6:23:36 PM	H2 valve closed
12/5/2012	6:23:36 PM	BCl3 valve closed
12/5/2012	6:23:36 PM	PH3 valve closed
12/5/2012	6:23:36 PM	SiCl4 pre valve closed
12/5/2012	6:23:36 PM	SiCl4 post valve closed
12/5/2012	6:23:36 PM	Bypass valve closed
12/5/2012	6:23:36 PM	Bubbler valve closed
12/5/2012	6:23:36 PM	Helium valve opened
12/5/2012	6:23:36 PM	Main Vac valve opened
12/5/2012	6:23:36 PM	Helium MFC set to  20.000000
12/5/2012	6:23:36 PM	H2 MFC set to  0.000000
12/5/2012	6:23:36 PM	BCl3 MFC set to  0.000000
12/5/2012	6:23:36 PM	PH3 MFC set to  0.000000
12/5/2012	6:23:36 PM	SiCl4 MFC set to  0.000000
12/5/2012	6:23:36 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	6:23:36 PM	Tube furnace set to 0
12/5/2012	6:24:06 PM	Helium valve closed
12/5/2012	6:24:06 PM	H2 valve closed
12/5/2012	6:24:06 PM	BCl3 valve closed
12/5/2012	6:24:06 PM	PH3 valve closed
12/5/2012	6:24:06 PM	SiCl4 pre valve closed
12/5/2012	6:24:06 PM	SiCl4 post valve closed
12/5/2012	6:24:06 PM	Bypass valve closed
12/5/2012	6:24:06 PM	Bubbler valve closed
12/5/2012	6:24:06 PM	Main Vac valve opened
12/5/2012	6:24:06 PM	Helium MFC set to  0.000000
12/5/2012	6:24:06 PM	H2 MFC set to  0.000000
12/5/2012	6:24:06 PM	BCl3 MFC set to  0.000000
12/5/2012	6:24:06 PM	PH3 MFC set to  0.000000
12/5/2012	6:24:06 PM	SiCl4 MFC set to  0.000000
12/5/2012	6:24:06 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	6:24:06 PM	Tube furnace set to 0
12/5/2012	6:24:36 PM	H2 valve closed
12/5/2012	6:24:36 PM	BCl3 valve closed
12/5/2012	6:24:36 PM	PH3 valve closed
12/5/2012	6:24:36 PM	SiCl4 pre valve closed
12/5/2012	6:24:36 PM	SiCl4 post valve closed
12/5/2012	6:24:36 PM	Bypass valve closed
12/5/2012	6:24:36 PM	Bubbler valve closed
12/5/2012	6:24:36 PM	Helium valve opened
12/5/2012	6:24:36 PM	Main Vac valve opened
12/5/2012	6:24:36 PM	Helium MFC set to  20.000000
12/5/2012	6:24:36 PM	H2 MFC set to  0.000000
12/5/2012	6:24:36 PM	BCl3 MFC set to  0.000000
12/5/2012	6:24:36 PM	PH3 MFC set to  0.000000
12/5/2012	6:24:36 PM	SiCl4 MFC set to  0.000000
12/5/2012	6:24:36 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	6:24:36 PM	Tube furnace set to 0
12/5/2012	6:25:06 PM	Helium valve closed
12/5/2012	6:25:06 PM	H2 valve closed
12/5/2012	6:25:06 PM	BCl3 valve closed
12/5/2012	6:25:06 PM	PH3 valve closed
12/5/2012	6:25:06 PM	SiCl4 pre valve closed
12/5/2012	6:25:06 PM	SiCl4 post valve closed
12/5/2012	6:25:06 PM	Bypass valve closed
12/5/2012	6:25:06 PM	Bubbler valve closed
12/5/2012	6:25:06 PM	Main Vac valve opened
12/5/2012	6:25:07 PM	Helium MFC set to  0.000000
12/5/2012	6:25:07 PM	H2 MFC set to  0.000000
12/5/2012	6:25:07 PM	BCl3 MFC set to  0.000000
12/5/2012	6:25:07 PM	PH3 MFC set to  0.000000
12/5/2012	6:25:07 PM	SiCl4 MFC set to  0.000000
12/5/2012	6:25:07 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	6:25:07 PM	Tube furnace set to 0
12/5/2012	6:25:37 PM	H2 valve closed
12/5/2012	6:25:37 PM	BCl3 valve closed
12/5/2012	6:25:37 PM	PH3 valve closed
12/5/2012	6:25:37 PM	SiCl4 pre valve closed
12/5/2012	6:25:37 PM	SiCl4 post valve closed
12/5/2012	6:25:37 PM	Bypass valve closed
12/5/2012	6:25:37 PM	Bubbler valve closed
12/5/2012	6:25:37 PM	Helium valve opened
12/5/2012	6:25:37 PM	Main Vac valve opened
12/5/2012	6:25:37 PM	Helium MFC set to  20.000000
12/5/2012	6:25:37 PM	H2 MFC set to  0.000000
12/5/2012	6:25:37 PM	BCl3 MFC set to  0.000000
12/5/2012	6:25:37 PM	PH3 MFC set to  0.000000
12/5/2012	6:25:37 PM	SiCl4 MFC set to  0.000000
12/5/2012	6:25:37 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	6:25:37 PM	Tube furnace set to 0
12/5/2012	6:26:07 PM	Helium valve closed
12/5/2012	6:26:07 PM	H2 valve closed
12/5/2012	6:26:07 PM	BCl3 valve closed
12/5/2012	6:26:07 PM	PH3 valve closed
12/5/2012	6:26:07 PM	SiCl4 pre valve closed
12/5/2012	6:26:07 PM	SiCl4 post valve closed
12/5/2012	6:26:07 PM	Bypass valve closed
12/5/2012	6:26:07 PM	Bubbler valve closed
12/5/2012	6:26:07 PM	Main Vac valve opened
12/5/2012	6:26:07 PM	Helium MFC set to  0.000000
12/5/2012	6:26:07 PM	H2 MFC set to  0.000000
12/5/2012	6:26:07 PM	BCl3 MFC set to  0.000000
12/5/2012	6:26:07 PM	PH3 MFC set to  0.000000
12/5/2012	6:26:07 PM	SiCl4 MFC set to  0.000000
12/5/2012	6:26:07 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	6:26:07 PM	Tube furnace set to 0
12/5/2012	6:26:08 PM	Run finished at 6:26 PM
12/5/2012	6:26:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/5/2012	7:02:19 PM	Main Vac valve closed
12/5/2012	7:02:31 PM	Main Vac valve opened
12/5/2012	7:02:39 PM	Recipe started at 7:02 PM
12/5/2012	7:02:39 PM	Helium valve closed
12/5/2012	7:02:39 PM	H2 valve closed
12/5/2012	7:02:39 PM	BCl3 valve closed
12/5/2012	7:02:39 PM	PH3 valve closed
12/5/2012	7:02:39 PM	SiCl4 pre valve closed
12/5/2012	7:02:39 PM	SiCl4 post valve closed
12/5/2012	7:02:39 PM	Main Vac valve closed
12/5/2012	7:02:39 PM	Bypass valve closed
12/5/2012	7:02:39 PM	Bubbler valve closed
12/5/2012	7:02:39 PM	Helium MFC set to  0.000000
12/5/2012	7:02:39 PM	H2 MFC set to  0.000000
12/5/2012	7:02:39 PM	BCl3 MFC set to  0.000000
12/5/2012	7:02:39 PM	PH3 MFC set to  0.000000
12/5/2012	7:02:39 PM	SiCl4 MFC set to  0.000000
12/5/2012	7:02:39 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	7:02:39 PM	Tube furnace set to 0
12/5/2012	7:02:42 PM	Helium valve closed
12/5/2012	7:02:42 PM	BCl3 valve closed
12/5/2012	7:02:42 PM	PH3 valve closed
12/5/2012	7:02:42 PM	SiCl4 pre valve closed
12/5/2012	7:02:42 PM	SiCl4 post valve closed
12/5/2012	7:02:42 PM	Main Vac valve closed
12/5/2012	7:02:42 PM	Bypass valve closed
12/5/2012	7:02:42 PM	Bubbler valve closed
12/5/2012	7:02:42 PM	H2 valve opened
12/5/2012	7:02:42 PM	Helium MFC set to  0.000000
12/5/2012	7:02:42 PM	H2 MFC set to  500.000000
12/5/2012	7:02:42 PM	BCl3 MFC set to  0.000000
12/5/2012	7:02:42 PM	PH3 MFC set to  0.000000
12/5/2012	7:02:42 PM	SiCl4 MFC set to  0.000000
12/5/2012	7:02:42 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	7:02:42 PM	Tube furnace set to 0
12/5/2012	7:03:54 PM	Helium valve closed
12/5/2012	7:03:54 PM	BCl3 valve closed
12/5/2012	7:03:54 PM	PH3 valve closed
12/5/2012	7:03:54 PM	SiCl4 pre valve closed
12/5/2012	7:03:54 PM	SiCl4 post valve closed
12/5/2012	7:03:54 PM	Main Vac valve closed
12/5/2012	7:03:54 PM	Bypass valve closed
12/5/2012	7:03:54 PM	H2 valve opened
12/5/2012	7:03:54 PM	Bubbler valve opened
12/5/2012	7:03:54 PM	Helium MFC set to  0.000000
12/5/2012	7:03:54 PM	H2 MFC set to  500.000000
12/5/2012	7:03:54 PM	BCl3 MFC set to  0.000000
12/5/2012	7:03:54 PM	PH3 MFC set to  0.000000
12/5/2012	7:03:54 PM	SiCl4 MFC set to  0.000000
12/5/2012	7:03:54 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	7:03:54 PM	Tube furnace set to 0
12/5/2012	7:03:55 PM	Helium valve closed
12/5/2012	7:03:55 PM	BCl3 valve closed
12/5/2012	7:03:55 PM	PH3 valve closed
12/5/2012	7:03:55 PM	SiCl4 pre valve closed
12/5/2012	7:03:55 PM	SiCl4 post valve closed
12/5/2012	7:03:55 PM	Main Vac valve closed
12/5/2012	7:03:55 PM	Bypass valve closed
12/5/2012	7:03:55 PM	H2 valve opened
12/5/2012	7:03:55 PM	Bubbler valve opened
12/5/2012	7:03:55 PM	Helium MFC set to  0.000000
12/5/2012	7:03:55 PM	H2 MFC set to  500.000000
12/5/2012	7:03:55 PM	BCl3 MFC set to  0.000000
12/5/2012	7:03:55 PM	PH3 MFC set to  0.000000
12/5/2012	7:03:55 PM	SiCl4 MFC set to  0.000000
12/5/2012	7:03:55 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	7:03:55 PM	Tube furnace set to 1000
12/5/2012	7:33:55 PM	Helium valve closed
12/5/2012	7:33:55 PM	PH3 valve closed
12/5/2012	7:33:55 PM	Main Vac valve closed
12/5/2012	7:33:55 PM	Bypass valve closed
12/5/2012	7:33:55 PM	H2 valve opened
12/5/2012	7:33:55 PM	BCl3 valve opened
12/5/2012	7:33:55 PM	SiCl4 pre valve opened
12/5/2012	7:33:55 PM	SiCl4 post valve opened
12/5/2012	7:33:55 PM	Bubbler valve opened
12/5/2012	7:33:55 PM	Helium MFC set to  0.000000
12/5/2012	7:33:55 PM	H2 MFC set to  500.000000
12/5/2012	7:33:55 PM	BCl3 MFC set to  1.000000
12/5/2012	7:33:55 PM	PH3 MFC set to  0.000000
12/5/2012	7:33:55 PM	SiCl4 MFC set to  50.000000
12/5/2012	7:33:55 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	7:33:56 PM	Tube furnace set to 1000
12/5/2012	7:45:55 PM	Helium valve closed
12/5/2012	7:45:56 PM	BCl3 valve closed
12/5/2012	7:45:56 PM	PH3 valve closed
12/5/2012	7:45:56 PM	SiCl4 pre valve closed
12/5/2012	7:45:56 PM	SiCl4 post valve closed
12/5/2012	7:45:56 PM	Main Vac valve closed
12/5/2012	7:45:56 PM	Bypass valve closed
12/5/2012	7:45:56 PM	H2 valve opened
12/5/2012	7:45:56 PM	Bubbler valve opened
12/5/2012	7:45:56 PM	Helium MFC set to  0.000000
12/5/2012	7:45:56 PM	H2 MFC set to  500.000000
12/5/2012	7:45:56 PM	BCl3 MFC set to  0.000000
12/5/2012	7:45:56 PM	PH3 MFC set to  0.000000
12/5/2012	7:45:56 PM	SiCl4 MFC set to  0.000000
12/5/2012	7:45:56 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	7:45:56 PM	Tube furnace set to 750
12/5/2012	7:50:56 PM	H2 valve closed
12/5/2012	7:50:56 PM	BCl3 valve closed
12/5/2012	7:50:56 PM	PH3 valve closed
12/5/2012	7:50:56 PM	SiCl4 pre valve closed
12/5/2012	7:50:56 PM	SiCl4 post valve closed
12/5/2012	7:50:56 PM	Main Vac valve closed
12/5/2012	7:50:56 PM	Bypass valve closed
12/5/2012	7:50:56 PM	Helium valve opened
12/5/2012	7:50:56 PM	Bubbler valve opened
12/5/2012	7:50:56 PM	Helium MFC set to  500.000000
12/5/2012	7:50:56 PM	H2 MFC set to  0.000000
12/5/2012	7:50:56 PM	BCl3 MFC set to  0.000000
12/5/2012	7:50:56 PM	PH3 MFC set to  0.000000
12/5/2012	7:50:56 PM	SiCl4 MFC set to  0.000000
12/5/2012	7:50:56 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	7:50:56 PM	Tube furnace set to 0
12/5/2012	8:10:56 PM	Helium valve closed
12/5/2012	8:10:56 PM	H2 valve closed
12/5/2012	8:10:56 PM	BCl3 valve closed
12/5/2012	8:10:56 PM	PH3 valve closed
12/5/2012	8:10:56 PM	SiCl4 pre valve closed
12/5/2012	8:10:56 PM	SiCl4 post valve closed
12/5/2012	8:10:56 PM	Main Vac valve closed
12/5/2012	8:10:56 PM	Bypass valve closed
12/5/2012	8:10:56 PM	Bubbler valve closed
12/5/2012	8:10:56 PM	Helium MFC set to  0.000000
12/5/2012	8:10:56 PM	H2 MFC set to  0.000000
12/5/2012	8:10:56 PM	BCl3 MFC set to  0.000000
12/5/2012	8:10:56 PM	PH3 MFC set to  0.000000
12/5/2012	8:10:56 PM	SiCl4 MFC set to  0.000000
12/5/2012	8:10:56 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	8:10:56 PM	Tube furnace set to 0
12/5/2012	8:10:57 PM	Run finished at 8:10 PM
12/5/2012	9:14:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/5/2012	9:14:16 PM	Recipe started at 9:14 PM
12/5/2012	9:14:16 PM	Helium valve closed
12/5/2012	9:14:16 PM	H2 valve closed
12/5/2012	9:14:16 PM	BCl3 valve closed
12/5/2012	9:14:16 PM	PH3 valve closed
12/5/2012	9:14:16 PM	SiCl4 pre valve closed
12/5/2012	9:14:16 PM	SiCl4 post valve closed
12/5/2012	9:14:16 PM	Main Vac valve closed
12/5/2012	9:14:16 PM	Bypass valve closed
12/5/2012	9:14:16 PM	Bubbler valve closed
12/5/2012	9:14:16 PM	Helium MFC set to  0.000000
12/5/2012	9:14:16 PM	H2 MFC set to  0.000000
12/5/2012	9:14:16 PM	BCl3 MFC set to  0.000000
12/5/2012	9:14:16 PM	PH3 MFC set to  0.000000
12/5/2012	9:14:16 PM	SiCl4 MFC set to  0.000000
12/5/2012	9:14:16 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:14:16 PM	Tube furnace set to 0
12/5/2012	9:14:19 PM	H2 valve closed
12/5/2012	9:14:19 PM	BCl3 valve closed
12/5/2012	9:14:19 PM	PH3 valve closed
12/5/2012	9:14:19 PM	SiCl4 pre valve closed
12/5/2012	9:14:19 PM	SiCl4 post valve closed
12/5/2012	9:14:19 PM	Main Vac valve closed
12/5/2012	9:14:19 PM	Bypass valve closed
12/5/2012	9:14:19 PM	Bubbler valve closed
12/5/2012	9:14:19 PM	Helium valve opened
12/5/2012	9:14:19 PM	Helium MFC set to  500.000000
12/5/2012	9:14:19 PM	H2 MFC set to  0.000000
12/5/2012	9:14:19 PM	BCl3 MFC set to  0.000000
12/5/2012	9:14:19 PM	PH3 MFC set to  0.000000
12/5/2012	9:14:19 PM	SiCl4 MFC set to  0.000000
12/5/2012	9:14:19 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:14:19 PM	Tube furnace set to 0
12/5/2012	9:14:22 PM	Helium valve closed
12/5/2012	9:14:22 PM	H2 valve closed
12/5/2012	9:14:22 PM	BCl3 valve closed
12/5/2012	9:14:22 PM	PH3 valve closed
12/5/2012	9:14:22 PM	SiCl4 pre valve closed
12/5/2012	9:14:22 PM	SiCl4 post valve closed
12/5/2012	9:14:22 PM	Main Vac valve closed
12/5/2012	9:14:22 PM	Bypass valve closed
12/5/2012	9:14:22 PM	Bubbler valve closed
12/5/2012	9:14:22 PM	Helium MFC set to  0.000000
12/5/2012	9:14:22 PM	H2 MFC set to  0.000000
12/5/2012	9:14:22 PM	BCl3 MFC set to  0.000000
12/5/2012	9:14:22 PM	PH3 MFC set to  0.000000
12/5/2012	9:14:22 PM	SiCl4 MFC set to  0.000000
12/5/2012	9:14:22 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:14:22 PM	Tube furnace set to 0
12/5/2012	9:14:23 PM	Run finished at 9:14 PM
12/5/2012	9:14:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/5/2012	9:17:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/5/2012	9:17:14 PM	Recipe started at 9:17 PM
12/5/2012	9:17:14 PM	Helium valve closed
12/5/2012	9:17:14 PM	H2 valve closed
12/5/2012	9:17:14 PM	BCl3 valve closed
12/5/2012	9:17:14 PM	PH3 valve closed
12/5/2012	9:17:14 PM	SiCl4 pre valve closed
12/5/2012	9:17:14 PM	SiCl4 post valve closed
12/5/2012	9:17:14 PM	Main Vac valve closed
12/5/2012	9:17:14 PM	Bubbler valve closed
12/5/2012	9:17:14 PM	Bypass valve opened
12/5/2012	9:17:14 PM	Helium MFC set to  0.000000
12/5/2012	9:17:14 PM	H2 MFC set to  0.000000
12/5/2012	9:17:14 PM	BCl3 MFC set to  0.000000
12/5/2012	9:17:14 PM	PH3 MFC set to  0.000000
12/5/2012	9:17:14 PM	SiCl4 MFC set to  0.000000
12/5/2012	9:17:14 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:17:14 PM	Tube furnace set to 0
12/5/2012	9:18:33 PM	Helium valve closed
12/5/2012	9:18:33 PM	H2 valve closed
12/5/2012	9:18:33 PM	BCl3 valve closed
12/5/2012	9:18:33 PM	PH3 valve closed
12/5/2012	9:18:33 PM	SiCl4 pre valve closed
12/5/2012	9:18:33 PM	SiCl4 post valve closed
12/5/2012	9:18:33 PM	Main Vac valve closed
12/5/2012	9:18:33 PM	Bubbler valve closed
12/5/2012	9:18:33 PM	Bypass valve opened
12/5/2012	9:18:33 PM	Helium MFC set to  0.000000
12/5/2012	9:18:33 PM	H2 MFC set to  0.000000
12/5/2012	9:18:33 PM	BCl3 MFC set to  0.000000
12/5/2012	9:18:33 PM	PH3 MFC set to  0.000000
12/5/2012	9:18:33 PM	SiCl4 MFC set to  0.000000
12/5/2012	9:18:33 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:18:33 PM	Tube furnace set to 0
12/5/2012	9:19:33 PM	Helium valve closed
12/5/2012	9:19:33 PM	H2 valve closed
12/5/2012	9:19:33 PM	BCl3 valve closed
12/5/2012	9:19:33 PM	PH3 valve closed
12/5/2012	9:19:33 PM	SiCl4 pre valve closed
12/5/2012	9:19:33 PM	SiCl4 post valve closed
12/5/2012	9:19:33 PM	Bypass valve closed
12/5/2012	9:19:34 PM	Bubbler valve closed
12/5/2012	9:19:34 PM	Main Vac valve opened
12/5/2012	9:19:34 PM	Helium MFC set to  0.000000
12/5/2012	9:19:34 PM	H2 MFC set to  0.000000
12/5/2012	9:19:34 PM	BCl3 MFC set to  0.000000
12/5/2012	9:19:34 PM	PH3 MFC set to  0.000000
12/5/2012	9:19:34 PM	SiCl4 MFC set to  0.000000
12/5/2012	9:19:34 PM	Bypass solenoid MFC set to  0.000000
12/5/2012	9:19:34 PM	Tube furnace set to 0
12/5/2012	9:19:35 PM	Run finished at 9:19 PM
12/5/2012	9:19:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
